CN104133002A - Piezoelectric principle-based omnidirectional horizontal shear guided wave transducer - Google Patents
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Abstract
本发明提供一种基于压电原理的全向水平剪切导波换能器,包括多个压电敏感元件和临时胶带基底,多个压电敏感元件按环形排列成轴对称的传感器阵列,每个单独的压电敏感元件有两个电极,采用导线将所有压电敏感元件的正电极串联一起,然后用另外一根导线将所有的负电极串联一起;其中压电敏感元件从弛豫铁电单晶材料中按一定的角度切割,使其d36压电系数不为0,本发明可在其周围360度产生均匀连续的水平剪切导波,也可以感知任意方向传播过来的水平剪切导波,相对于目前的全向水平剪切导波换能器,本发明体积微小,可产生全向水平剪切导波,可永久固定于结构表面或嵌入结构内部。
The invention provides an omnidirectional horizontal shear guided wave transducer based on the principle of piezoelectricity, which includes a plurality of piezoelectric sensitive elements and a temporary adhesive tape base, and a plurality of piezoelectric sensitive elements are arranged in a ring to form an axisymmetric sensor array, each A separate piezoelectric sensitive element has two electrodes, and the positive electrodes of all piezoelectric sensitive elements are connected in series with a wire, and then all the negative electrodes are connected in series with another wire; the piezoelectric sensitive element starts from the relaxor ferroelectric The single crystal material is cut at a certain angle so that the d 36 piezoelectric coefficient is not 0. The invention can generate uniform and continuous horizontal shear guided waves around 360 degrees, and can also sense horizontal shear propagating from any direction. Guided wave, compared with the current omnidirectional horizontal shear guided wave transducer, the invention has a small volume, can generate omnidirectional horizontal shear guided wave, and can be permanently fixed on the surface of the structure or embedded in the structure.
Description
技术领域technical field
本发明涉及一种基于压电原理的全向水平剪切导波换能器。The invention relates to an omnidirectional horizontal shear guided wave transducer based on piezoelectric principle.
背景技术Background technique
基于超声导波的检测或实时在线监测方法是一种常用的无损检测方法,在结构缺陷检测、结构损伤识别和结构健康监测领域有着广泛的应用。该类方法可以使用很少的驱动器和传感器实现分布式的面检测,过程快速而高效。水平剪切导波(SH波)是超声导波的一种,其中零阶水平剪切导波(SH0)无频散效应,在边界不会转换为其他类型的声波,且杂乱回波较少,可用于长距离结构的无损检测。目前水平剪切导波的激发和检测主要采用磁致伸缩换能器、电磁超声换能器等,这类换能器为多元件组成的小型电子设备,体积较大,结构复杂。如发明专利ZL201210125086.1涉及一种使用电磁超声原理的全向SH导波换能器,该换能器由开口圆环状铁镍合金带、圆形回折线圈等单元组成,安装与使用均不方便,且难以嵌入结构内部(如复合材料层合板)使用,难以永久安装用于实时在线结构安全监测。The detection or real-time online monitoring method based on ultrasonic guided waves is a commonly used non-destructive testing method, which has a wide range of applications in the fields of structural defect detection, structural damage identification and structural health monitoring. This type of method can realize distributed surface detection with few drivers and sensors, and the process is fast and efficient. The horizontal shear guided wave (SH wave) is a kind of ultrasonic guided wave, in which the zero-order horizontal shear guided wave (SH 0 ) has no dispersion effect and will not be converted into other types of sound waves at the boundary, and the clutter echo is relatively It can be used for non-destructive testing of long-distance structures. At present, the excitation and detection of horizontal shear guided waves mainly use magnetostrictive transducers, electromagnetic ultrasonic transducers, etc. These transducers are small electronic devices composed of multiple components, with large volume and complex structure. For example, the invention patent ZL201210125086.1 relates to an omnidirectional SH guided wave transducer using the principle of electromagnetic ultrasound. It is convenient, but it is difficult to embed in the structure (such as composite material laminates), and it is difficult to permanently install it for real-time online structural safety monitoring.
目前一般的超声导波(如Lamb波等)的激励与检测可以采用体积很小的压电敏感元件来实现,而且也可以产生全向(即360度)的导波,这种压电敏感元件可以粘贴于结构表面或嵌入结构内部(如复合材料结构)而不影响结构的力学性能,适用于长期的结构性能监测,但是这种压电敏感元件无法激发SH波。发明专利(申请号201310469833.8)涉及一种压电敏感元件,该元件具有压电常数d36,即在该元件的厚度方向(亦即极化方向)上施加电压,其可产生平面内的剪切变形。但该专利涉及的这种敏感元件只能在特定方向(与方形元件四个边垂直的方向,即0度、90度、180度和270度)产生SH波,无法在所有方向产生相同的导波,并且其是一种原始敏感元件,可进一步作为各种换能器的敏感元件使用。At present, the excitation and detection of general ultrasonic guided waves (such as Lamb waves, etc.) can be realized by using small piezoelectric sensitive elements, and can also generate omnidirectional (ie 360-degree) guided waves. This piezoelectric sensitive element It can be pasted on the surface of the structure or embedded inside the structure (such as a composite material structure) without affecting the mechanical properties of the structure. It is suitable for long-term structural performance monitoring, but this piezoelectric sensitive element cannot excite SH waves. The invention patent (Application No. 201310469833.8) relates to a piezoelectric sensitive element, which has a piezoelectric constant d 36 , that is, a voltage is applied in the thickness direction (that is, the polarization direction) of the element, which can generate in-plane shear out of shape. However, the sensitive element involved in this patent can only generate SH waves in specific directions (directions perpendicular to the four sides of the square element, namely 0 degrees, 90 degrees, 180 degrees and 270 degrees), and cannot generate the same wave in all directions. Wave, and it is an original sensitive element, which can be further used as a sensitive element of various transducers.
发明内容Contents of the invention
为克服上述现有技术的不足,本发明的目的在于提供一种基于压电原理的全向水平剪切导波换能器。In order to overcome the deficiencies of the above-mentioned prior art, the object of the present invention is to provide an omnidirectional horizontal shear guided wave transducer based on the piezoelectric principle.
本发明所采用的技术如下:一种基于压电原理的全向水平剪切导波换能器,包括多个压电敏感元件和临时胶带基底,多个压电敏感元件按环形排列成轴对称的传感器阵列,传感器阵列的下表面事先粘贴于临时胶带基底上,用于固定传感器阵列形状,保证所产生的波形在换能器周围连续均匀,每个单独的压电敏感元件有两个电极,采用导线将所有压电敏感元件的正电极串联一起,然后用另外一根导线将所有的负电极串联一起;其中压电敏感元件从弛豫铁电单晶材料中按一定的角度切割,使其d36压电系数不为0,即在其厚度方向上施加电场,会在平面内发生剪切变形,这种剪切变形用来激励和检测水平剪切导波。The technology adopted in the present invention is as follows: an omnidirectional horizontal shear guided wave transducer based on the principle of piezoelectricity, including a plurality of piezoelectric sensitive elements and a temporary adhesive tape base, and a plurality of piezoelectric sensitive elements are arranged in a ring to form axisymmetric The sensor array, the lower surface of the sensor array is pasted on the temporary adhesive tape substrate in advance to fix the shape of the sensor array and ensure that the generated waveform is continuous and uniform around the transducer. Each individual piezoelectric sensitive element has two electrodes. Connect the positive electrodes of all the piezoelectric sensitive elements in series with a wire, and then connect all the negative electrodes in series with another wire; the piezoelectric sensitive element is cut from the relaxor ferroelectric single crystal material at a certain angle to make it d 36 The piezoelectric coefficient is not 0, that is, when an electric field is applied in the thickness direction, shear deformation will occur in the plane, and this shear deformation is used to excite and detect horizontal shear guided waves.
本发明还具有如下技术特征:The present invention also has the following technical features:
1、所述的压电敏感元件切割于弛豫铁电单晶材料:(1-x)Pb(Mg1/3Nb2/3)O3-PbTiO3铌镁酸铅-钛酸铅或Pb(In0.5Nb0.5)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3铌铟酸铅-铌镁酸铅-钛酸铅。1. The piezoelectric sensitive element is cut from a relaxor ferroelectric single crystal material: (1-x)Pb(Mg 1/3 Nb 2/3 )O 3 -PbTiO 3 lead magnesium niobate-lead titanate or Pb (In 0.5 Nb 0.5 )O 3 -Pb(Mg 1/3 Nb 2/3 )O 3 -PbTiO 3 lead indium niobate-lead magnesium niobate-lead titanate.
2、所述的压电敏感元件的数量为大于等于8的偶数。2. The number of the piezoelectric sensitive elements is an even number greater than or equal to 8.
本发明可在其周围360度产生均匀连续的水平剪切导波,也可以感知任意方向传播过来的水平剪切导波,相对于目前的全向水平剪切导波换能器,本发明体积微小,可产生全向水平剪切导波,可永久固定于结构表面或嵌入结构内部。此外,本发明所使用的压电敏感元件的d36系数(典型值为2400pC/N)相比传统的压电敏感元件的d31系数(典型值为300pC/N)较大,更适用于激励较大幅值的水平剪切导波,也适用于检测任意方向上更微弱的水平剪切波动。The invention can generate uniform and continuous horizontal shear guided waves at 360 degrees around it, and can also perceive horizontal shear guided waves propagating in any direction. Compared with the current omnidirectional horizontal shear guided wave transducer, the volume of the present invention is Tiny, can generate omnidirectional horizontal shear guided wave, can be permanently fixed on the surface of the structure or embedded inside the structure. In addition, the d 36 coefficient (typical value of 2400pC/N) of the piezoelectric sensitive element used in the present invention is larger than the d 31 coefficient (typical value of 300pC/N) of the traditional piezoelectric sensitive element, which is more suitable for excitation The horizontal shear guided wave with larger amplitude is also suitable for detecting weaker horizontal shear fluctuations in any direction.
附图说明Description of drawings
图1为全向水平剪切导波换能器结构示意图;Figure 1 is a schematic structural diagram of an omnidirectional horizontal shear guided wave transducer;
图2为d36型压电敏感晶片的极化和切割方向图;Fig. 2 is the polarization and cutting direction diagram of d 36 type piezoelectric sensitive wafer;
图3为d36型压电敏感晶片的变形图;Fig. 3 is the deformation figure of d 36 type piezoelectric sensitive wafer;
图4为铝板中的水平剪切导波激发图;Fig. 4 is the horizontal shear guided wave excitation diagram in the aluminum plate;
图5为某铝板中水平剪切导波激发试验结果图(0度方向);Figure 5 is a diagram of the horizontal shear guided wave excitation test results (0 degree direction) in an aluminum plate;
图6为某铝板中水平剪切导波激发试验结果图(0度方向);Figure 6 is a diagram of the horizontal shear guided wave excitation test results (0 degree direction) in an aluminum plate;
图7为某铝板中水平剪切导波激发试验结果图(45度方向);Figure 7 is a diagram of the horizontal shear guided wave excitation test results in an aluminum plate (45 degree direction);
图8为某铝板中水平剪切导波激发试验结果图(45度方向)。Figure 8 is a diagram of the horizontal shear guided wave excitation test results in an aluminum plate (45-degree direction).
具体实施方式Detailed ways
实施例1Example 1
一种基于压电原理的全向水平剪切导波换能器,包括多个压电敏感元件1(尺寸如2mm×2mm×0.5mm,或3mm×3mm×0.5mm,总外径为28mm)和临时胶带基底2,多个压电敏感元件按圆形排列成轴对称的传感器阵列,传感器阵列的下表面事先粘贴于临时胶带基底上,用于固定传感器阵列形状,压电敏感元件的数量为8或16个,保证所产生的波形在换能器周围连续均匀,每个单独的压电敏感元件有两个电极,正、负电极3.4位于同一面,采用导线将所有压电敏感元件的正电极串联一起,然后用另外一根导线将所有的负电极串联一起;其中压电敏感元件从弛豫铁电单晶材料中按一定的角度切割,使其d36压电系数不为0,即在其厚度方向上施加电场,会在平面内发生剪切变形,这种剪切变形用来激励和检测水平剪切导波。本换能器作为驱动器使用时,需要通过电极接入驱动电压;作为传感器使用时,也需要通过电极接出由导波激励产生的电信号。An omnidirectional horizontal shear guided wave transducer based on the piezoelectric principle, including a plurality of piezoelectric sensitive elements 1 (dimensions such as 2mm×2mm×0.5mm, or 3mm×3mm×0.5mm, with a total outer diameter of 28mm) and temporary adhesive tape base 2, a plurality of piezoelectric sensitive elements are arranged in a circle to form an axisymmetric sensor array, the lower surface of the sensor array is pasted on the temporary adhesive tape base in advance to fix the shape of the sensor array, and the number of piezoelectric sensitive elements is 8 or 16, to ensure that the generated waveforms are continuous and uniform around the transducer. Each individual piezoelectric sensitive element has two electrodes, and the positive and negative electrodes 3.4 are located on the same surface. Wires are used to connect the positive electrodes of all piezoelectric sensitive elements. The electrodes are connected in series, and then all the negative electrodes are connected in series with another wire; the piezoelectric sensitive element is cut from the relaxor ferroelectric single crystal material at a certain angle, so that the d 36 piezoelectric coefficient is not 0, that is Applying an electric field in the thickness direction will cause shear deformation in the plane, and this shear deformation is used to excite and detect horizontal shear guided waves. When the transducer is used as a driver, the driving voltage needs to be connected through the electrodes; when used as a sensor, the electrical signal generated by the guided wave excitation also needs to be connected through the electrodes.
实施例2Example 2
本发明所用的压电敏感元件切割于弛豫铁电单晶材料,如(1-x)Pb(Mg1/3Nb2/3)O3-PbTiO3(PMNT,铌镁酸铅-钛酸铅)和Pb(In0.5Nb0.5)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3(PIN-PMN-PT,铌铟酸铅-铌镁酸铅-钛酸铅),具体极化和切割方向如图2(a)所示。图中[001]、[010]、[100]及[011]等为晶体学中表示晶向的密勒指数,(011)表示晶面的密勒指数,[011]方向与(011)面相互垂直。x,y,z表示原晶体所置于的坐标系,其中z向为晶体的生长方向。首先将晶体沿[011]方向,即Z向极化,然后切割出垂直于该方向的平面(011),该平面由坐标轴X和Y表示,如图2(b)所示,在该平面沿与坐标轴夹角45度方向切割一定边长和厚度(如5mm×5mm×0.5mm)的正方体晶片,如图2(b)所示,该晶片具有d36的压电常数,即在厚度方向施加电场,会产生面内的剪切变形,图3所示的虚线为变形后形状。The piezoelectric sensitive element used in the present invention is cut from a relaxor ferroelectric single crystal material, such as (1-x)Pb(Mg 1/3 Nb 2/3 )O 3 -PbTiO 3 (PMNT, lead magnesium niobate-titanate Lead) and Pb(In 0.5 Nb 0.5 )O 3 -Pb(Mg 1/3 Nb 2/3 )O 3 -PbTiO 3 (PIN-PMN-PT, lead indium niobate-lead magnesium niobate-lead titanate) , the specific polarization and cutting directions are shown in Fig. 2(a). [001], [010], [100] and [011] in the figure are the Miller indices representing the crystal orientation in crystallography, (011) represents the Miller index of the crystal plane, and the [011] direction and the (011) plane perpendicular to each other. x, y, z represent the coordinate system where the original crystal is placed, and the z direction is the growth direction of the crystal. First, the crystal is polarized along the [011] direction, that is, the Z direction, and then cut out a plane (011) perpendicular to this direction, which is represented by the coordinate axes X and Y, as shown in Figure 2(b). Cut a cube wafer with a certain side length and thickness (such as 5 mm × 5 mm × 0.5 mm) along the direction of an angle of 45 degrees with the coordinate axis, as shown in Figure 2 (b), the wafer has a piezoelectric constant of d 36 , that is, in the thickness Applying an electric field in the direction of , will produce in-plane shear deformation, and the dotted line shown in Figure 3 is the deformed shape.
实施例3Example 3
本发明可直接粘贴于被测结构表面,用于水平剪切导波的激发。图4给出了该换能器用于薄铝板的实施方式。首先将其用502等强力胶水完全粘贴于清洁后的铝板表面。待胶水完全固化,换能器牢固粘结于铝板表面后,可使用信号发生器通过预制电极施加指定幅值和中心频率的电压信号(如Vpp=40伏,中心频率为120kHz的五峰值窄带波形),从而在铝板中激励出水平剪切导波。图5至图8给出了某铝板中水平剪切导波激发的试验结果,其中激励电压为Vpp=5伏,中心频率分别为80kHz和120kHz。其中图5和图6为0度方向的试验结果,图7和图8为45度方向的试验结果。上述结果表明,该换能器可在任意角度激励水平剪切导波。The invention can be directly pasted on the surface of the measured structure and used for excitation of horizontal shear guided waves. Figure 4 shows the embodiment of the transducer applied to a thin aluminum plate. First, paste it completely on the surface of the cleaned aluminum plate with 502 and other super glue. After the glue is completely cured and the transducer is firmly bonded to the surface of the aluminum plate, the signal generator can be used to apply a voltage signal with a specified amplitude and center frequency through the prefabricated electrodes (such as V pp = 40 volts, a five-peak narrow-band with a center frequency of 120kHz waveform) to excite a horizontal shear guided wave in the aluminum plate. Figures 5 to 8 show the experimental results of horizontal shear guided wave excitation in an aluminum plate, where the excitation voltage is V pp =5 volts, and the center frequencies are 80kHz and 120kHz respectively. Figure 5 and Figure 6 show the test results in the 0-degree direction, and Figure 7 and Figure 8 show the test results in the 45-degree direction. The above results show that the transducer can excite horizontal shear guided waves at any angle.
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