CN104441995B - The manufacture method of liquid ink nozzle, liquid ink nozzle and printing device - Google Patents
The manufacture method of liquid ink nozzle, liquid ink nozzle and printing device Download PDFInfo
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- CN104441995B CN104441995B CN201310432859.5A CN201310432859A CN104441995B CN 104441995 B CN104441995 B CN 104441995B CN 201310432859 A CN201310432859 A CN 201310432859A CN 104441995 B CN104441995 B CN 104441995B
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Abstract
The present invention provides the manufacture method of a kind of liquid ink nozzle, liquid ink nozzle and printing device, and wherein method includes: form pressure generating part in substrate；Coated with resins glue on the first surface of substrate, forms the first glue-line；First area in first glue-line is carried out gradation exposure process, forms the public chamber of trapezoidal shape；It is exposed the second area in the first glue-line processing, forms pressure chamber；Pressure chamber and trapezoidal shape public chamber away from the surface of substrate formed jet orifice plate；Position corresponding with public chamber on second surface relative with first surface in the substrate forms penetrating ink supply aperture.The manufacture method of liquid ink nozzle, liquid ink nozzle and printing device that the present invention provides can solve the problem that existing liquid ink nozzle easily occurs that liquid ink is back to ink supply aperture, and the problem affecting print speed, also it is avoided that the problem that the print quality using binding agent to cause reduces, and the mechanical strength of pressure chamber can be improved.
Description
Technical field
The present invention relates to printer manufacturing technology, particularly relate to the manufacture method of a kind of liquid ink nozzle, liquid
Body ink gun and printing device.
Background technology
Printer is a kind of conventional office equipment, along with gradually improving of printer technology, at file
Reason speed and print speed increasingly come into one's own.In prior art, the liquid ink nozzle of printer
Structure generally includes the substrate being fabricated from a silicon, be bonded on substrate first surface jet orifice plate, with
And it is arranged on oscillating plate and the piezoelectric element of second surface relative with first surface in substrate.Liquid sprays
The processing method of ink head is usually: form oscillating plate and piezoelectric element on the second surface of substrate,
Etch process is used to form multiple pressure chamber corresponding with piezoelectric element position on first surface, with
And the public chamber corresponding with ink supply aperture, this pressure chamber and public chamber are used for storing liquid,
Rear bonding jet orifice plate.
But, owing to the sidewall of chamber public in existing liquid ink nozzle is formed as being perpendicular to substrate
Second surface, is therefore unfavorable for the filling of liquid ink, when ink gun produces vibration, is easily caused
Liquid ink is back to ink supply aperture and affects print speed.Further, for existing liquid ink nozzle
Speech, in order to improve print resolution, needs to increase the quantity of pressure chamber, in identical surface areas
Etching pressure chamber in silicon base, must reduce the thickness of pressure chamber locular wall, therefore can cause substrate
Mechanical strength decline, the course of processing there will be substrate damaged and reduce yield rate, increase and manufacture
Cost.It addition, the jet orifice plate of existing liquid ink nozzle is to use binding agent to be bonded in pressure chamber's table
Face, the requirement to technique for sticking is the highest, once has in binding agent feed pressure chamber, can affect and beat
Print quality.
Summary of the invention
The present invention provides the manufacture method of a kind of liquid ink nozzle, liquid ink nozzle and printing device, is used for
Solve existing liquid ink nozzle to be easily caused liquid ink and be back to ink supply aperture and affect asking of print speed
Topic, moreover it is possible to avoid the problem that the print quality using binding agent to cause reduces, and pressure chamber can be improved
Mechanical strength.
The embodiment of the present invention provides the manufacture method of a kind of liquid ink nozzle, including:
Substrate is formed pressure generating part；
Coated with resins glue on the first surface of the substrate, forms the first glue-line；
First area in described first glue-line is carried out gradation exposure process, forms the common cavity of trapezoidal shape
Room, in the public chamber of described trapezoidal shape, the surface area near described substrate is less than away from described substrate
Surface area；
It is exposed the second area in described first glue-line processing, forms pressure chamber；
Described pressure chamber and trapezoidal shape public chamber away from the surface of described substrate formed spray orifice
Plate；
On second surface relative with described first surface in described substrate corresponding with described public chamber
Position forms penetrating ink supply aperture.
The embodiment of the present invention also provides for a kind of liquid ink nozzle, and described liquid ink nozzle uses as above
The manufacture method of liquid ink nozzle is made.
The embodiment of the present invention also provides for a kind of printing device, including liquid ink nozzle as above.
The embodiment of the present invention, by forming pressure generating part successively in substrate, forms pressure in substrate
Chamber and the public chamber of trapezoidal shape, wherein, the public chamber of trapezoidal shape is little near the surface area of substrate
In the surface area away from substrate, form jet orifice plate and ink supply aperture the most respectively, it is possible to solve existing liquid
Body ink gun is easily caused liquid ink and is back to the problem of ink supply aperture from public chamber, improves printing speed
Degree and print quality.
The technical scheme that the embodiment of the present invention provides can form integrated ink gun, and uses positivity light
Quick resin formation pressure chamber locular wall, can according to print resolution need increase pressure chamber quantity, and
Pressure chamber locular wall and the problem of substrate mechanical strength decline will not be produced.Integrated structure it also avoid
Use binding agent and the problem that affects printing effect.
It addition, the technical scheme of the embodiment of the present invention additionally provides a kind of technical side forming taper spray orifice
Case, it is possible to increase the precision of injection, makes ink droplet accurately drip precalculated position on the print medium, and then
Improve print speed and printing precision.
Accompanying drawing explanation
The flow chart of the manufacture method of the liquid ink nozzle that Fig. 1 provides for the embodiment of the present invention one；
Pressure generating part shape in the manufacture method of the liquid ink nozzle that Fig. 2 provides for the embodiment of the present invention one
The flow chart of one-tenth method；
The manufacture method of the liquid ink nozzle that Fig. 3 A provides for the embodiment of the present invention one etches in substrate
Form the structural representation of groove；
The manufacture method of the liquid ink nozzle that Fig. 3 B provides for the embodiment of the present invention one is formed in substrate
The structural representation of piezoelectric element；
In the manufacture method of the liquid ink nozzle that Fig. 3 C provides for the embodiment of the present invention one on the piezoelectric element
Form the structural representation of oscillating plate；
The manufacture method of the liquid ink nozzle that Fig. 4 A provides for the embodiment of the present invention one is formed in substrate
The structural representation of the first glue-line；
To the first glue-line in the manufacture method of the liquid ink nozzle that Fig. 4 B provides for the embodiment of the present invention one
First area is exposed the structural representation processed；
First glue-line is entered by the manufacture method of the liquid ink nozzle that Fig. 4 C provides for the embodiment of the present invention one
Row development treatment forms the structural representation of public chamber；
To the first glue-line in the manufacture method of the liquid ink nozzle that Fig. 4 D provides for the embodiment of the present invention one
Second area is exposed the structural representation processed；
First glue-line is entered by the manufacture method of the liquid ink nozzle that Fig. 4 E provides for the embodiment of the present invention one
Row development treatment forms the structural representation of pressure chamber；
The manufacture method of the liquid ink nozzle that Fig. 4 F provides for the embodiment of the present invention one forms the structure of spray orifice
Schematic diagram；
The manufacture method of the liquid ink nozzle that Fig. 5 provides for the embodiment of the present invention one forms the structure of ink supply aperture
Schematic diagram；
The manufacture method of the liquid ink nozzle that Fig. 6 provides for the embodiment of the present invention one forms liquid ink nozzle
Structural representation；
The manufacture method of the liquid ink nozzle that Fig. 7 provides for the embodiment of the present invention one forms the structure of cover plate and shows
It is intended to；
The manufacture method of the liquid ink nozzle that Fig. 8 provides for the embodiment of the present invention one forms stepped cone spray orifice
Structural representation one；
The manufacture method of the liquid ink nozzle that Fig. 9 provides for the embodiment of the present invention one forms stepped cone spray orifice
Structural representation two；
In substrate surface shape in the manufacture method of the liquid ink nozzle that Figure 10 provides for the embodiment of the present invention two
Become the structural representation of oscillating plate；
On oscillating plate surface in the manufacture method of the liquid ink nozzle that Figure 11 provides for the embodiment of the present invention two
Form the structural representation of piezoelectric element；
The liquid ink jet that the manufacture method of the liquid ink nozzle that Figure 12 provides for the embodiment of the present invention two is formed
The structural representation of head；
The manufacture method of the liquid ink nozzle that Figure 13 provides for the embodiment of the present invention three is formed in substrate
The structural representation of thin film resistive layer；
The manufacture method of the liquid ink nozzle that Figure 14 provides for the embodiment of the present invention three forms liquid ink nozzle
Structural representation.
Reference:
1-substrate；2-groove；3-piezoelectric element；
4-oscillating plate；5-the first glue-line；6-the first mask；
The public chamber of 7-；8-common cavity locular wall；9-the second mask；
10-pressure chamber；11-pressure chamber locular wall；12-the second glue-line；
13-the 3rd mask；14-spray orifice；15-ink supply aperture；
16-cover plate；17-oscillation space；18-gap；
19-thin film resistive layer.
Detailed description of the invention
Embodiment one
The flow chart of the manufacture method of the liquid ink nozzle that Fig. 1 provides for the embodiment of the present invention one.Such as Fig. 1
Shown in, the manufacture method of this liquid ink nozzle may include that
Step 10, in substrate formed pressure generating part.
Wherein, substrate can be silicon base or substrate of glass, and the present embodiment uses silicon base.Pressure occurs
The effect of parts is that the ink ordered about in pressure chamber sprays from spray orifice, prints on the print medium, Ke Yiwei
The device of various ways, such as piezoelectric element, film resistor etc..The present embodiment comes as a example by piezoelectric element
Illustrate the forming method of pressure generating part.
Concrete, can refer to the manufacture of the liquid ink nozzle that Fig. 2, Fig. 2 provide for the embodiment of the present invention one
The flow chart of pressure generating part forming method in method.Substrate is formed pressure generating part, permissible
Comprise the steps:
Step 101, on the first surface of substrate etching formed groove.
As shown in Figure 3A, in the manufacture method of the liquid ink nozzle that Fig. 3 A provides for the embodiment of the present invention one
In substrate, etching forms the structural representation of groove, specifically can be by dry etching or wet etching
Mode forms groove 2, from the point of view of the viewing angles of Fig. 3, first surface on the first surface of substrate 1
The i.e. upper surface of substrate 1, at the groove formed below 2 of first surface, this groove 2 is used for accommodating piezoelectricity
Element, therefore the size of groove 2 can set according to the size of piezoelectric element.
Step 102, in groove formed piezoelectric element, including use sputtering method sequentially form lower electrode layer,
Piezoelectric body layer and upper electrode layer.
As shown in Figure 3 B, in the manufacture method of the liquid ink nozzle that Fig. 3 B provides for the embodiment of the present invention one
Substrate is formed the structural representation of piezoelectric element.Sputtering method is used to sequentially form lower electrode layer, piezoelectricity
Body layer and upper electrode layer, constitute piezoelectric element 3.Wherein, lower electrode layer can be titanium (Ti) layer, platinum
Gold (Pt) layer or be multiple titanium layer superimposed layers；Piezoelectric body layer can be lead zirconate titanate (ZPT) layer；
Upper electrode layer can be platinum (Pt) layer or gold (Au) layer.
Step 103, at the surface formation of deposits oscillating plate of upper electrode layer.
As shown in Figure 3 C, in the manufacture method of the liquid ink nozzle that Fig. 3 C provides for the embodiment of the present invention one
Form the structural representation of oscillating plate on the piezoelectric element.Specifically can use Low Pressure Chemical Vapor Deposition or
Plasma enhanced chemical vapor deposition method forms oscillating plate 4, and the material of this oscillating plate 4 can be SiO2、
Si3N4Or SiO2-Si3N4Lamination.When piezoelectric element 3 produces deformation, oscillating plate 4 produces therewith and shakes
Dynamic, the ink in squeeze pressure chamber sprays from spray orifice.
Owing to the public chamber sidewall of existing liquid ink nozzle is for being perpendicular to substrate surface, the most unfavorable
In the filling of liquid ink, when ink gun produces vibration, it is easily caused liquid ink and is back to ink supply
Hole and affect print speed.
In order to solve above-mentioned technical problem, the present embodiment proposes a kind of side forming the public chamber of trapezoidal shape
Case, such as step 20 and step 30:
Step 20, on the first surface of substrate coated with resins glue, form the first glue-line.
As shown in Figure 4 A, in the manufacture method of the liquid ink nozzle that Fig. 4 A provides for the embodiment of the present invention one
Substrate is formed the structural representation of the first glue-line.This resin glue can be positive photosensitive resin or negativity
Photosensitive resin, for being there is degeneration in the characteristic of positive photosensitive resin, thus be soluble in potassium hydroxide by illumination
KOH equal solvent, the characteristic of negative photosensitive resin is for being solidified by illumination.
The present embodiment use positive photosensitive resin be coated in substrate, and formed trapezoidal shape public chamber and
Pressure chamber, specifically can refer to following steps:
First, the first surface of substrate 1 coats positive photosensitive resin, specifically can use poly-methyl
Acrylic acid methyl ester. PMMA, the pressure chamber locular wall that this material is formed can be the thinnest, but its mechanical strength is higher,
It is easy to improve the resolution of liquid ink nozzle.Polymetylmethacrylate is spin-coated on the of substrate 1
On one surface, forming the first glue-line 5, the size of this first glue-line 5 can be according to public chamber and pressure chamber
The volume settings of room.
Secondly, it is exposed the first glue-line 5 processing, to determine pressure chamber and the size of public chamber
And shape.
Then, the first glue-line 5 is carried out development treatment, the first glue-line is exposed to remove and becomes
Property part, form pressure chamber and public chamber.
Above-mentioned formation pressure chamber and public chamber mode can use various ways, and the first is in substrate 1
Surface form the first glue-line 5, use different masks public to the first glue-line 5 will be formed simultaneously
The region that chamber is corresponding with pressure chamber is exposed processing, and then uses developer solution to develop.They are two years old
It is according to sequencing, sequentially forms public chamber and pressure chamber, but form public chamber and pressure chamber
The order of room is interchangeable.The present embodiment is to be initially formed public chamber, then as a example by forming pressure chamber, can join
According to following detailed description:
Step 30, the first area in the first glue-line is carried out gradation exposure process, form the public affairs of trapezoidal shape
Chamber altogether, in the public chamber of this trapezoidal shape, the surface area near substrate is less than the face, surface away from substrate
Long-pending.
As shown in Figure 4 B, in the manufacture method of the liquid ink nozzle that Fig. 4 B provides for the embodiment of the present invention one
First area to the first glue-line is exposed the structural representation of process.In above-mentioned steps 30, to first
Region carries out the process of gradation exposure process and is specifically as follows:
The first mask 6 is used to be exposed first area processing.Wherein, the first mask 6 is covered for gray scale
Film, the light transmittance of this first mask 6 is gradually reduced to both sides from centre, so that by illumination in first area
Part generation degeneration.Concrete, it is subject to corresponding to the part in the middle of the first mask 6 in first area
Intensity of illumination is relatively strong, and the intensity of illumination being subject on the first direction, mask 6 both sides gradually weakens, so that
In first area, the region by illumination degeneration forms reverse trapezoid shape.
Then, use the first developer solution that the first glue-line carries out development treatment, remove the portion by illumination degeneration
Point, form the public chamber of trapezoidal shape.
As shown in Figure 4 C, in the manufacture method of the liquid ink nozzle that Fig. 4 C provides for the embodiment of the present invention one
First glue-line is carried out development treatment and forms the structural representation of public chamber.Potassium hydroxide (KOH) can be used
As the first developer solution, the first glue-line 5 after exposure-processed being carried out development treatment, wherein light is irradiated
Part is dissolved, and forms trapezoidal public chamber 7, and the part not being irradiated by light remains formation public affairs
Chamber wall 8 altogether.The public chamber formed is less than the surface area away from substrate near the surface area of substrate,
Namely near the volume of basal region less than away from the volume of basal region, it is possible to reduce liquid ink backflow
The phenomenon of ink supply aperture occurs.
After the public chamber forming trapezoidal shape, following steps 40 can be continued executing with:
Step 40, the second area in described first glue-line is exposed process, formed pressure chamber.
First, using the second mask 9 to be exposed second area processing, the second mask 9 is for commonly to cover
Film, the complete printing opacity in centre of the second mask 9, both sides are light tight, so that by the portion of illumination in first area
Changing property of distribution.
As shown in Figure 4 D, in the manufacture method of the liquid ink nozzle that Fig. 4 D provides for the embodiment of the present invention one
Second area to the first glue-line is exposed the structural representation of process.Exposure-processed mode can use existing
There is mode conventional in technology.Second mask 9 is common mask commonly used in the prior art, wherein with pressure
The light transmittance of the two side portions that power chamber wall is corresponding is relatively low, approximates light tight, corresponding with pressure chamber in
Between part light transmittance higher, can by major part light.The mid portion of second area, the first glue-line
Degeneration is occurred by illumination, and the part of its degeneration can form the pressure chamber of rectangle.
Then, use the first developer solution that described first glue-line carries out development treatment, remove by illumination degeneration
Part, formed pressure chamber.
As shown in Figure 4 E, in the manufacture method of the liquid ink nozzle that Fig. 4 E provides for the embodiment of the present invention one
First glue-line is carried out development treatment and forms the structural representation of pressure chamber.Use potassium hydroxide (KOH)
As the first developer solution the first glue-line 5 after exposure-processed carried out development treatment, wherein light irradiate and
The part of degeneration is dissolved, and forms pressure chamber 10, and the part not being irradiated by light remains formation pressure
Power chamber wall 11.
The step of the public chamber of above-mentioned formation and pressure chamber can be exchanged, it is also possible to first carries out step 40,
Perform step 30 again.
In view of the jet orifice plate of existing liquid ink nozzle is the surface utilizing binding agent to be bonded in pressure chamber,
Requirement to bonding process is the highest.Once in binding agent feed pressure chamber, then can affect print quality.
Therefore, on the basis of technique scheme, after forming public chamber and pressure chamber, can perform
Following steps 50:
Step 50, pressure chamber and trapezoidal shape public chamber away from the surface of substrate formed jet orifice plate.
Jet orifice plate and public chamber and pressure chamber will form as one structure, solve at bonding process
The problem that middle binding agent enters pressure chamber and affects print quality.Specifically can be in the following way:
Pressure chamber 10 and trapezoidal shape public chamber 7 away from the surface of substrate 1 coat negative light-sensitive
Resin, forms the second glue-line 12.
The 3rd mask 13 is used to be exposed the second glue-line 12 processing, so that the solidification of spray orifice wall, the 3rd
Mask 13 is grayscale mask, and the light transmittance of the 3rd mask 13 is gradually increased to both sides from centre.
Use the second developer solution that the second glue-line 12 is carried out development treatment, to remove in the second glue-line 12 not
The part of solidification, forms spray orifice.
As illustrated in figure 4f, the manufacture method shape of the liquid ink nozzle that Fig. 4 F provides for the embodiment of the present invention one
Become the structural representation of spray orifice.
Use negative photosensitive resin to be spin-coated on public chamber 7 and the surface of pressure chamber 10, form the second glue
Layer 12, wherein the material of negative photosensitive resin can be SU8, and its characteristic solidifies after being affected by illumination.
Then using the 3rd mask 13 to be exposed processing, the 3rd mask 13 uses grayscale mask, its
Transmittance characteristics is set to: at the position printing opacity that spray orifice wall is corresponding, the light transmittance at spray orifice is gradual change
Form, the light transmittance at orifice center axle is relatively low, approximates light tight, gradually increases from central axial surrounding
Big light transmittance.
After using the 3rd mask 13 to be exposed processing, using 1-methyl ether acetic acid propylene glycol ester as the
Two developer solutions carry out development operation, the then partially cured formation irradiated by large-area light ray in the second glue-line 12
Spray orifice wall, and affected by the 3rd mask 13 light transmittance, the part being not affected by illumination forms the spray of taper
Hole.Taper spray orifice is advantageous in that the precision that can improve injection, makes ink droplet accurately be dropped in print media
On precalculated position, and then improve print speed and printing precision.
The manufacture method of the liquid ink nozzle that Fig. 5 provides for the embodiment of the present invention one forms the structure of ink supply aperture
Schematic diagram.As it is shown in figure 5, ink supply aperture is arranged on the lower section of substrate 1 by the present embodiment, such as step 60:
Position corresponding with public chamber on step 60, second surface relative with first surface in the substrate
Place forms penetrating ink supply aperture.
KOH or Tetramethylammonium hydroxide TMAH specifically can be used to be lost on the base 1 by etching solution wet method
Carve, form ink supply aperture 15, through with public chamber, to flow into common cavity by the ink of ink supply aperture 15
In room, and enter the liquid in public chamber and be not easy to be back to ink supply aperture.
The order of above-mentioned steps 50 and step 60 can be exchanged, and i.e. can be initially formed jet orifice plate, be formed afterwards
Ink supply aperture, or it is initially formed ink supply aperture, forming jet orifice plate.
Use technique scheme can obtain by public chamber, multiple pressure chamber and multiple spray orifice one
The structure of molding, as shown in Figure 6, the manufacture of the liquid ink nozzle that Fig. 6 provides for the embodiment of the present invention one
Method forms the structural representation of liquid ink nozzle.Fig. 6 is the top view of Fig. 5, and multiple pressure chamber lead to
Excess pressure chamber wall separates, and public chamber is trapezoidal, and runs through the right side of each pressure chamber.
The manufacture method of the liquid ink nozzle that Fig. 7 provides for the embodiment of the present invention one forms the structure of cover plate and shows
It is intended to, as it is shown in fig. 7, the last cover plate 16 that bonds on the second surface of substrate 1, cover plate 16 loses
It is carved with the through hole connected with ink supply aperture 15, is used for filling ink.Or spin coating resin glue can also be used,
The mode using exposure imaging forms the cover plate 16 of integrative-structure.
The present embodiment, by forming pressure generating part successively in substrate, forms pressure chamber in substrate
With the public chamber of trapezoidal shape, wherein, the public chamber of trapezoidal shape is less than remote near the surface area of substrate
From the surface area of substrate, form jet orifice plate and ink supply aperture the most respectively, it is possible to solve the spray of existing liquid
Ink head is easily caused liquid ink and is back to ink supply aperture from public chamber, improves print speed.
Technique scheme can form integrated ink gun, and uses positive photosensitive resin to form pressure
Chamber wall, can be according to the quantity needing increase pressure chamber of print resolution, without producing pressure chamber
The problem that locular wall and substrate mechanical strength decline.Integrated structure it also avoid use binding agent and shadow
The problem ringing printing effect.
It addition, technique scheme additionally provides a kind of technical scheme forming taper spray orifice, it is possible to carry
The precision of high injection, makes ink droplet accurately drip precalculated position on the print medium, and then improves printing speed
Degree and printing precision.
On the basis of technique scheme, in order to optimize the jeting effect of ink, can be at piezoelectric element
Be arranged around a circle activity space, such as: before forming cover plate, on the second surface of substrate 1
The position corresponding with pressure chamber 10 forms the oscillation space 17 of piezoelectric element, to provide piezoelectric element 3
Space needed for vibration deformation.KOH or TMAH etching solution wet method specifically can be used to lose on the base 1
Carve, form oscillation space 17.
Gap 18 can also be formed, to provide piezoelectric element 3 vibration to become in the etching of the both sides of piezoelectric element 3
Space needed for shape.Specifically can use dry etching, shape after forming piezoelectric element space 17
Become gap 18, to ensure that piezoelectric element 3 will not be by the constraint of substrate 1 when vibration.
On the basis of technique scheme, in order to improve the precision of ink injection further, it is also possible to will
Spray orifice is set to the pyramidal structure of layering, and as shown in Figure 8 and Figure 9, Fig. 8 is that the embodiment of the present invention one carries
The manufacture method of the liquid ink nozzle of confession forms the structural representation one of stepped cone spray orifice, and Fig. 9 is this
The manufacture method of the liquid ink nozzle that bright embodiment one provides forms the structural representation of stepped cone spray orifice
Two.Taper spray orifice can be divided into two-layer, and the circular cone internal diameter of two-layer is different, and the taper spray orifice shown in Fig. 8 is served as reasons
The circular cone of larger interior diameter the most excessively arrives the circular cone of less internal diameter, and the taper spray orifice shown in Fig. 9 is by relatively
The circular cone of large diameter the most excessively arrives the circular cone of less internal diameter.Specifically can be respectively adopted negativity by technical staff
Photosensitive resin and the grayscale mask of corresponding light transmittance, realize through exposure imaging process, it is possible to realize quickly
Spray ink droplet accurately.
Embodiment two
The present embodiment is on the basis of above-described embodiment, it is provided that the another kind of side forming pressure generating part
Method, specifically may include that
Formation of deposits oscillating plate 4 on the first surface of substrate 1.
Low Pressure Chemical Vapor Deposition or plasma enhanced chemical vapor deposition method specifically can be used to be formed,
The material of oscillating plate 4 can be SiO2、Si3N4Or SiO2-Si3N4Lamination.This step can refer to Figure 10,
The manufacture method of the liquid ink nozzle that Figure 10 provides for the embodiment of the present invention two is formed at substrate surface and shakes
The structural representation of dynamic plate.
Away from forming piezoelectric element 3 on the surface of substrate 1 in oscillating plate 4.
Sputtering method specifically can be used to form lower electrode layer, use sol-gal process to form piezoelectric body layer, use
Sputtering method forms upper electrode layer, so that pressure generating part is positioned at pressure chamber 10.Wherein, bottom electrode
Layer can be titanium (Ti) layer, platinum (Pt) layer or be multiple titanium layer superimposed layers；Piezoelectric body layer can
Think lead zirconate titanate (ZPT) layer；Upper electrode layer can be platinum (Pt) layer or gold (Au) layer.Should
Step can refer in the manufacture method of the liquid ink nozzle that Figure 11, Figure 11 provide for the embodiment of the present invention two
The structural representation of piezoelectric element is formed on oscillating plate surface.
The technical side that above-described embodiment provides be can refer to for the forming method of other parts in liquid ink nozzle
Case, here is omitted.It is that the present invention is real that the liquid ink jet header structure formed can refer to Figure 12, Figure 12
Execute the structural representation of the liquid ink nozzle of the manufacture method formation of the liquid ink nozzle that example two provides.
Embodiment three
The present embodiment is on the basis of above-described embodiment, it is provided that another forms the side of pressure generating part
Method, specifically includes:
Formation of deposits thin film resistive layer 19 on the first surface of substrate 1.
Specifically can formation of deposits thin film resistive layer 19 on the base 1, the material of this thin film resistive layer 19 can
To be the one in tantalum aluminium alloy, nickel-cadmium, tungsten silicon nitride and titanium nitride.Can refer to Figure 13,
The manufacture method of the liquid ink nozzle that Figure 13 provides for the embodiment of the present invention three is formed in substrate thin film
The structural representation of resistive layer.
The technical side that above-described embodiment provides be can refer to for the forming method of other parts in liquid ink nozzle
Case, here is omitted.It is that the present invention is real that the liquid ink jet header structure formed can refer to Figure 14, Figure 14
The manufacture method executing the liquid ink nozzle that example three provides forms the structural representation of liquid ink nozzle.
The ink jet process of employing thin film resistive layer 19 is: liquid ink enters common cavity by ink supply aperture 15
Room 7.Thin film resistive layer 19, after applying pulse signal, heats ink with the speed of 1000 DEG C/μ s,
When the temperature of ink arrives about 340 DEG C, the volatile components in ink gasifies and forms bubble, gas
Bubble will be located in the ink droplet extrusion spray orifice 14 at spray orifice 14.It is reversible owing to forming the process of bubble, when
After releasing pulse signal to thin film resistive layer 19, bubble instantaneous cooling and vanish, the power of generation when vanishing
Amount promotes ink droplet to spray completely from spray orifice 14.
Further embodiment of this invention provides a kind of liquid ink nozzle, and this liquid ink nozzle uses arbitrary reality
The method described in example of executing is made.
Further embodiment of this invention provides a kind of printing device, and this printing device includes what embodiment four provided
Liquid ink nozzle.
Technique scheme, by forming pressure generating part successively in substrate, forms pressure in substrate
Chamber and the public chamber of trapezoidal shape, wherein, the public chamber of trapezoidal shape is little near the surface area of substrate
In the surface area away from substrate, form jet orifice plate and ink supply aperture the most respectively, it is possible to solve existing liquid
Body ink gun is easily caused liquid ink and is back to ink supply aperture from public chamber, improves print speed.
Last it is noted that various embodiments above is only in order to illustrate technical scheme, rather than right
It limits；Although the present invention being described in detail with reference to foregoing embodiments, this area common
Skilled artisans appreciate that the technical scheme described in foregoing embodiments still can be modified by it,
Or the most some or all of technical characteristic is carried out equivalent；And these amendments or replacement, and
The essence not making appropriate technical solution departs from the scope of various embodiments of the present invention technical scheme.
Claims (12)
1. the manufacture method of a liquid ink nozzle, it is characterised in that including:
Substrate is formed pressure generating part；
Coated with resins glue on the first surface of the substrate, forms the first glue-line；
First area in described first glue-line is carried out gradation exposure process, forms the common cavity of trapezoidal shape
Room, in the public chamber of described trapezoidal shape, the surface area near described substrate is less than away from described substrate
Surface area；
It is exposed the second area in described first glue-line processing, forms pressure chamber；
Described pressure chamber and trapezoidal shape public chamber away from the surface of described substrate formed spray orifice
Plate；
On second surface relative with described first surface in described substrate corresponding with described public chamber
Position forms penetrating ink supply aperture.
The manufacture method of liquid ink nozzle the most according to claim 1, it is characterised in that described tree
Fat glue is positive photosensitive resin；
Described first area in described first glue-line is carried out gradation exposure process, form the public affairs of trapezoidal shape
Chamber altogether, including:
Using the first mask to be exposed described first area processing, described first mask is grayscale mask,
The light transmittance of described first mask is gradually reduced to both sides from centre, so that by illumination in described first area
Part generation degeneration；
Use the first developer solution that described first glue-line carries out development treatment, remove the part by illumination degeneration,
Form the public chamber of trapezoidal shape.
The manufacture method of liquid ink nozzle the most according to claim 2, it is characterised in that described right
Second area in described first glue-line is exposed processing, and forms pressure chamber, including:
Using the second mask to be exposed described second area processing, described second mask is common mask,
The complete printing opacity in centre of described second mask, both sides are light tight, so that by illumination in described second area
There is degeneration in part；
Use the first developer solution that described first glue-line carries out development treatment, remove the part by illumination degeneration,
Form pressure chamber.
The manufacture method of liquid ink nozzle the most according to claim 3, it is characterised in that described
Pressure generating part is formed in substrate, including:
Etching forms groove on the first surface of the substrate；
In described groove, form piezoelectric element, sequentially form lower electrode layer, piezoelectricity including using sputtering method
Body layer and upper electrode layer；
Surface formation of deposits oscillating plate at described upper electrode layer.
The manufacture method of liquid ink nozzle the most according to claim 3, it is characterised in that described
Pressure generating part is formed in substrate, including:
Formation of deposits oscillating plate on the first surface of the substrate；
Away from forming piezoelectric element on the surface of described substrate in described oscillating plate, including using sputtering method
Forming lower electrode layer, sol-gal process forms piezoelectric body layer, and sputtering method forms upper electrode layer, so that described
Pressure generating part is positioned at described pressure chamber.
The manufacture method of liquid ink nozzle the most according to claim 3, it is characterised in that described
Pressure generating part is formed in substrate, including:
Formation of deposits thin film resistive layer on the first surface of the substrate.
The manufacture method of liquid ink nozzle the most according to claim 3, it is characterised in that described
The public chamber of described pressure chamber and trapezoidal shape away from the surface of described substrate formed jet orifice plate, including:
Described pressure chamber and trapezoidal shape public chamber away from the surface of described substrate coat negativity light
Quick resin, forms the second glue-line；
The 3rd mask is used to be exposed described second glue-line processing, so that the solidification of spray orifice wall, described the
Three masks are grayscale mask, and the light transmittance of described 3rd mask is gradually increased to both sides from centre；
Use the second developer solution that described second glue-line is carried out development treatment, to remove in described second glue-line
Uncured part, forms spray orifice.
The manufacture method of liquid ink nozzle the most according to claim 4, it is characterised in that also include:
Position corresponding with described pressure chamber on the second surface of described substrate forms piezoelectric element and shakes
Dynamic space, to provide the space needed for the deformation of described piezoelectric element.
The manufacture method of liquid ink nozzle the most according to claim 8, it is characterised in that also include:
In described piezoelectric element both sides, etching forms gap, to provide the deformation of described piezoelectric element required
Space.
10., according to the manufacture method of the liquid ink nozzle described in any one of claim 2-9, its feature exists
In, described positive photosensitive resin is polymetylmethacrylate.
11. 1 kinds of liquid ink nozzle, it is characterised in that described liquid ink nozzle uses claim 1-10
The manufacture method of the liquid ink nozzle described in any one is made.
12. 1 kinds of printing devices, it is characterised in that include the liquid ink nozzle described in claim 11.
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| CN201310432859.5A CN104441995B (en) | 2013-09-22 | 2013-09-22 | The manufacture method of liquid ink nozzle, liquid ink nozzle and printing device |
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| CN201310432859.5A CN104441995B (en) | 2013-09-22 | 2013-09-22 | The manufacture method of liquid ink nozzle, liquid ink nozzle and printing device |
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| CN104441995B true CN104441995B (en) | 2016-08-10 |
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| CN105667089A (en) * | 2016-03-03 | 2016-06-15 | 中国科学院苏州纳米技术与纳米仿生研究所 | Manufacturing method for flat film layer spray orifice structure, film layer structure and ink-jet printer |
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| EP0572948A1 (en) * | 1992-06-01 | 1993-12-08 | Canon Kabushiki Kaisha | Ink jet recording head, fabrication method thereof, and printer with ink jet recording head |
| CN1417033A (en) * | 2001-11-05 | 2003-05-14 | 三星电子株式会社 | Manufacture process of single ink jet head |
| CN1788999A (en) * | 2004-12-14 | 2006-06-21 | 精工爱普生株式会社 | Electrostatic actuator, droplet discharge head and method for manufacturing the droplet discharge head, droplet discharge apparatus, and device |
| CN101896352A (en) * | 2007-12-19 | 2010-11-24 | 佳能株式会社 | Liquid discharge head manufacturing method |
| CN102893216A (en) * | 2010-05-31 | 2013-01-23 | 佳能株式会社 | Process for producing fine pattern |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08252922A (en) * | 1995-03-16 | 1996-10-01 | Canon Inc | Ink jet recording head, production thereof and recording apparatus |
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| EP0572948A1 (en) * | 1992-06-01 | 1993-12-08 | Canon Kabushiki Kaisha | Ink jet recording head, fabrication method thereof, and printer with ink jet recording head |
| CN1417033A (en) * | 2001-11-05 | 2003-05-14 | 三星电子株式会社 | Manufacture process of single ink jet head |
| CN1788999A (en) * | 2004-12-14 | 2006-06-21 | 精工爱普生株式会社 | Electrostatic actuator, droplet discharge head and method for manufacturing the droplet discharge head, droplet discharge apparatus, and device |
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