CN104807761A - Design method of spectrograph for realizing micro-area spectral measurement - Google Patents
Design method of spectrograph for realizing micro-area spectral measurement Download PDFInfo
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- CN104807761A CN104807761A CN201510236181.2A CN201510236181A CN104807761A CN 104807761 A CN104807761 A CN 104807761A CN 201510236181 A CN201510236181 A CN 201510236181A CN 104807761 A CN104807761 A CN 104807761A
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Abstract
The invention discloses a design method of a spectrograph which can be used for realizing micro-area spectral measurement. The design method comprises the following steps of (1), imaging a to-be-measured sample into the plane of an area-selection micropore plate by using an imaging system; (2), enabling light rays in a micropore area to penetrate through micropores to enter a spectrum analyzing element for carrying out spectral analysis and measurement; (3), reflecting light rays outside the micropore area by using a high-reflectance film on the micropore plate, and reflecting the light rays through a half-transparent and half-reflecting mirror; (4), imaging reflected light from the half-transparent and half-reflecting mirror into the plane of an image recording element (such as a CCD (charge coupled device)) by an imaging lens; (5), by moving the position of the sample, capably imaging different areas needing to be measured into the micropores to carry out the spectral analysis and measurement. The spectrograph can be used independently or be used by being united with a microscope. According to the design method of the spectrograph for realizing the micro-area spectral measurement, the selection of the area to be measured is realized by utilizing the micropores, and the measurement of the transmission spectrum, the reflectance spectrum, the absorption spectrum and the fluorescence spectrum of a sample of which the size reaches a micron magnitude even a nanometer magnitude can be realized.
Description
Technical field
The present invention relates to spectral measurement methods field, be specifically related to a kind of spectrometer design method realizing micro-section spectral measurement, it is applicable to the spectrum such as transmission, reflection, Absorption and fluorescence detecting micro/nano-scale object or sample area.
Background technology
Spectrometer is by people's widespread use.Can be formed for element by spectral detection, the various material character such as band structure studies.
Such as No. 2006800243929th, Chinese patent application discloses a kind of spectrometer equipment, it comprises the pulsed radiation beam generator for generating the impulse radiation bundle with predetermined radiation wavelengths, there is multiple chambeies pattern and each chamber pattern has the optics cavity of chamber pattern wavelength, jittering device, be positioned at described optics cavity and comprise photo-acoustic cell and the detector of the sample that will analyze, wherein jittering device is for making the described radiation wavelength of described impulse radiation bundle and/or the raw shake of described multiple chambeies mode wave long hair, thus make described impulse radiation bundle be coupled in described optics cavity quasi-continuously, detector is for detecting the pressure wave generated in photo-acoustic cell when the radiation of sample absorbance from described impulse radiation bundle, and generate detector output signal, can by processing the concentration value of the absorbing material determined in described sample to described detector output signal.
And above-mentioned spectrometer hot spot is larger, general at millimeter or centimetres, if when using it to carry out spectral measurement for micro-nano sample, most of ray energy is outside region to be measured, comparatively big error is caused for final measurement result, even makes to measure and obtain spectrum.Seriously constrain the research being directed to micro-nano material spectral quality.
Summary of the invention
In order to solve the problems of the technologies described above, necessaryly provide a kind of spectrometer realized for spectral information measuring and analysis in tiny area in micro-nano sample and sample.In the urgent need to one.This spectrometer can be widely used in the fields such as material science, Aero-Space, medical science, physics, bio-science.
According to technical scheme of the present invention, provide a kind of spectrometer design method realizing micro-section spectral measurement, it comprises the following steps:
(1) imaging system is utilized by sample imaging to be measured in the plane of regional choice aperture plate;
(2) light in orifice region enters spectral analysis element through aperture and carries out spectral analysis and measurement;
(3) light of orifice region outside is reflected by the highly reflecting films on aperture plate, and via a semi-transparent semi-reflecting lens reflection;
(4) reflected light of semi-transparent semi-reflecting lens by an imaging len imaging to image recording element (as CCD) plane;
(5) by mobile example position, spectral analysis measurement can be carried out to needing the zones of different imaging of measuring to aperture.
Wherein, being realized for the selection of measured zone by regional choice aperture plate described in step (1), this aperture can be any shapes such as rectangle, circle, ellipse, depending on actual demand.Step (2) only carries out spectral analysis for the light in orifice region, and extra-regional light does not enter spectral analysis element.Light outside step (3) orifice region is reflected by the highly reflecting films on aperture plate, these highly reflecting films be high reflecting metal film, deielectric-coating etc. other can realize the membraneous material of high reflectance.This reflected light reflects via semi-transparent semi-reflecting lens, and semi-transparent semi-reflecting lens light splitting ratio can be 10: 90,30: 70, and 50: 50 or any other ratio, determined by actual conditions.Light outside step (4) orifice region finally shows via imaging len imaging and by image recording element record, this step is used for the observation imaging for testing sample surface topography, and conveniently judge the position of aperture in object image planes, i.e. the selected regional location measured of aperture.Step (5) realizes for the selection of measured zone and movement by mobile example, can use manually or electricity driving displacement platform realizes sample and moves.
Compared with existing conventional spectrometers, microscopic spectrum instrument provided by the invention utilizes the realization of aperture flat board for the selection in region to be measured, and completes the measurement for target micro/nano-scale region and micro-nano sample sizes spectral information.By regulating enlargement ratio or the orifice size size of imaging system, the adjustment of measured zone size can be realized.Utilize semi-transparent semi-reflecting lens and image recording element further, can the judgement of real-time monitored sample surface morphology and regional location to be measured, operate simple and easy, easy to use.
Accompanying drawing explanation
Fig. 1 is according to the micro-section spectral measurement system schematic diagram realizing micro-section spectral measurement of the present invention.
Fig. 2 is regional choice plate structure schematic diagram.
Fig. 3 is that image recording element 7 records image example.
Fig. 4 is according to sample imaging system schematic diagram of the present invention.
Fig. 5 is spectral measurement regional choice aperture plate and spectral measurement system schematic diagram.
Fig. 6 is image digitazation register system schematic diagram.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only a part of embodiment of the present invention, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.Additionally, protection scope of the present invention only should be limited to following concrete structure or parts or design parameter.
According to a first aspect of the present invention, microscopic spectrum instrument of the present invention comprises an object to be analyzed, an imaging system, a semi-transparent semi-reflecting lens, a regional choice aperture plate, a spectral analysis element, an imaging len and an image recording element (as CCD); Described object to be analyzed, by imaging system, images in regional choice aperture plate plane; Aperture plate surface has highly reflective, but its central small hole place is light-permeable part.The light be radiated in orifice region enters spectral analysis element by aperture and carries out spectral analysis.Reflected through semi-transparent semi-reflecting lens by the light that aperture plate reflects, after through imaging len imaging to image recording element, realize real-time monitored and the selection of object under test surface topography and regional extent to be measured.As shown in Figure 1.
A second aspect of the present invention, provides a kind of method realizing micro-section spectral measurement.The method for designing that the present invention proposes can realize spectral measurement for micro-nano sample and analysis.The method comprises the following steps:
(1) imaging system is utilized by sample imaging to be measured in the plane of regional choice aperture plate;
(2) light in orifice region enters spectral analysis element through aperture and carries out spectral analysis and measurement;
(3) light of orifice region outside is reflected by the highly reflecting films on aperture plate, and via a semi-transparent semi-reflecting lens reflection;
(4) reflected light of semi-transparent semi-reflecting lens by an imaging len imaging to image recording element (as CCD) plane;
(5) by mobile example position, spectral analysis measurement can be carried out to needing the zones of different imaging of measuring to aperture.
Wherein, being realized for the selection of measured zone by regional choice aperture plate described in step (1), this aperture can be any shapes such as rectangle, circle, ellipse, depending on actual demand.Step (2) only carries out spectral analysis for the light in orifice region, and extra-regional light does not enter spectral analysis element.Light outside step (3) orifice region is reflected by the highly reflecting films on aperture plate, these highly reflecting films be high reflecting metal film, deielectric-coating etc. other can realize the membraneous material of high reflectance.This reflected light reflects via semi-transparent semi-reflecting lens, and semi-transparent semi-reflecting lens light splitting ratio can be 10: 90,30: 70, and 50: 50 or any other ratio, determined by actual conditions.Light outside step (4) orifice region finally shows via imaging len imaging and by image recording element record, this step is used for the observation imaging for testing sample surface topography, and conveniently judge the position of aperture in object image planes, i.e. the selected regional location measured of aperture.Step (5) realizes for the selection of measured zone and movement by mobile example, can use manually or electricity driving displacement platform realizes sample and moves.
Below in conjunction with accompanying drawing, the present invention is further described, and Fig. 1 is according to the micro-section spectral measurement system schematic diagram realizing micro-section spectral measurement of the present invention.Wherein reference numeral is as follows: object under test (sample) 1, imaging system 2, semi-transparent semi-reflecting lens 3, regional choice aperture plate 4, spectral analysis element 5, imaging len 6, image recording element 7, aperture plate reflector space 8, aperture plate central small hole 9, object under test at image recording element surface imaging 10, aperture at image recording element surface imaging (for square aperture) 11.Fig. 2 is regional choice plate structure schematic diagram.Plate central area 9 is transmission region, and aperture perimeter 8 has high reflectance.Fig. 3 is that image recording element 7 records image example, and wherein black region 11 is regional choice plate 4 central small hole imaging on image recording element 7, and remainder 10 is by the sample topography picture of 7 records.Fig. 4 is according to sample imaging system schematic diagram of the present invention, and sample 1 is through lens combination 2 imaging to plane 14, and sample can adopt transmission-type or reflective illumination.When adopting transmission-type illumination, light source 12 is unlocked, and close 13, light source width penetrates light 16 irradiation sample from below; When adopt reflective illumination time, light source 13 is opened, close 12, radiation of light source light 16 through semi-transparent semi-reflecting lens 3 reflection after from top irradiation sample.
Fig. 5 is that spectral measurement regional choice aperture plate and spectral measurement system are not intended to, and sample is through imaging system images, and respective ray of light 15 focuses on plane 4, and the light in the planar orifice region of falling will enter spectrometer through aperture and carry out spectral analysis.The light dropped on outside orifice region is reflected.
Fig. 6 is image digitazation register system schematic diagram, and the light reflected through regional choice aperture plate 4 reflects through semi-transparent semi-reflecting lens 3, via lens 6 imaging in image recording element 7.
The present invention is realized by following proposal: consult Fig. 1, first build the imaging that an imaging system (or adopting commercial microscope) 2 realizes testing sample, this imaging system can adopt other lighting systems such as transmission-type illumination, reflective illumination or diffuse transmission type illumination.According to transmission-type illumination, then the final spectrum measured is transmitted spectrum; According to reflective illumination, then the final spectrum measured is reflectance spectrum; According to diffuse transmission type illumination, then the final spectrum measured is scattering spectrum.Absorption spectrum is calculated by 100%-transmitted spectrum-reflectance spectrum.Described object to be analyzed, by imaging system 2, images in regional choice aperture plate 4 plane; There is the coating 8 of high reflectance on aperture plate surface, but its central small hole 9 place no reflection events coating, light-permeable.The light be radiated in orifice region enters spectral analysis element 5 by aperture and carries out spectral analysis.Then reflected through semi-transparent semi-reflecting lens 3 by the light that aperture plate reflects, after through imaging len 6 imaging to image recording element 7, realize real-time monitored and the selection of object under test surface topography and regional extent to be measured.
Particularly, regional choice aperture plate (consulting Fig. 2) surface 8 can use plating to establish the means such as metal film or deielectric-coating to realize high reflectance, and its center light hole 9 can use the process means such as focused-ion-beam lithography, electron beam exposure, chemical corrosion to carry out processing and obtain.Its shape may be selected to be the shapes such as circle, rectangle, triangle, ellipse.Concrete shape can per sample or need the region shape measured to select.
Sample light reflects through aperture plate and semi-transparent semi-reflecting lens 3, and semi-transparent semi-reflecting lens light splitting ratio can be 10: 90,30: 70, and 50: 50 or any other ratio, determined by actual conditions.
Carried out showing and record in imaging len 6 imaging to image-forming component 7 by the light that semi-transparent semi-reflecting lens reflects, its effect schematic diagram is see Fig. 3.Be object under test imaging 10 on image-forming component in region, the picture that middle black region 11 is become by aperture plate central small hole, reflected because light major part is rare through aperture, therefore show as black on image-forming component, shape is identical with hole shape.So can real time monitoring sample surface morphology easily, the position in the tested region of sample surfaces can be learnt simultaneously.
By regulating the position of sample or regulating the position of overall imaging system and spectrometer can realize the selection of the tested regional location of sample surfaces.Conveniently realize analysis and the collection of the multiple region of sample surfaces or multiple sample spectra information.The movement of sample or system realizes by electronic or manual displacement system or mechanism.
Further, the invention provides a kind of method realizing micro-section spectral measurement, also can specifically comprise the following steps:
Step (one), build an imaging system (in accompanying drawing 1 2) for realizing for testing sample (in accompanying drawing 1 1) imaging, this imaging system can be made up of the combination of simple lens or multiple lens; Or in order to obtain for the higher image quality of micro-nano sample, this imaging system also can adopt commercial microscope.This imaging system can adopt other lighting systems such as transmission-type illumination, reflective illumination or diffuse transmission type illumination.According to transmission-type illumination, in accompanying drawing 4, light source 12 is lit, and close light source 13 in accompanying drawing 4, sample is illuminated by the light source (in accompanying drawing 4 12) from transmission direction simultaneously, and imaging, now the final spectrum measured is transmitted spectrum; According to reflective illumination, accompanying drawing 4 light source 13 is lit, and closes accompanying drawing 4 light source 12 simultaneously, light illumination light reflects via semi-transparent semi-reflecting lens (in accompanying drawing 4 3), from imaging optical path direction directive sample, and illuminated by sample and imaging, now the final spectrum measured is reflectance spectrum; According to diffuse transmission type illumination (not drawing in accompanying drawing 4), then the final spectrum measured is scattering spectrum.Absorption spectrum is calculated by 100%-transmitted spectrum-reflectance spectrum.
Step (two), after imaging system, before imaging surface, place semi-transparent semi-reflecting lens (in accompanying drawing 1 3), its angle becomes 45 degree with imaging system optical axis.
Step (three), imaging surface is placed narrow meshed measured zone option board (in accompanying drawing 1 4), and on plate, hole shape can adopt shape or other shapes in accompanying drawing 2 by demand.The region light-permeable in hole, other regions of plate are for having high reflectance.By aperture through light the spectrometer entered below (in accompanying drawing 1 5) is carried out spectral information analysis.
Step (four), is reflected by semi-transparent semi-reflecting lens (in accompanying drawing 1 3) by the light that regional choice plate (in accompanying drawing 1 4) is reflected back.The transmission path of emission of light is placed lens (in accompanying drawing 1 6), by the light focusing that is reflected back by regional choice plate in image recording element (in accompanying drawing 1 7) plane, namely picture reflecting film reflects, semi-transparent semi-reflecting lens 3 on regional choice plate 4 in plane 4 reflect, and are imaged on image recording element by lens 6.The final effect seen on image recording element 7 is shown in accompanying drawing 3.Middle black region is the picture of orifice region on regional choice plate, this region is the analyzed region of spectrum, and [its shape is determined by hole shape (accompanying drawing 2), illustrate for rectangular apertures in figure], around bright areas is become wire-frame image by sample, so can the position of Real Time Observation spectral analysis region on sample, measured zone position can be adjusted in real time, and observe sample surfaces form simultaneously.
Realize the method for above-mentioned micro-section spectral measurement system, it comprise imaging system, spectral measurement regional choice and spectra collection parts and sample numeral image recording components.
As shown in Figure 4, imaging system is used for carrying out imaging to testing sample, gives two kinds of lighting systems, transillumination and reflective illumination in figure.When adopting transmission-type illumination, light source 12 is lit, and closes light source 13 simultaneously, the illuminated from bottom to top and imaging of sample; When adopting reflective illumination, light source 13 is lit, simultaneously closedown light source 12, the illuminated from top to bottom and imaging of sample;
As shown in Figure 5, spectral measurement regional choice and spectra collection parts are used for regional choice to be measured, and carry out record analysis for spectral information.4 of module two overlaps in locus with the image planes 14 of module one, then drop on regional choice plate 4 in the heart the light of orifice region inside will enter subsequent optical spectrometer 5 and carry out spectral analysis, and the light of aperture outside is by by the high reverse--bias regional reflex outside regional choice plate aperture, and not by spectrometer analysis;
As shown in Figure 6, sample numeral image recording components is used for carrying out imaging and record to the light that regional choice plate is reflected back.By the light that regional choice plate 4 reflects, after semi-transparent semi-reflecting lens 3 reflects, enter lens 6, imaging, in image recording element 7, finally obtains image as shown in Figure 3, and its center black region is the analyzed region of spectrum.
The above; be only the present invention's preferably embodiment, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed within protection scope of the present invention.This area those skilled in the art are appreciated that when not deviating from the spirit and scope of the present invention of claims definition, can make various amendment in form and details.
Claims (6)
1. can realize a spectrometer design method for micro-section spectral measurement, it comprises the following steps:
(1) imaging system is utilized by sample imaging to be measured in the plane of regional choice aperture plate;
(2) light in orifice region enters spectral analysis element through aperture and carries out spectral analysis and measurement;
(3) light of orifice region outside is reflected by the highly reflecting films on aperture plate, and via a semi-transparent semi-reflecting lens reflection;
(4) reflected light of semi-transparent semi-reflecting lens by an imaging len imaging to image recording element (as CCD) plane;
(5) by mobile example position, spectral analysis measurement can be carried out to needing the zones of different imaging of measuring to aperture.
2. the spectrometer design method realizing micro-section spectral measurement according to claim 1, it is characterized in that, realize for the selection of measured zone by regional choice aperture plate described in step (1), this aperture can be any shapes such as rectangle, circle, ellipse, depending on actual demand.
3. the spectrometer design method realizing micro-section spectral measurement according to claim 1, is characterized in that, step (2) only carries out spectral analysis for the light in orifice region, and extra-regional light does not enter spectral analysis element.
4. the spectrometer design method realizing micro-section spectral measurement according to claim 1, it is characterized in that, light outside step (3) orifice region is reflected by the highly reflecting films on aperture plate, these highly reflecting films be high reflecting metal film, deielectric-coating etc. other can realize the membraneous material of high reflectance.This reflected light reflects via semi-transparent semi-reflecting lens, and semi-transparent semi-reflecting lens light splitting ratio can be 10: 90,30: 70, and 50: 50 or any other ratio, determined by actual conditions.
5. the spectrometer design method realizing micro-section spectral measurement according to claim 1, it is characterized in that, light outside step (4) orifice region finally shows via imaging len imaging and by image recording element record, this step is used for the observation imaging for testing sample surface topography, and conveniently judge the position of aperture in object image planes, i.e. the selected regional location measured of aperture.
6. a kind of spectrometer design method realizing micro-section spectral measurement according to claim 1, it is characterized in that, step (5) realizes for the selection of measured zone and movement by mobile example, can use manually or electricity driving displacement platform realizes sample and moves.
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| CN107389566A (en) * | 2017-08-30 | 2017-11-24 | 无锡迅杰光远科技有限公司 | It is a kind of to be used to collect the device that sample diffuses in spectrometer |
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| CN107941772A (en) * | 2017-12-18 | 2018-04-20 | 北京赛尔怡美科技有限公司 | Illuminate monitoring system and vegetation monitoring device |
| CN111971606A (en) * | 2018-01-25 | 2020-11-20 | 意大利学院科技基金会 | Time-resolved imaging method with high spatial resolution |
| CN112964655A (en) * | 2021-01-29 | 2021-06-15 | 国家纳米科学中心 | Test system device and test method for micron-sized sample absorption spectrum on transparent substrate |
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Application publication date: 20150729 |