CN104445053A - Patterned assembly method for nano particles on flexible substrate surface - Google Patents
Patterned assembly method for nano particles on flexible substrate surface Download PDFInfo
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- CN104445053A CN104445053A CN201410842056.1A CN201410842056A CN104445053A CN 104445053 A CN104445053 A CN 104445053A CN 201410842056 A CN201410842056 A CN 201410842056A CN 104445053 A CN104445053 A CN 104445053A
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Abstract
The invention discloses a patterned assembly method for nano particles on a flexible substrate surface. The method comprises the steps of arranging a flexible substrate with a clean surface on a current-conducting plate; arranging one surface with a micron or nano cylindrical array structure of a current-conducting die plate on the flexible substrate surface; treating the current-conducting die plate and the current-conducting plate as two electrodes, and applying voltage to the electrodes through a DC power supply so as to inject charge to the flexible substrate surface; removing the current-conducting die plate to form a patterned distributing charge area corresponding to the micron or nano cylindrical array structure on the current-conducting die plate on the flexible substrate surface; digesting the flexible substrate into a solution in which nano particles suspends; inducing the nano particles with the patterned distributing charge to achieve patterned assembly on the surface of the patterned distributing charge area of the flexible substrate. The method is simple and convenient, and low in cost, the shape of the patterned distributing charge area can be designed as requirement.
Description
[technical field]
The invention belongs to technical field of micro and nano fabrication, particularly a kind of method of flexible substrates surface graphics assemble nanometer particle.
[background technology]
The Patterned assembly of nano particle has important using value in a lot of fields, can directly apply to such as opto-electronic device, biomedical devices, micro-nano gas sensor etc.At present, the assembling of nano particle mainly adopts the method for self assembly, as Self-Assembling of Block Copolymer technology.But this technology only can realize the accurate assembling of subrange, and the nano particle being difficult to carry out on a large scale long-range order is accurately assembled, more can not realize people's demand, the assembling of arbitrary graphic structure.On the other hand, the assembling at present for nano particle is mainly surperficial in hard substrate, does not also have suitable method to realize nano particle assembling on a flexible substrate.
[summary of the invention]
The object of the present invention is to provide a kind of method of flexible substrates surface graphics assemble nanometer particle, the method utilizes conduction template to realize the accurate assembling of nano particle in flexible substrates, makes particle form the graphical of arbitrary micron or nanostructured.
To achieve these goals, the present invention adopts following technical scheme:
The method of flexible substrates surface graphics assemble nanometer particle, comprises the following steps: be placed on conductive plate by the flexible substrates of clean surface, and the one side that conduction template has micron or nanometer cylindricality array structure is placed on flexible substrates on the surface; To conduct electricity template and conductive plate as two electrodes, adopt dc source to electrode application voltage, charge injection is surperficial to flexible substrates, take off conduction template, formed and the micron in conduction template or nano column array graph of a correspondence distributed charge region on flexible substrates surface; By flexible substrates lixiviate in the solution being suspended with nano particle, nano particle, under the induction of graphical distributed charge, is assembled in the graphical distributed charge region surface of flexible substrates graphically.
Preferably, described conduction template is the conduction template with micron or nanometer cylindrical-array structure, and micron column diameter is 1-10um, nano-pillar diameter is 10-500nm.
Preferably, during charge injection, the voltage of power supply is 5-3000v, and the retention time is 10-1800s.
Preferably, the solution being suspended with nano particle described in is the alcohol suspension of Nano particles of silicon dioxide.
Preferably, conduction template used is a kind of micro-nano compound structure template, and its preparation method comprises the following steps:
(1) by clean for aluminum slice clean;
(2) at clean aluminum slice surface application one deck photoresist;
(3) pattern processing is carried out to the photoresist on aluminum slice, form the micron graphic structure of photoresist;
(4) etch for mask with photoresist micron graphic structure, aluminum slice is graphically processed;
(5) the photoetching offset plate figure structure sheaf on aluminum slice surface is removed, the micron order that the aluminum slice obtained is formed projection and recessed structure, the aluminum slice of obtained pattern;
(6) adopt anodizing, the aluminum slice of the pattern upper step obtained, as anode, using copper or platinum as negative electrode, is immersed in electrolyte, carries out electrolysis, at the micron order of aluminum slice, protruding and recessed structure forms nano level hole array;
(7) aluminum slice is taken out from electrolyte, clean up the aluminum slice namely obtaining having micro-nano compound structure;
(8) adopt electrocasting, with the aluminum slice with micro-nano compound structure obtained in step (7) for motherboard, in electrolytic etching of metal liquid, carry out electroforming, form the micro-nano compound structure template with micro-nano compound structure complementation on aluminum slice;
(9) remove aluminum slice motherboard, obtain micro-nano compound structure template, its material is metal.
Preferably, the micrometer structure of described micro-nano compound structure template is concaveconvex structure, and nanostructured is the nano column array on concaveconvex structure.
Preferably, etching described in step (4) is wet etching or electrolytic etching.
Preferably, in step (6), electrolyte is the oxalic acid of 0.3M, and decomposition voltage is 40V.
Relative to prior art, the present invention has following beneficial effect: a kind of method that the invention provides flexible substrates surface graphics assemble nanometer particle, the method utilizes conductive plate and the flexible substrates of conduction template to cleaning to discharge, and is formed and the micron of conduction template surface or nanometer cylindrical-array graph of a correspondence distributed charge region on the surface of flexible substrates; Then make nano particle under the induction of graphical distributed charge by lixiviate, be assembled in the graphical distributed charge region surface of flexible substrates graphically; The method simple process, cost is low; Can the shape in design configuration distributed charge region as requested.
[accompanying drawing explanation]
Fig. 1 is the flexible substrates schematic diagram with graphical distribution of charges;
Fig. 2 is the flexible substrates schematic diagram after coated nanoparticles solution.
[detailed description of the invention]
Above-mentioned utilization conduction template carries out the assembling of nano particle in flexible substrates, and its manufacture method comprises the following steps:
(1) flexible substrates 1 (the polyimides PI film as commercially available) is put into the solution such as acetone, ethanol, deionized water (being commercially available) successively, respectively, by ultrasonic mode (commercially available supersonic cleaning machine), it is cleaned, each cleaning 10min, makes this flexible substrates clean surface;
(2) above-mentioned flexible substrates is placed on conductive plate (as metallic plate or highly doped silicon chips such as commercially available copper coin, aluminium sheets);
(3) adopt the conduction template with micron or nanometer cylindrical-array structure or other cylindrical array structure (as commercially available highly doped silicon chip template, column diameter can be 1-10um to micron, nano-pillar diameter can be 10-500nm), the one side that conduction template has cylindrical array structure is placed on above-mentioned flexible substrates on the surface;
(4) to conduct electricity template and conductive plate as two electrodes, adopt dc source (dc source as commercially available) to electrode application voltage (voltage can be 5-3000v), and keep a period of time (time can be 10-1800s) by charge injection to flexible substrates surface;
(5) stop applying voltage and take off power supply and conduction template.Now, flexible substrates surface will have and the micron in conduction template or nanometer cylindrical-array graph of a correspondence distributed charge region 2 (micron dot matrixes or nanometer dot matrixes).
(6) the flexible substrates immersion with graphical electric charge is suspended with in the solution (alcohol suspension as commercially available Nano particles of silicon dioxide) of nano particle, then slowly promote, nano particle 4 (Nano particles of silicon dioxide), by under the induction of graphical distributed charge, is assembled in the graphical distributed charge region surface of flexible substrates (PI film) graphically.As can be seen from Figure 2, because nano particle trends towards concentrating on graphical distributed charge region 2, and away from non-distributed charge region 3, thus the graphical distribution of nano particle in flexible substrates can be realized.
Claims (4)
1. the method for flexible substrates surface graphics assemble nanometer particle, it is characterized in that, comprise the following steps: the flexible substrates of clean surface is placed on conductive plate, the one side that conduction template has micron or nanometer cylindricality array structure is placed on flexible substrates on the surface; To conduct electricity template and conductive plate as two electrodes, adopt dc source to electrode application voltage, charge injection is surperficial to flexible substrates, take off conduction template, formed and the micron in conduction template or nano column array graph of a correspondence distributed charge region on flexible substrates surface; By flexible substrates lixiviate in the solution being suspended with nano particle, nano particle, under the induction of graphical distributed charge, is assembled in the graphical distributed charge region surface of flexible substrates graphically.
2. the method for flexible substrates surface graphics assemble nanometer particle according to claim 1, it is characterized in that, described conduction template is the conduction template with micron or nanometer cylindrical-array structure, and micron column diameter is 1-10um, nano-pillar diameter is 10-500nm.
3. the method for flexible substrates surface graphics assemble nanometer particle according to claim 1, it is characterized in that, during charge injection, the voltage of power supply is 5-3000v, and the retention time is 10-1800s.
4. the method for flexible substrates surface graphics assemble nanometer particle according to claim 1, is characterized in that, described in be suspended with nano particle solution be the alcohol suspension of Nano particles of silicon dioxide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410842056.1A CN104445053A (en) | 2014-12-30 | 2014-12-30 | Patterned assembly method for nano particles on flexible substrate surface |
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| CN201410842056.1A CN104445053A (en) | 2014-12-30 | 2014-12-30 | Patterned assembly method for nano particles on flexible substrate surface |
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| CN104445053A true CN104445053A (en) | 2015-03-25 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1427962A (en) * | 2000-05-04 | 2003-07-02 | 英国技术集团国际有限公司 | Nanostructures |
| CN103204458A (en) * | 2013-03-14 | 2013-07-17 | 西安交通大学 | Ultraviolet polymerization electret based self-assembly method |
| CN103613064A (en) * | 2013-11-07 | 2014-03-05 | 西安交通大学 | Flat-plate-restraint evaporation-induced nanoparticle line self-assembly method |
| US20140262453A1 (en) * | 2013-03-16 | 2014-09-18 | Nuovo Film, Inc. | Transparent conductive electrodes and their structure design, and method of making the same |
| US8878157B2 (en) * | 2011-10-20 | 2014-11-04 | University Of Kansas | Semiconductor-graphene hybrids formed using solution growth |
-
2014
- 2014-12-30 CN CN201410842056.1A patent/CN104445053A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1427962A (en) * | 2000-05-04 | 2003-07-02 | 英国技术集团国际有限公司 | Nanostructures |
| US8878157B2 (en) * | 2011-10-20 | 2014-11-04 | University Of Kansas | Semiconductor-graphene hybrids formed using solution growth |
| CN103204458A (en) * | 2013-03-14 | 2013-07-17 | 西安交通大学 | Ultraviolet polymerization electret based self-assembly method |
| US20140262453A1 (en) * | 2013-03-16 | 2014-09-18 | Nuovo Film, Inc. | Transparent conductive electrodes and their structure design, and method of making the same |
| CN103613064A (en) * | 2013-11-07 | 2014-03-05 | 西安交通大学 | Flat-plate-restraint evaporation-induced nanoparticle line self-assembly method |
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Application publication date: 20150325 |