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CN105092032B - Transient state high resolution spectrometer based on F-P etalons - Google Patents

Transient state high resolution spectrometer based on F-P etalons Download PDF

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CN105092032B
CN105092032B CN201510366145.8A CN201510366145A CN105092032B CN 105092032 B CN105092032 B CN 105092032B CN 201510366145 A CN201510366145 A CN 201510366145A CN 105092032 B CN105092032 B CN 105092032B
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CN105092032A (en
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石锦卫
赵芸赫
李鸿暾
魏巍威
刘大禾
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Beijing Normal University
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Abstract

The invention is a kind of transient state high resolution spectral measuring apparatus, is related to high resolution spectral measuring field and transient state spectral measurement field.The high resolution spectral measuring apparatus realizes the high-resolution measurement to single impulse transient spectrum using the angle light splitting and the technology by concatenating multiple F P etalons of etalon itself.The invention can be applied to the high-resolution spectras fields of measurement such as Brillouin scattering, Zeemen effect, spintronics.

Description

基于F-P标准具的瞬态高分辨率光谱仪Transient High Resolution Spectrometer Based on F-P Etalon

技术领域technical field

本发明涉及一种基于标准具的串接多通技术而设计的瞬态高分辨率光谱仪,主要应用于布里渊散射等高分辨率光谱测量领域。The invention relates to a transient high-resolution spectrometer designed based on an etalon-connected multi-pass technology, which is mainly used in the field of high-resolution spectrum measurement such as Brillouin scattering.

背景技术Background technique

光谱分析一直是物理、化学、生物、材料等各个学科中最基本的分析测试方法之一,而超高分辨率光谱技术则是这个领域最前沿最尖端的技术。Spectral analysis has always been one of the most basic analytical and testing methods in various disciplines such as physics, chemistry, biology, and materials, and ultra-high resolution spectroscopy is the most cutting-edge technology in this field.

现有的光谱分析技术中,一类是主要通过FP干涉仪实现高分辨率光谱的扫描干涉仪,比如Burleigh公司研发的扫描FP干涉仪、JRS科学仪器公司研发的串接3+3布里渊散射光谱仪,这类仪器现在已经可以实现分辨率锐度>90,对比度>10000的分辨条件。由于它所具有的3+3串接多通系统,极大地提高了光谱的对比度。虽然扫描光谱仪可以实现<10MHz的扫描精度,但却无法实现实时测量,无法测量脉冲信号(1-100ns);除此之外,波长计作为一种高分辨率光谱测量仪器,在国内外也得到了广泛的使用。波长计一般可以得到10MHz的分辨率,然而一般时间响应都比较“慢”(微秒以上),仍然无法进行瞬态测量,并且波长计往往只给出一个波长,无法给出光谱,当其中存在多个模式或者激光器有跳模时波长计便无法满足测量要求。Among the existing spectral analysis technologies, one is the scanning interferometer that mainly realizes high-resolution spectrum through FP interferometer, such as the scanning FP interferometer developed by Burleigh Company, and the serial 3+3 Brillouin developed by JRS Scientific Instruments. Scattering spectrometers, which can now achieve resolution Resolution conditions for sharpness>90 and contrast>10000. Because of its 3+3 serial multi-pass system, it greatly improves the contrast of the spectrum. Although the scanning spectrometer can achieve a scanning accuracy of <10MHz, it cannot achieve real-time measurement and cannot measure pulse signals (1-100ns); in addition, the wavelength meter, as a high-resolution spectral measurement instrument, has also been recognized at home and abroad. widely used. The wavelength meter can generally obtain a resolution of 10MHz. However, the general time response is relatively "slow" (above microseconds), and it is still impossible to perform transient measurements, and the wavelength meter often only gives a wavelength and cannot give a spectrum. When there is When there are multiple modes or the laser has mode hopping, the wavelength meter cannot meet the measurement requirements.

另一类光谱仪可进行单脉冲瞬态光谱的测量,它可应用于自旋动力波的研究,包括载波调控和非线性效应等瞬态效应的研究,同时它也可应用于受激光调制的海洋激光雷达系统、大部分在脉冲激光泵浦条件下工作的随机激光系统和纳米激光器系统。其中,对于激光雷达这种在复杂环境下工作的系统而言,不能实时测量更意味着工作效率的极大降低,扫描对稳定性要求太高,甚至导致仪器失去现场测量能力。因此能同时实现实时测量和超精细光谱测量的光谱仪能在类似领域发挥巨大的作用。Another type of spectrometer can measure the single-pulse transient spectrum, which can be applied to the study of spin dynamic waves, including the study of transient effects such as carrier modulation and nonlinear effects, and it can also be applied to oceans modulated by lasers LiDAR systems, most stochastic laser systems and nanolaser systems operating under pulsed laser pumping conditions. Among them, for lidar, a system that works in a complex environment, the inability to measure in real time means that the work efficiency is greatly reduced, and the scanning has too high a stability requirement, and even causes the instrument to lose its on-site measurement capability. Therefore, a spectrometer that can realize real-time measurement and ultra-fine spectral measurement at the same time can play a huge role in similar fields.

2007年,法国科学家在Nature Photonics上发表了一篇文章,提出了一种非常紧凑的傅里叶变换布里渊散射光谱仪结构。这种光谱仪探测光波导倏逝波,然后通过傅里叶变换得到光谱,原则上可以实现瞬态测量,但是其最大的问题是灵敏度比较低,信噪比要求很高;同时,其光谱分辨率只能到几百MHz量级,限制了它的应用范围。除此之外,近年来迅速发展的光纤光谱仪可以实现动态光谱和瞬态光谱的测量,但受CCD或其他光敏阵列元件的限制,其光谱分辨率较低,同样不能满足需要高分辨率光谱测量的场合。In 2007, French scientists published an article on Nature Photonics, proposing a very compact Fourier transform Brillouin scattering spectrometer structure. This kind of spectrometer detects the evanescent wave of the optical waveguide, and then obtains the spectrum through Fourier transform. In principle, it can realize transient measurement, but its biggest problem is that the sensitivity is relatively low and the signal-to-noise ratio is very high; at the same time, its spectral resolution Only to the order of hundreds of MHz, which limits its application range. In addition, the fiber optic spectrometer developed rapidly in recent years can realize the measurement of dynamic spectrum and transient spectrum, but limited by CCD or other photosensitive array components, its spectral resolution is low, and it cannot meet the needs of high-resolution spectral measurement. occasions.

发明内容Contents of the invention

针对上述现有技术中高分辨率光谱和瞬态光谱测量不能兼得的缺陷,本发明所要解决的技术问题是提供一种能在获得高分辨率的同时,大幅度提高灵敏度的,且能测量单脉冲瞬态光谱的光谱仪。Aiming at the defect that the high-resolution spectrum and transient spectrum measurement in the prior art cannot be achieved at the same time, the technical problem to be solved by the present invention is to provide a method that can obtain a high resolution and greatly improve the sensitivity, and can measure a single Spectrometer for Pulse Transient Spectroscopy.

为了解决上述技术问题,本发明所提供的一种高分辨率光谱仪,其特征在于,由信号入射端起依次包括光束变换器,偏振棱镜,1/2波片,分光系统,三个反射镜呈环形串接,其中偏振棱镜,1/2波片以及三个呈环形串接的反射镜构成环形腔系统。最终信号回射入偏振棱镜,f≥0.8m的长焦定焦透镜,CCD(CCD可以是ICCD或者EMCCD,根据实际需要)。所述光束变换器由信号输入端起依次包括透镜,光阑,透镜,柱面透镜。所述分光系统由一个或多个标准具组成,多个标准具指的是两个及以上的标准具,多个标准具的自由光谱范围要求必须满足整数比例关系。比如我们可以将一个定腔长标准具和一个可变腔长标准具串接。透出柱面镜的信号依次经过定腔长标准具,可变光学腔长标准具,二者位置可互换。In order to solve the above-mentioned technical problem, a kind of high-resolution spectrometer provided by the present invention is characterized in that it comprises a beam converter, a polarizing prism, a 1/2 wave plate, a beam splitting system, and three reflectors in sequence from the signal incident end. Ring series, in which a polarizing prism, a 1/2 wave plate and three mirrors connected in series form a ring cavity system. The final signal is reflected back into a polarizing prism, a telephoto fixed-focus lens with f ≥ 0.8m, and a CCD (CCD can be ICCD or EMCCD, according to actual needs). The light beam converter includes a lens, a diaphragm, a lens and a cylindrical lens sequentially from the signal input end. The spectroscopic system is composed of one or more etalons. The multiple etalons refer to two or more etalons. The free spectral range of the multiple etalons must satisfy the integer proportional relationship. For example, we can connect a fixed cavity length etalon and a variable cavity length etalon in series. The signal transmitted through the cylindrical mirror passes through the fixed-cavity-length etalon and the variable optical-cavity-length etalon in sequence, and the positions of the two are interchangeable.

本发明解决技术问题的方案是:入射信号首先经过光束变换器中的准直系统变为平行光,然后通过柱透镜后变成柱面波,柱面波入射到偏振棱镜上,其中p分量经1/2波片后变为s分量,接着进入由定腔长标准具+可变光学腔长标准具所组成的分光系统,分光后的光线顺时针经过环形腔系统后会再次被偏振棱镜反射进入1/2波片,这时s分量经1/2波片后又重新变为p分量,再次顺时针通过环形腔系统。最终透过偏振棱镜到达聚焦元件,通过聚焦元件的聚焦使不同波长的光在透镜的后焦面上将形成分离的点状光谱,最后使用CCD在透镜的后焦面对信号进行成像,完成光谱的测量;而最初的s分量被任意光学表面反射后逆时针经环形腔系统射出系统。The solution of the present invention to solve the technical problem is: the incident signal first passes through the collimation system in the beam converter to become parallel light, and then becomes a cylindrical wave after passing through the cylindrical lens, and the cylindrical wave is incident on the polarizing prism, wherein the p component passes through the After the 1/2 wave plate, it becomes the s component, and then enters the spectroscopic system composed of fixed cavity length etalon + variable optical cavity length etalon, and the split light passes through the ring cavity system clockwise and is reflected by the polarizing prism again Entering the 1/2 wave plate, at this time, the s component passes through the 1/2 wave plate and becomes the p component again, and passes through the ring cavity system clockwise again. Finally, it passes through the polarizing prism and reaches the focusing element. Through the focusing of the focusing element, the light of different wavelengths will form a separated point spectrum on the rear focal plane of the lens. Finally, the CCD is used to image the signal on the rear focal plane of the lens to complete the spectrum. The measurement of ; while the initial s component is reflected by any optical surface and exits the system counterclockwise through the ring cavity system.

本发明的技术优势如下:利用本发明提供的瞬态高分辨率光谱仪,由于使用了柱透镜和法布里-珀罗标准具组成的光谱仪,出射信号只在x方向有空间频率,y方向仍然保持平面波特性,因此这种光谱仪使得原本等倾干涉条纹每一级光谱中,原来分散在圆环上的信号的能量集中在两个点上,增强了信号的强度和信噪比,显著提高了信号的强度以及接收系统的数据传输速度,从而提高了系统对弱信号的探测灵敏度;又由于采用标准具的空间角度分光替代了扫描干涉仪的腔长扫描分光,因此可以满足大多数瞬态光谱的测量;同时又开发了标准具的串接多通技术,因此如果两块标准具的厚度为整数倍关系,则厚标准具的级次是薄标准具的m倍,最终主极大的位置由薄标准具决定;同时,主极大的宽度则由厚标准具决定。最终使得串接标准具系统在保持其瞬态信号分光能力的同时还实现了大的自由光谱范围(FSR)和窄的谱线宽度。同理,多通技术实际上等价于两个全同标准具的串接,FSR没有明显变化,但是谱线宽度会被进一步压缩。The technical advantages of the present invention are as follows: Utilize the transient high-resolution spectrometer provided by the present invention, owing to have used the spectrometer that cylindrical lens and Fabry-Perot etalon form, the outgoing signal only has spatial frequency in x direction, and y direction still has spatial frequency. Maintaining the characteristics of the plane wave, this spectrometer makes the energy of the signal scattered on the circular ring concentrate on two points in each order spectrum of the original equal-tilt interference fringe, which enhances the signal strength and signal-to-noise ratio, and significantly improves the The strength of the signal and the data transmission speed of the receiving system improve the detection sensitivity of the system for weak signals; and because the space angle spectroscopy of the etalon is used instead of the cavity length scanning spectroscopy of the scanning interferometer, it can meet the requirements of most transient spectra. At the same time, the series connection multi-pass technology of the etalon has been developed, so if the thickness of the two etalons is an integer multiple, the order of the thick etalon is m times that of the thin etalon, and the final position of the main maximum determined by the thin etalon; meanwhile, the width of the main maximum is determined by the thick etalon. Finally, the tandem etalon system achieves a large free spectral range (FSR) and a narrow spectral line width while maintaining its transient signal splitting ability. In the same way, multi-pass technology is actually equivalent to the series connection of two identical etalons, and the FSR does not change significantly, but the spectral line width will be further compressed.

因此分光系统中定腔长标准具+可变光学腔长标准具的光路配置方案既可以调节至两标准具厚度成倍数关系,用于分辨率要求不是非常高,但是自由光谱要求比较宽的情况;也可以调节至两标准具等厚,用于小自由光谱范围精细光谱的测量。Therefore, the optical path configuration scheme of the fixed cavity length etalon + variable optical cavity length etalon in the spectroscopic system can be adjusted to the multiple relationship between the thickness of the two etalons, which is used when the resolution requirement is not very high, but the free spectrum requirement is relatively wide ; It can also be adjusted to the equal thickness of the two etalons for the measurement of fine spectra in a small free spectral range.

附图说明Description of drawings

附图1为整个系统的结构示意和光路图Accompanying drawing 1 is the structural diagram and light path diagram of the whole system

附图2为光束变换系统的示意图。Accompanying drawing 2 is the schematic diagram of beam conversion system.

其中1-透镜1;2-光阑;3-透镜2;4-柱面透镜1-lens 1; 2-stop; 3-lens 2; 4-cylindrical lens

具体实施方式Detailed ways

以下结合附图说明对本发明的实施例作的进一步详细描述,但本实施例并不限制别发明,凡是采用本发明的相似结构及其相似变化,均应列入本发明的保护范围。The embodiments of the present invention are described in further detail below in conjunction with the accompanying drawings, but the present embodiments do not limit other inventions, and all similar structures and similar changes of the present invention should be included in the scope of protection of the present invention.

如附图1所示,本发明实例所提供的是一种利用1个或多个F-P标准具的串接多通技术来实现同时测量高分辨率光谱和瞬态光谱的光谱仪装置。包括了由透镜1(1)、光阑(2)、透镜2(3)、柱面透镜组成的光束变换器系统,偏振棱镜、1/2波片及三个反射镜呈环形串接组成的环形腔系统,一个定腔长标准具与一个可变光学腔长标准具组成的分光系统,聚焦透镜和CCD。其中标准具折射率n=1.4607,反射率R=0.99,定腔长厚度h>23.2mm;聚焦透镜焦距f≥lm,CCD像素l=16μm,CCD像元数:1024×1024。入射光线首先通过如图2所示的光束变换器系统,具体过程为:透镜1(1)将入射光聚焦成点光源投在针孔光阑上。其中光阑处于透镜1(1)和透镜2(3)的焦平面上。光线通过光阑的空间滤波后,由透镜2(3)进行发散得到平行光。光线通过一个定制的柱面透镜(4),从球面波变为柱面波,只在x方向具有空间频率,y方向保持平面波特性。As shown in Figure 1, the example of the present invention provides a spectrometer device that utilizes one or more F-P etalon serial connection multi-pass technology to simultaneously measure high-resolution spectrum and transient spectrum. It includes a beam converter system composed of lens 1 (1), diaphragm (2), lens 2 (3), cylindrical lens, polarizing prism, 1/2 wave plate and three mirrors connected in series in a ring. Ring cavity system, a spectroscopic system composed of a fixed cavity length etalon and a variable optical cavity length etalon, focusing lens and CCD. Among them, the refractive index of the etalon is n=1.4607, the reflectivity R=0.99, the fixed cavity length and thickness h>23.2mm; the focal length of the focusing lens is f≥lm, the CCD pixel l=16μm, and the number of CCD pixels: 1024×1024. The incident light first passes through the beam converter system shown in Figure 2, and the specific process is as follows: the lens 1 (1) focuses the incident light into a point light source and casts it on the pinhole diaphragm. Wherein the diaphragm is on the focal plane of lens 1(1) and lens 2(3). After the light passes through the spatial filtering of the diaphragm, it is diverged by the lens 2 (3) to obtain parallel light. The light passes through a custom-made cylindrical lens (4), changing from a spherical wave to a cylindrical wave, which only has spatial frequency in the x direction, and maintains the plane wave characteristic in the y direction.

柱面波入射到偏振棱镜上,其中P分量顺时针经过环形腔两次,最后到达聚焦元件和ICCD等面阵探测器完成光谱最终测定,这就是所谓的多通技术。在这个过程中p分量两次经过分光系统和反射镜组。其中分光系统包括一个定腔长F-P标准具和一个可变光学腔长F-P标准具。这就是所说的串接标准具系统。当定腔长F-P标准具与可变光学腔长的厚度不一样时,可以实现大的自由光谱范围(FSR)和窄的谱线宽度;当两个标准具的厚度相同时,FSR与单个标准具时没有变化,但是谱线宽度被进一步压缩,因此使用多个标准具串接的方式可以实现高分辨率光谱的分光要求,同时可以根据需求调节可变光学腔长F-P标准具的腔长和更换定腔长F-P标准具来满足不同的测量需求。在柱面波入射到偏振棱镜后,另一个分量即s分量会被任意光学表面反射后逆时针经过环形腔系统出射。The cylindrical wave is incident on the polarizing prism, and the P component passes through the ring cavity twice clockwise, and finally reaches the focusing element and the area array detector such as ICCD to complete the final measurement of the spectrum. This is the so-called multi-pass technology. In this process, the p component passes through the spectroscopic system and mirror group twice. The spectroscopic system includes a fixed cavity length F-P etalon and a variable optical cavity length F-P etalon. This is the so-called cascaded etalon system. When the thickness of the fixed cavity length F-P etalon is different from that of the variable optical cavity length, a large free spectral range (FSR) and narrow spectral line width can be achieved; when the thickness of the two etalons is the same, the FSR is the same as a single There is no change in time, but the spectral line width is further compressed, so the use of multiple etalons in series can achieve the spectroscopic requirements of high-resolution spectra, and the cavity length and variable optical cavity length F-P etalon can be adjusted according to requirements. Replace the fixed cavity length F-P etalon to meet different measurement needs. After the cylindrical wave is incident on the polarizing prism, another component, namely the s component, will be reflected by any optical surface and exit through the ring cavity system counterclockwise.

完成分光后的光线进入由三个如图1所示形式摆放的反射镜组。反射镜1与+x轴方向呈135°放置,光线通过反射镜1由+x方向传播变为沿-y轴方向传播。反射镜2与+x方向呈45°放置,光线通过反射镜2由-y方向传播变为沿-x方向传播。通过与反射镜1平行的反射镜3的反射,光线传播方向从-x方向变为+y方向。经过反射镜3反射的光线要求全部垂直入射到与反射镜3相对的偏振棱镜中。After the light splitting is completed, the light enters the group of three reflectors arranged in the form shown in FIG. 1 . The mirror 1 is placed at an angle of 135° to the +x-axis direction, and the light propagates through the mirror 1 from the +x direction to the -y-axis direction. The reflector 2 is placed at an angle of 45° to the +x direction, and the light propagates through the reflector 2 from the -y direction to the -x direction. Through the reflection of the mirror 3 parallel to the mirror 1, the light propagation direction changes from the -x direction to the +y direction. All the light rays reflected by the reflector 3 are required to be perpendicularly incident on the polarizing prism opposite to the reflector 3 .

光线到达长焦定焦透镜,进过该透镜的聚焦,平行光汇聚并投射在面阵光学感光元件上从而完成光谱的测定。光学感光元件为ICCD、EMCCD等感光元件,可以根据实际需要进行选择。The light reaches the telephoto fixed-focus lens, enters the focus of the lens, and the parallel light converges and projects on the area array optical photosensitive element to complete the measurement of the spectrum. Optical photosensitive elements are photosensitive elements such as ICCD and EMCCD, which can be selected according to actual needs.

Claims (4)

1. the transient state high-resolution light-splitting method based on F-P etalons, it is characterised in that:It is concatenated by multiple F-P etalons Mode improves the resolution ratio and Free Spectral Range of spectrometer, and Real-Time Optical is realized in the space light splitting ability using F-P etalons The requirement of high-resolution, wide Free Spectral Range can be realized while spectrum detection again;Incoming signal first passes around beam converter In colimated light system become directional light, then by becoming cylindrical wave after cylindrical lens, cylindrical wave is incident on devating prism, wherein P-component becomes s components after 1/2 wave plate, subsequently enters the beam splitting system being made of concatenation etalon, and the light after light splitting is suitable Hour hands can be reflected into 1/2 wave plate by devating prism again after annular chamber system, and at this moment s components are again heavy after 1/2 wave plate Newly become p-component, again clockwise through annular chamber system, concentrating element is reached finally through devating prism, by focusing member The focusing of part makes the light of different wave length that will form the dotted spectrum of separation on the back focal plane of lens, finally uses CCD in lens Back focal plane signal is imaged, complete transient state high-resolution spectra real-time measurement;And initial s components are by arbitrary optics table After the reflection of face system is projected through annular chamber system counterclockwise.
2. the transient state high resolution spectrometer based on F-P etalons, it is characterised in that:By light incident side, light beam is respectively included Converter, devating prism, 1/2 wave plate, beam splitting system, annular chamber system, concentrating element and planar array detector;
Incident light is converted to cylindrical wave by beam converter by spherical wave, then by devating prism, wherein p-component is through 1/2 wave Piece enters beam splitting system, and the light after light splitting can be reached by devating prism after the circle of annular chamber system two focus member clockwise Part makes the light projection of different wave length on planar array detector, completes the measurement of spectrum by the focusing of concentrating element;S component quilts After reflection system is projected through loop system counterclockwise;The beam splitting system include multiple FP etalons, each etalon from It is integral multiple relation by spectral region, multiple etalons refer to two or more etalons;The optical beam transformation The light beam conversion element of device is two lens, diaphragm and cylindrical lens composition;The annular chamber system is gone here and there in a ring by three Plane mirror, devating prism and the 1/2 wave plate composition connect.
3. the transient state high resolution spectrometer based on F-P etalons according to right 2, it is characterised in that:Using by one Determine the long etalon of chamber to concatenate with a long etalon of variable optical chamber.
4. the transient state high resolution spectrometer based on F-P etalons according to right 2, it is characterised in that:Concentrating element is f The focal length fix-focus lens of >=0.8m, planar array detector are ICCD or EMCCD, and pixel dimension is more than or equal to 16 μm, and pixel number is more than It is equal to:1024×1024.
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