CN104576471B - A kind of compact matrix needle lifting mechanism - Google Patents
A kind of compact matrix needle lifting mechanism Download PDFInfo
- Publication number
- CN104576471B CN104576471B CN201310507823.9A CN201310507823A CN104576471B CN 104576471 B CN104576471 B CN 104576471B CN 201310507823 A CN201310507823 A CN 201310507823A CN 104576471 B CN104576471 B CN 104576471B
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- CN
- China
- Prior art keywords
- piece
- oscillating cylinder
- guide rail
- punch block
- swing rod
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Manipulator (AREA)
Abstract
The present invention relates to the haulage equipment of chip in semiconductor fabrication, specifically a kind of chip makes the compact matrix needle lifting mechanism of wafer elevating when being picked and placeed by manipulator, including base, oscillating cylinder, swing rod, connecting rod and piece punch block with piece pin, wherein oscillating cylinder is arranged on base, one end of the swing rod is connected with the rotating shaft of oscillating cylinder, the other end is connected by connecting rod with described punch block, the oscillating cylinder drives swing rod to swing, and is lifted by the piece punch block of swing rod drivening rod and then drive with piece pin.The present invention is rotated by oscillating cylinder band driven fork, and then by connecting rod band moving plate punch block and piece needle lifting, in piece needle lifting in the case of identical, it is of the invention compared with the piece needle lifting mechanism of traditional straight-bar air cylinder driven, there can be relatively small physical dimension on piece needle movement direction, the space that mechanism is taken on piece needle movement direction can be saved, is conducive to the structure optimization of whole machine.
Description
Technical field
The present invention relates to the haulage equipment of chip in semiconductor fabrication, specifically a kind of chip is taken by manipulator
Make the compact matrix needle lifting mechanism of wafer elevating when putting.
Background technology
Requirement of the semiconductor manufacturing facility to each side such as working environment, working spaces is all very high.In semiconductor system
During making, chip needs the different station being handled upside down.The existing piece needle lifting mechanism for making wafer elevating uses linear air cylinder, gas
Cylinder rod telescopic direction is consistent with piece needle lifting direction.This use cylinder is arranged vertically structure so that piece needle lifting mechanism accounts for
With the space of larger vertical direction.
The content of the invention
In order to meet requirement of the semiconductor manufacturing facility to working space, it is an object of the invention to provide a kind of compact
Piece needle lifting mechanism.The compact matrix needle lifting mechanism is realized in the case of piece needle lifting scope identical, and reducing mechanism is accounted for
Space.
The purpose of the present invention is achieved through the following technical solutions：
The present invention includes base, oscillating cylinder, swing rod, connecting rod and the piece punch block with piece pin, and wherein oscillating cylinder is installed
On base, one end of the swing rod is connected with the rotating shaft of oscillating cylinder, and the other end is connected by connecting rod with described punch block, institute
Stating oscillating cylinder drives swing rod to swing, and is lifted by the piece punch block of swing rod drivening rod and then drive with piece pin.
Wherein：Be provided with the base to piece punch block lifted support guide effect guider, including guide rail,
Guide rail bracket, sliding block and sliding seat, the guide rail are arranged on base by guide rail bracket, and sliding block is connected with guide rail, described
Piece punch block is connected by sliding seat with sliding block, by the drives edge lifting rail of oscillating cylinder；The guide rail bracket is " L " shape, " L "
One side of shape is fixed on the base, and the another side of " L " shape is towards being connected with guide rail, " L " on the surface of oscillating cylinder
It is provided with the another side of shape for the described gap of punch block lifting；The guide rail is two, and guide rail bracket is fixed in parallel to each other
Above and perpendicular to the base；The gap is located at two centres of guide rail；The two ends of the connecting rod are respectively by bearing and pendulum
The other end and piece punch block of bar are hinged.
Advantages of the present invention is with good effect：
1. the present invention is rotated by oscillating cylinder band driven fork, and then by connecting rod with moving plate punch block and piece needle lifting,
Piece needle lifting is of the invention compared with the piece needle lifting mechanism of traditional straight-bar air cylinder driven in the case of identical, in piece pin fortune
There can be relatively small physical dimension on dynamic direction, the space that mechanism is taken on piece needle movement direction can be saved, be conducive to whole machine
Structure optimization.
2. oscillating cylinder of the present invention can adjust its shaft rotary corner scope, the different piece pin fortune of different angle range correspondences
Dynamic stroke.
3. guider of the invention can constrain piece punch block and only move along a straight line, and realize the lifting of piece pin；Opened on guide rail bracket
If gap, it is to avoid interfered in lifting process with piece punch block.
Brief description of the drawings
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is the structural representation that piece pin of the present invention is in decline state；
Fig. 3 is the structural representation that piece pin of the present invention is in propradation；
Wherein：1 is base, and 2 is oscillating cylinder, and 3 is swing rod, and 4 is connecting rod, and 5 is piece punch block, and 6 is guide rail, and 7 is guide rail bracket,
8 is sliding block, and 9 is sliding seat, and 10 is piece pin.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
As shown in figure 1, the present invention includes base 1, oscillating cylinder 2, swing rod 3, connecting rod 4, piece punch block 5 and to piece punch block
5 guider for having lifted support guide effect, wherein oscillating cylinder 2 is fixed on base 1, and guider is arranged on base
On 1 and positioned at the side of oscillating cylinder 2.One end of swing rod 3 is affixed with the rotating shaft of oscillating cylinder 2, the other end and the one of connecting rod 4
End is hinged, and the other end and the piece punch block 5 of connecting rod 4 are hinged；The one end and piece punch block 5 of the two ends of connecting rod 4 using bearing with swing rod 3
It is hinged.Many heel piece pins 10 are fixed with piece punch block 5, oscillating cylinder 2 drives swing rod 3 to swing, by the drivening rod 4 of swing rod 3, enters
And drive the piece punch block 5 with piece pin 10 to lift.
Guider includes guide rail 6, guide rail bracket 7, sliding block 8 and sliding seat 9, and wherein guide rail bracket 7 is " L " shape, the one of " L " shape
While be fixed on base 1, the another side of " L " shape towards being connected with two guide rails 6 being parallel to each other on the surface of oscillating cylinder 2,
Two guide rails 6 are respectively perpendicular to base 1.Sliding block 8 is connected with guide rail 6, piece punch block 5 passes through sliding seat 9 and the phase of sliding block 8
Even, lifted by the drives edge guide rail 6 of oscillating cylinder 2.The gap of the lifting of feed punch block 5 is provided with the another side of " L " shape, with
Avoid being interfered during piece punch block 5 is lifted；The gap is located at two centres of guide rail 6.
Operation principle of the invention is：
Oscillating cylinder 2 is the drive part of piece punch block 5 and the lifting of piece pin 10, drives piece pin 10 to transport by swing rod 3 and connecting rod 4
It is dynamic.Guide rail 6 constrains the movement locus of sliding seat 9 with sliding block 8, so as to constrain the movement locus of piece pin 10, makes piece pin 10 in straight line
Upper motion.In piece 10 elevating movement of pin, connecting rod 4 has relative rotation with swing rod 3 and piece punch block 5.Specially：
Oscillating cylinder 2 drives swing rod 3 to swing, and the drivening rod 4 of swing rod 3 is moved, and piece punch block 5 is moved under the drive of connecting rod 4,
So as to realize that oscillating cylinder 2 drives piece pin 10 to move.Sliding seat 9 is connected with piece punch block 5, sliding seat 9 is constrained by guide rail 6 and only done
Linear motion.When 2 axis of rotation of oscillating cylinder, swing rod 3 is driven to swing, piece punch block 5 moves along a straight line in vertical direction, so that
Realize the lifting of piece pin.
Swing rod 3 is in the different lifting position of different turned position counterpiece pins 10.Oscillating cylinder 2 can adjust its rotating shaft
Angle range, so as to change the hunting range of swing rod 3.The different movement travel of piece pin 10 of the different hunting range correspondence of swing rod 3.When
When oscillating cylinder 2 swings to the extreme position of a direction, such as chankings pin 10 is in raised configuration, then oscillating cylinder 2 swings to
During the extreme position of other direction, piece pin 10 is in decline state.Fig. 2 is that piece needle lifting mechanism of the present invention declines shape in piece pin 10
The schematic diagram of state, Fig. 3 is schematic diagram of the piece needle lifting mechanism of the present invention in the propradation of piece pin 10.
Claims (4)
1. a kind of compact matrix needle lifting mechanism, it is characterised in that：Including base (1), oscillating cylinder (2), swing rod (3), connecting rod
(4) and the piece punch block (5) with piece pin (10), wherein oscillating cylinder (2) is on base (1), one end of the swing rod (3)
Rotating shaft with oscillating cylinder (2) is connected, and the other end is connected by connecting rod (4) with described punch block (5), the oscillating cylinder (2)
Drive swing rod (3) to swing, lifted by the piece punch block (5) of swing rod (3) drivening rod (4) and then drive with piece pin (10)；
Be provided with the base (1) to piece punch block (5) lifted support guide effect guider, including guide rail (6),
Guide rail bracket (7), sliding block (8) and sliding seat (9), the guide rail (6) by guide rail bracket (7) on base (1), guide rail (6)
On be connected with sliding block (8), described punch block (5) is connected by sliding seat (9) with sliding block (8), by oscillating cylinder (2)
Drives edge guide rail (6) is lifted.
2. the compact matrix needle lifting mechanism as described in claim 1, it is characterised in that：The guide rail bracket (7) is " L " shape, " L "
One side of shape is fixed on the base (1), and the another side of " L " shape is towards being connected with guide rail on the surface of oscillating cylinder (2)
(6) it is provided with the another side of, described " L " shape for the described gap of punch block (5) lifting.
3. the compact matrix needle lifting mechanism as described in claim 2, it is characterised in that：The guide rail (6) is two, mutually flat
It is fixed on capablely on guide rail bracket (7) and perpendicular to the base (1)；The gap is located at two centres of guide rail (6).
4. the compact matrix needle lifting mechanism as described in claims 1 to 3 any claim, it is characterised in that：The connecting rod
(4) two ends are hinged by bearing with the other end and piece punch block (5) of swing rod (3) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310507823.9A CN104576471B (en) | 2013-10-23 | 2013-10-23 | A kind of compact matrix needle lifting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310507823.9A CN104576471B (en) | 2013-10-23 | 2013-10-23 | A kind of compact matrix needle lifting mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104576471A CN104576471A (en) | 2015-04-29 |
| CN104576471B true CN104576471B (en) | 2017-07-07 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310507823.9A Active CN104576471B (en) | 2013-10-23 | 2013-10-23 | A kind of compact matrix needle lifting mechanism |
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| Country | Link |
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| CN (1) | CN104576471B (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109704242A (en) * | 2017-10-26 | 2019-05-03 | 新兴重工湖北三六一一机械有限公司 | A kind of elevating mechanism |
| CN107771485A (en) * | 2017-11-20 | 2018-03-09 | 江海宇 | One kind connects transplanting device |
| CN109467022A (en) * | 2018-12-18 | 2019-03-15 | 云南昆船智能装备有限公司 | A kind of elevating mechanism carried for material |
| CN109773557B (en) * | 2019-02-03 | 2020-06-30 | 赛赫智能设备（上海）股份有限公司 | Double-conveying mechanism type automatic inflating valve mounting equipment and mounting method thereof |
| CN109997725B (en) * | 2019-04-10 | 2024-04-30 | 山东新希望六和集团有限公司 | Raising cage suitable for multistage meat duck is bred |
| CN114178957B (en) * | 2020-08-24 | 2023-03-17 | 佛山市顺德区美的洗涤电器制造有限公司 | Face shell grinding device |
| CN112830348A (en) * | 2020-12-30 | 2021-05-25 | 国网黑龙江省电力有限公司信息通信公司 | Communication cable winding and unwinding devices |
| CN113086881B (en) * | 2021-03-31 | 2022-08-12 | 烟台达源自动化科技有限公司 | Conveying mechanism of automobile welding line |
| CN113275871B (en) * | 2021-05-11 | 2023-03-07 | 慕贝尔汽车部件（太仓）有限公司 | Spring clamp assembling device |
| CN114906768B (en) * | 2022-04-28 | 2024-04-09 | 芯三代半导体科技(苏州)有限公司 | Lifting mechanism for vapor phase growth device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4989309A (en) * | 1990-05-02 | 1991-02-05 | Pang Liu C | Blade binding cord guiding arrangement for venetian blind making machine |
| US5312316A (en) * | 1993-05-07 | 1994-05-17 | Wu Bor Yih | Machine for forming cardboard boxes |
| CN202271790U (en) * | 2011-09-15 | 2012-06-13 | 锦州万得机械装备有限公司 | Automatic tire mounting machine |
| CN202636083U (en) * | 2012-06-05 | 2013-01-02 | 浙江工业大学 | Desk with annular screen |
| CN202763294U (en) * | 2012-09-12 | 2013-03-06 | 苏州领创激光科技有限公司 | Scissor-type lifting pallet changer |
| CN203127745U (en) * | 2013-01-30 | 2013-08-14 | Abb技术有限公司 | Connecting rod driving device |
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2013
- 2013-10-23 CN CN201310507823.9A patent/CN104576471B/en active Active
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| CN104576471A (en) | 2015-04-29 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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