CN104191092A - Laser-TIG composite wire filling seal welding method for L-shaped aluminum alloy structure - Google Patents
Laser-TIG composite wire filling seal welding method for L-shaped aluminum alloy structure Download PDFInfo
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- CN104191092A CN104191092A CN201410381623.8A CN201410381623A CN104191092A CN 104191092 A CN104191092 A CN 104191092A CN 201410381623 A CN201410381623 A CN 201410381623A CN 104191092 A CN104191092 A CN 104191092A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/346—Working by laser beam, e.g. welding, cutting or boring in combination with welding or cutting covered by groups B23K5/00 - B23K25/00, e.g. in combination with resistance welding
- B23K26/348—Working by laser beam, e.g. welding, cutting or boring in combination with welding or cutting covered by groups B23K5/00 - B23K25/00, e.g. in combination with resistance welding in combination with arc heating, e.g. TIG [tungsten inert gas], MIG [metal inert gas] or plasma welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/10—Aluminium or alloys thereof
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- Laser Beam Processing (AREA)
Abstract
The invention discloses a laser-TIG composite wire filling seal welding method for an L-shaped aluminum alloy structure. The method comprises the steps that aluminum alloy is fixed in a gapless mode according to an L-shaped structure before welding, and a V-shaped groove is formed in the outer side of the L-shaped aluminum alloy structure after fixing; a laser, a TIG weld gun and a wire feed nozzle are elevated at the same time during welding, the outer side of the L-shaped aluminum alloy structure is horizontally placed, welding technology parameters of a first layer and a second layer are controlled to be the same, welding technology parameters of layers from a third layer to the last layer are controlled to be the same, and wire filling welding is carried out on a fourth layer and a fifth layer; after the outer side is welded, the inner side of the L-shaped aluminum alloy structure is placed upwards by 45 degrees, and wire filling welding is carried out on the fifth layer and a sixth layer. Multi-layer wire filling is carried out, the interlayer temperature and the laser defocusing amount are accurately controlled, and therefore the deformation, caused by excessively large thermal input, of the L-shaped structure is avoided to the greatest extent; the inner side and the outer side are welded in sequence, the deformation tendency in the welding process is restrained to the greatest extent, and the laser-TIG composite wire filling sealing welding efficiency is guaranteed.
Description
Technical field
The invention belongs to the welding forming technical field of IC industry aluminium alloy, relate to a kind of laser-TIG hybrid silk filling seal weld method of L-type aluminium alloy structure.Be applicable to thick aluminum alloy plate material, the two-sided seal welding of compound silk filling multilayer is shaped.
Background technology
In recent years along with the develop rapidly of integrated circuit equipment manufacture, in IC equipment and other semiconductor equipment numerous large-scale in effect and the status of thick aluminum alloy spare part day by day highlight, in integrated circuit equipment, the aluminium alloy cavity structure overwhelming majority takes the milling of monoblock blank entirety to remove processing at present, stock utilization is extremely low, manufacturing cycle is long, the cavity body structure precision being shaped is low, need following process to improve precision, the casting of monoblock blank is required highly simultaneously, directly affect the quality of final cavity body structure.Therefore efficient, energy-conservation, accurate welding forming technology has become one of key technology that in semiconductor equipment, thick aluminum alloy spare part is manufactured, wherein stability and the reliability of aluminum alloy spare part in the weld seam size of aluminum alloy welding connecting structure, heat affected area scope, defect probability of occurrence, weld seam compactness and welding precision direct relation semiconductor equipment.At present traditional arc welding and single track individual layer Laser-TIG Hybrid Welding technique is in the time of the typical L-type aluminium alloy structure of welding cavity body structure, because the problems such as weld seam is wide, heat affected area is large, ratio of defects is high and welding deformation is large seriously restrict the quality of welding forming aluminium alloy cavity structure.
summary of the invention
The problem of bringing for solving current laser-TIG hybrid silk filling seal welding semiconductor equipment L-type aluminium alloy structure process, the invention provides a kind of laser-TIG hybrid silk filling seal weld method of L-type aluminium alloy structure, it is to adopt laser-TIG hybrid silk filling seal welding to carry out multilayer silk filling welding to 10～15 mm thick aluminium alloys, utilize the input of little laser and little TIG electric current linear energy density, the laser-TIG hybrid of realizing stable, little heat affected area, high compactness and the high-precision aluminium alloy L-type structure seal welding that fills silk.
The technical solution adopted in the present invention comprises following content:
A laser-TIG hybrid silk filling seal weld method for L-type aluminium alloy structure, comprises the following steps:
Step 1: before welding, aluminium alloy is fixed according to L-type structure gapless, double V-groove is opened in the fixing rear L-type aluminium alloy structure outside forming;
Step 2: when welding, laser, TIG welding gun and wire feeding mouth promote simultaneously, first by horizontal positioned outside L-type aluminium alloy structure, control layers 1 and 2 welding condition identical, control the 3rd layer to finally one deck welding condition is identical, carry out 4～5 layers of welding that fills silk, the laser-TIG hybrid of finally realizing L-type aluminium alloy structure outside fills silk and welds;
Step 3: complete after the welding of L-type aluminium alloy structure outside, by aluminium alloy L-type structure inner side upwards, place at angle at 45 °, when welding, laser, TIG welding gun and wire feeding mouth promote simultaneously, control layers 1 and 2 welding condition identical, control the 3rd layer to finally one deck welding condition is identical, carry out 5～6 layers of welding that fills silk, the laser-TIG hybrid of finally realizing aluminium alloy L-type structure inner side fills silk and welds.
Further, described thickness of aluminum alloy is 10～15 mm, and the L-type aluminium alloy structure outside double V-groove depth H of opening is 3～4 mm.
Further, described welding condition is interlayer temperature, laser defocusing amount, laser rays energy density, TIG electric current linear energy density.
Further, described layers 1 and 2 interlayer temperature scope is that 270～290 °, laser defocusing amount are that-0.8～-1.0 mm, laser rays energy density are that 60～70 J/mm, TIG electric current linear energy density scope are 225～360 J/mm.
Further, described the 3rd layer to last layer by layer between temperature range be that 300～320 °, laser defocusing amount are that-1.2～-1.5 mm, laser rays energy density are that 50～55 J/mm, TIG electric current linear energy density scope are 210～325 J/mm.
Compared with prior art, the present invention has the following advantages::
1. the present invention fills silk, accurately controls interlayer temperature and laser defocusing amount by multilayer, greatly reduce the linear energy density of laser and TIG electric current, at utmost ensure that L-type aluminium alloy structure welding process obtains little heat affected area welding point, avoid the L-type malformation causing due to the input of excessive heat, realized by reducing heat input and improved welding precision.
2. the present invention is by the interior outside welding sequence of planning L-type aluminium alloy structure, at utmost suppress the deformation tendency of L-type aluminium alloy structure in welding process, ensure laser-TIG hybrid silk filling seal welding efficiency, be conducive to obtain relatively little weld seam and the nearly Welding Structure without being out of shape.
3. the present invention has reduced the linear energy density of laser and TIG electric current, can effectively reduce heat affected area scope, avoids weld defect, improves weld seam compactness, is conducive to control the welding deformation size of L-type aluminium alloy structure, obtains the nearly Welding Structure without distortion.
Brief description of the drawings
Fig. 1 is the present invention's welding process schematic diagram outside L-type aluminium alloy structure.
Fig. 2 is the present invention's welding process schematic diagram inside L-type aluminium alloy structure.
Fig. 3 is groove schematic diagram outside L-type aluminium alloy structure of the present invention.
1. aluminium alloy 2. welding wire 3. laser 4.TIG welding gun 5. wire feeding mouths in figure
detailed description of the invention
Below in conjunction with accompanying drawing to the present invention's detailed description that gives an actual example:
Embodiment 1: taking thick 6061 aluminium alloys 1 of 10 mm as example, before welding, thick 10 mm 6061 aluminium alloys 1 are docked according to L-type structure gapless, then open double V-groove, the double V-groove degree of depth 3 mm, 43 ° of monolateral angles in the L-type structure outside forming; Adjust laser 3, TIG welding gun 4 and wire feeding mouth 5 relative positions, realize laser, TIG welding gun and wire feeding mouth and promote simultaneously; Welding wire 2 diameter 1.2 mm used.
First L-type aluminium alloy 1 structure outside is welded, by horizontal positioned outside L-type aluminium alloy 1 structure, the 1st layer of welding condition laser rays energy density 70 J/mm of welding that fill silk, TIG electric current linear energy density 360 J/mm, 290 ° of interlayer temperatures, laser defocusing amount-0.9 mm; The 2nd layer identical with the 1st layer of welding condition, laser rays energy density 70 J/mm, TIG electric current linear energy density 360 J/mm, 290 ° of interlayer temperatures, laser defocusing amount-0.9 mm; The 3rd layer of laser rays energy density 55 J/mm, TIG electric current linear energy density 300 J/mm, 310 ° of interlayer temperatures, laser defocusing amount-1.2 mm; The 4th layer identical with the 3rd layer of welding condition, laser rays energy density 55 J/mm, TIG electric current linear energy density 300 J/mm, 310 ° of interlayer temperatures, laser defocusing amount-1.2 mm, realizes little heat affected area, high compactness and the nearly laser-TIG hybrid without the distortion silk filling seal welding in 10 mm thick 6061L type aluminium alloy (1) structure outside by dosing 4 layers of welding wire.
Then L-type aluminium alloy 1 structure inner side is welded, by L-type aluminium alloy 1 structure inner side upwards, become miter angle to place, the 1st layer of welding condition laser rays energy density 65 J/mm of welding fill silk, TIG electric current linear energy density 300 J/mm, 280 ° of interlayer temperatures, laser defocusing amount-1 mm; The 2nd layer identical with the 1st layer of welding condition, laser rays energy density 65 J/mm, TIG electric current linear energy density 300 J/mm, 280 ° of interlayer temperatures, laser defocusing amount-1 mm; The 3rd layer of laser rays energy density 50 J/mm, TIG electric current linear energy density 240 J/mm, 320 ° of interlayer temperatures, laser defocusing amount-1.5 mm; The 4th layer identical with the 3rd layer of welding condition with the 5th layer, laser rays energy density 50 J/mm, TIG electric current linear energy density 240 J/mm, 320 ° of interlayer temperatures, laser defocusing amount-1.5 mm, realizes little heat affected area inside the thick 6061L type of 10 mm aluminium alloy 1 structure, high compactness and the nearly laser-TIG hybrid without the distortion seal welding that fills silk by dosing 5 layers of welding wire.
Embodiment 2: taking thick 6061 aluminium alloys 1 of 15 mm as example, before welding, thick 15 mm 6061 aluminium alloys 1 are docked according to L-type structure gapless, then open double V-groove, the double V-groove degree of depth 4 mm, 45 ° of monolateral angles in structure outside; Adjust laser 3, TIG welding gun 4 and wire feeding mouth 5 relative positions, realize laser 3, TIG welding gun 4 and wire feeding mouth 5 and promote simultaneously; Welding wire 2 diameter 1.2 mm used.
First L-type aluminium alloy 1 structure outside is welded, by horizontal positioned outside L-type aluminium alloy 1 structure, the 1st layer of welding condition laser rays energy density 70 J/mm of welding that fill silk, TIG electric current linear energy density 360 J/mm, 290 ° of interlayer temperatures, laser defocusing amount-1 mm; The 2nd layer identical with the 1st layer of welding condition, laser rays energy density 70 J/mm, TIG electric current linear energy density 360 J/mm, 290 ° of interlayer temperatures, laser defocusing amount-1 mm; The 3rd layer of laser rays energy density 55 J/mm, TIG electric current linear energy density 325 J/mm, 300 ° of interlayer temperatures, laser defocusing amount-1.5 mm; The 4th is identical with the 3rd layer of welding condition with the 5th layer, laser rays energy density 55 J/mm, TIG electric current linear energy density 325 J/mm, 300 ° of interlayer temperatures, laser defocusing amount-1.5 mm, realizes little heat affected area, high compactness and the nearly laser-TIG hybrid without the distortion silk filling seal welding in the thick 6061L type of 15 mm aluminium alloy 1 structure outside by dosing 5 layers of welding wire.
Then L-type aluminium alloy 1 structure inner side is welded, by L-type aluminium alloy 1 structure inner side upwards, become miter angle to place, the 1st layer of welding condition laser rays energy density 60 J/mm of welding fill silk, TIG electric current linear energy density 225 J/mm, 270 ° of interlayer temperatures, laser defocusing amount-1 mm; The 2nd layer identical with the 1st layer of welding condition, laser rays energy density 60 J/mm, TIG electric current linear energy density 225 J/mm, 270 ° of interlayer temperatures, laser defocusing amount-1 mm; The 3rd layer of laser rays energy density 50 J/mm, TIG electric current linear energy density 210 J/mm, 320 ° of interlayer temperatures, laser defocusing amount-1.5 mm; 4th, the 5th is identical with the 3rd layer of welding condition with the 6th layer, laser rays energy density 50 J/mm, TIG electric current linear energy density 210 J/mm, 320 ° of interlayer temperatures, laser defocusing amount-1.5 mm, realizes little heat affected area inside the thick 6061L type of 15mm aluminium alloy 1 structure, high compactness and the nearly laser-TIG hybrid without the distortion seal welding that fills silk by dosing 6 layers of welding wire.
The above example is only preferably detailed description of the invention of the present invention; but protection scope of the present invention is not limited to this; any be familiar with those skilled in the art the present invention disclose technical scope in; be equal to replacement or changed according to technical scheme of the present invention and inventive concept thereof, within all should being encompassed in protection scope of the present invention.
Claims (5)
1. the laser-TIG hybrid of a L-type aluminium alloy structure silk filling seal weld method, is characterized in that: comprise the following steps:
Step 1: before welding, aluminium alloy (1) is fixed according to L-type structure gapless, double V-groove is opened in fixing rear L-type aluminium alloy (1) the structure outside forming;
Step 2: laser when welding (3), TIG welding gun (4) and wire feeding mouth (5) promote simultaneously, first by horizontal positioned outside L-type aluminium alloy (1) structure, control layers 1 and 2 welding condition identical, control the 3rd layer to finally one deck welding condition is identical, carry out 4～5 layers of welding that fills silk, the laser-TIG hybrid of finally realizing L-type aluminium alloy (1) structure outside fills silk and welds;
Step 3: complete after the welding of L-type aluminium alloy (1) structure outside, by L-type aluminium alloy (1) structure inner side upwards, place at angle at 45 °, laser when welding (3), TIG welding gun (4) and wire feeding mouth (5) promote simultaneously, control layers 1 and 2 welding condition identical, control the 3rd layer to finally one deck welding condition is identical, carry out 5～6 layers of welding that fills silk, the laser-TIG hybrid of finally realizing L-type aluminium alloy (1) structure inner side fills silk and welds.
2. the laser-TIG hybrid of L-type aluminium alloy structure according to claim 1 silk filling seal weld method, it is characterized in that: described aluminium alloy (1) thickness is 10～15 mm, L-type aluminium alloy (1) the structure outside double V-groove depth H of opening of formation is 3～4 mm.
3. the laser-TIG hybrid of L-type aluminium alloy structure according to claim 1 silk filling seal weld method, is characterized in that: described welding condition is interlayer temperature, laser defocusing amount, laser rays energy density, TIG electric current linear energy density.
4. according to the laser-TIG hybrid silk filling seal weld method of the L-type aluminium alloy structure described in claim 1 or 3, it is characterized in that: described layers 1 and 2 interlayer temperature scope is 270～290 °, laser defocusing amount is-0.8～-1 mm, laser rays energy density is 60～70 J/mm, and TIG electric current linear energy density scope is 225～360 J/mm.
5. according to the laser-TIG hybrid silk filling seal weld method of the L-type aluminium alloy structure described in claim 1 or 3, it is characterized in that: described the 3rd layer to last layer by layer between temperature range be 300～320 °, laser defocusing amount is-1.2～-1.5 mm, laser rays energy density is 50～55 J/mm, and TIG electric current linear energy density scope is 210～325 J/mm.
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| CN104475977A (en) * | 2014-12-16 | 2015-04-01 | 沈阳富创精密设备有限公司 | IC (Integrated Circuit) equipment ultra-large aluminum alloy cavity welding method |
| CN104625411A (en) * | 2014-12-15 | 2015-05-20 | 哈尔滨工业大学 | Welding method for Ti2AlNb-based intermetallic compound and dissimilar titanium alloy |
| CN107378249A (en) * | 2016-04-04 | 2017-11-24 | 丰田自动车株式会社 | Laser overlaying welding method |
| CN108526693A (en) * | 2018-03-20 | 2018-09-14 | 广东省焊接技术研究所（广东省中乌研究院） | A kind of laser welding with filler wire method of power battery module end plate and side plate |
| CN109746574A (en) * | 2017-11-07 | 2019-05-14 | 丰田自动车株式会社 | Welding method and turning joint element |
| CN110899980A (en) * | 2019-12-10 | 2020-03-24 | 沈阳富创精密设备有限公司 | Plasma arc-laser hybrid welding method for high-sealing aluminum alloy rectangular cavity |
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| CN110899980A (en) * | 2019-12-10 | 2020-03-24 | 沈阳富创精密设备有限公司 | Plasma arc-laser hybrid welding method for high-sealing aluminum alloy rectangular cavity |
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| JP2022550386A (en) * | 2019-12-10 | 2022-12-01 | 沈陽富創精密設備股▲フン▼有限公司 | Plasma Arc-Laser Hybrid Welding Method for Highly Sealable Aluminum Alloy Rectangular Chamber |
| JP7344629B2 (en) | 2019-12-10 | 2023-09-14 | 沈陽富創精密設備股▲フン▼有限公司 | Plasma arc/laser hybrid welding method for high sealing aluminum alloy rectangular chamber |
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