CN104101485B - Device and method for detecting concave grating resolution and diffraction efficiency - Google Patents
Device and method for detecting concave grating resolution and diffraction efficiency Download PDFInfo
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- CN104101485B CN104101485B CN201410318029.4A CN201410318029A CN104101485B CN 104101485 B CN104101485 B CN 104101485B CN 201410318029 A CN201410318029 A CN 201410318029A CN 104101485 B CN104101485 B CN 104101485B
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Abstract
The present invention provides a device and method for detecting concave grating resolution and diffraction efficiency. The device comprises a monochromatic light emitting unit, an imaging unit which is arranged on a monochrome light path, a detection unit, a processing unit and a control unit; the monochromatic light emitting unit, the imaging unit, the detection unit, the processing unit and the control unit are connected sequentially; the monochromatic light emitting unit leads test-used monochromatic light into the imaging unit through an optical fiber; spectral intensity is received by a detector in the detection unit; and finally data in the detector are recorded, analyzed and processed by the processing unit, so that data about concave grating resolution and diffraction efficiency can be obtained. The device for detecting the concave grating resolution and diffraction efficiency of the invention is advantageous in simplicity, few required professional devices and simple operation, and can realize simultaneous detection of the resolutions and diffraction efficiencies of various types of concave gratings and can also realize fast detection of the resolutions and diffraction efficiencies of concave gratings of different types and different sizes in a wide band range.
Description
Technical field
The invention belongs to spectral technique field, be specifically related to a kind of detection concave grating resolution and
The device of diffraction efficiency and method of testing.
Background technology
Grating is a kind of extremely important and applies the most high-resolution dispersing optics
Element, is widely used in monochromator, spectrum analysis, optical communication technique and light measurement technology etc.
Scientific domain.After grating is succeeded in developing and widely applied, it almost instead of former rib
Mirror and as the dispersion element of spectral instrument of a new generation, the precision of grating and diffraction wavelength etc. thereof
The factor impact on science and technology field own profounds such as astronomy, space flight, medicine, geology.Point
Resolution and diffraction efficiency are the very important technical performance indexs of grating, grating resolution and diffraction
The height of efficiency will directly affect the performance of instrument.Concave grating collects collimation, dispersion simultaneously and gathers
Burnt in one, not only make optical energy loss greatly reduce, and enormously simplify the dress of spectrogrph
Put, make whole spectrogrph become small volume and less weight.
Grating resolution be weigh one block of grating can of separate minimum spectral line interval delta λ
Important indicator.The typically measurement to grating resolution has following three kinds of methods: known spectral line is to survey
Two-wire measurement method mensuration, artificial, halfwidth of line algoscopy, first two method device therefor is relatively
Complexity, Financial cost is higher, and all can not assess the resolving power of monoblock grating, mesh completely
Before wide variety of be halfwidth of line algoscopy.
Halfwidth of line algoscopy be a kind of using Rayleigh criterion as the method for testing of basis for estimation.
By Rayleigh criterion, resolution be embodied in when the primary maximum of diffraction pattern of a certain bar spectral line and another
When first minimum of the diffraction pattern of bar spectral line overlaps, just illustrate that these two adjacent spectral lines are can
Be resolved.Half width algoscopy utilizes optoelectronic scanning method surveying record to go out to test gained exactly
The profile of spectral line, using the breadth of spectrum line corresponding to spectral line peak value half eminence as the resolution pole of grating
Limit.This measuring method is fairly simple, it is easy to quantitative determine, and can be counted simultaneously
According to curve pattern, the most this method can obtain a complete spectral curve of grating
Sample, such that it is able to judge the good of grating by the power observing curve secondary maximum peak value satellite line
Bad, this is also the information that other measuring method cannot obtain.
Concave grating diffraction efficiency includes the detection of absolute diffraction efficiency and relative diffraction, front
Person is defined as monochromatic incident illumination diffraction light flux in the given order of spectrum time and same monochromatic light
The ratio of incident flux, the latter be defined as in the given order of spectrum time monochromatic diffraction light flux with
Same monochromatic light is through the ratio of the luminous flux of the standard reflection mirror of identical composite coating properties.The present invention is real
Existing is the detection of concave grating relative diffraction.
It is auxiliary that accurately the debuging of at present both at home and abroad most optical systems is required to add multiple optics
Helping element, debug program comparatively laborious, each impact debuging link is relatively big, adds and debugs
Difficulty is bigger to the experience dependency degree of the experiment person of debuging.It addition, current concave grating resolution
Detection method in, thing side's distance and image space distance cannot freely adjust, and are substantially specific
The grating of parameter detects by specific system, and the kind of concave grating is more, causes inspection
Survey work is heavy.
Summary of the invention
For solving the problems referred to above, present invention employs following technical scheme:
The invention provides a kind of device detecting concave grating resolution and diffraction efficiency, have
Such feature, including:
Monochromatic light transmitter unit, is used for launching monochromatic light, comprises the light source and list being linked in sequence
Color instrument；Image-generating unit, is arranged in monochromatic light path, comprises lens, slit, concave surface light
Grid, standard reflection mirror, concave grating fixture, grating rotary table, first turn of carrying grating rotary table
Platform, concave grating fixture is positioned on grating rotary table, and grating rotary table is arranged on the base of the first turntable
On, lens, slit and concave grating centrage are positioned on same level line, and protect each other
Hold certain distance；Probe unit, comprises and is formed after receiving the imaged unit of monochromatic light
Diffraction spectrum or the detector of reflectance spectrum, the detector fixture of clamping detector, carrying is visited
Survey the second turntable of device fixture and cover image-generating unit and the camera bellows of probe unit；Process single
Unit, for obtaining the data of probe unit and carrying out recording, analyze and processing；Control single
Unit, is used for controlling monochromatic light transmitter unit, image-generating unit, probe unit and processing unit；
Wherein, concave grating and typical reflective mirrors are positioned at the same position in device, work as detection resolution
Time, use described concave grating, when detection of diffracted efficiency, spread out detecting complete concave grating
After irradiating luminous flux, selecting standard of replacement reflecting mirror, concave grating fixture and grating rotary table independently divide
Opening, the first turntable and the second turntable are separate, use motor control respectively, for according to difference
Thing side's distance and image space distance regulate described concave grating and the position of described detector, detection
Device comprises the CCD camera for resolution detection and the light merit for diffraction efficiency detection
Rate meter.
In the device detecting concave grating resolution and diffraction efficiency that the present invention provides, also may be used
To have a feature in that light source and monochromator all use optical fiber to export.
In the device detecting concave grating resolution and diffraction efficiency that the present invention provides, also may be used
To have a feature in that monochromatic light ray spectral limit, as 350nm-700nm, measures wavelength accuracy
For 1nm.
A kind of method detecting concave grating resolution and diffraction efficiency, it is characterised in that comprise
The following step:
Step 1. by monochromatic light transmitter unit, image-generating unit, probe unit, processing unit with
And control to connect in order, the initial position of grating rotary table and detector turntable recalls to zero
Position；
Step 2. is opened light source, is initialized monochromator, adjusts concave grating position and makes its zero level
Spectrum and slit center superposition；
Step 3. rotates concave grating initial adjustment light beam so that it is by the incident angles of design, adjusts
The center of whole detector photosurface position and concave grating is in same level；
Step 4. adjusts the position of concave grating and angle makes its positive first-order spectrum be imaged on detection
On device photosurface；
Step 5. selects labview grating resolution inspection software, observes on computer department
Curve, regulates width and the position of slit simultaneously, makes system work in optimum state；
Image-generating unit and probe unit camera bellows are covered by step 6., complete concave grating detection
Debuging of system, according to the curve of the diffraction spectrum image of detected concave grating, takes
Half-peak breadth corresponding at 50% peak value is as Δ λ, according to incident wavelength λ, and formula λ/Δ λ
Assess the resolution of monoblock grating, complete the detection of concave grating resolution；
CCD camera in detector is replaced by light power meter by step 7., and selects diffraction
Efficiency testing software, the diffraction spectrum intensity values of acquisition and recording concave grating；
Step 8. changes standard reflection mirror in the same size with concave grating, radius of curvature is identical,
Holding position is constant, the 350nm-700nm reflectance spectrum intensity of acquisition and recording standard reflection mirror
Value, calculates diffraction spectrum intensity level and the ratio of reflectance spectrum intensity level, obtains concave grating
The data of relative diffraction, Data Comparison draws out the relative diffraction effect of concave grating after processing
Rate curve, completes the detection of concave grating diffraction efficiency.
Invention effect and effect
Concave grating resolution and the device of diffraction efficiency are provided while providing according to the present invention
And detection method, be linked in sequence monochromatic light transmitter unit, image-generating unit, probe unit, process
Unit and control unit, test monochromatic light is imported into by monochromatic light transmitter unit by optical fiber
As cell imaging, the detector that spectral intensity is detected in unit receives, last treated unit
Record, analyze and process the data in detector, draw concave grating resolution and diffraction effect
The data of rate；The light source of the present invention and monochromator are all modularitys and use optical fiber to export,
Avoiding light paths such as oneself building reflection and optically focused, required optics auxiliary element is few, debugs program
Simply, it addition, the first turntable and the second turntable are separate in the present invention, motor control is used respectively
System, can realize the Automated condtrol of measurement system, accurately adjust concave grating incident angle and
Operating distance and the angles and positions of detector, concave grating fixture and grating rotary table independently divide
Open, convenient installation different size or difform concave grating, may be implemented in set of system
On can detect resolution and the diffraction efficiency of various types of concave grating simultaneously, it is possible to realize not
Same type, different size concave grating resolution and diffraction efficiency in broadband scope to resolution
Quick detection with diffraction efficiency.
Accompanying drawing explanation
Fig. 1 is that the device detecting concave grating resolution and diffraction efficiency in embodiments of the invention shows
It is intended to；
Fig. 2 is the structural representation of the first turntable in embodiments of the invention；And
Fig. 3 is the structural representation of the second turntable in embodiments of the invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, the detailed description of the invention of the present invention is described in detail.
Fig. 1 is to detect concave grating resolution and the dress of diffraction efficiency in embodiments of the invention
Put schematic diagram.
As it is shown in figure 1, the device 100 of detection concave grating resolution and diffraction efficiency comprises list
Color emissions unit, image-generating unit, probe unit, processing unit and control unit；Wherein,
Monochromatic light transmitter unit comprises light source 11, monochromator 12, optical fiber 13, optical fiber light inputting end mouth 14
And optical fiber goes out optical port 15；Image-generating unit comprise lens 21, slit 22, concave grating 23,
Standard reflection mirror 24, concave grating fixture 25, grating rotary table the 26, first turntable 27 and
Slit goes out optical port 28, lens 21, slit 22, concave grating 23 or standard reflection mirror 24
Centrage be positioned on same level line, and maintain a certain distance each other, concave grating
Fixture 25 is positioned on grating rotary table 26, and the two is separate, is in dismountable state, light
Grid turntable 26 is arranged on the base of the first turntable 27；Probe unit comprise detector 31,
Detector fixture 32, detector turntable the 33, second turntable 34 and covering image-generating unit and spy
Surveying the camera bellows 35 of unit, detector fixture 32 fixed detector 31, detector turntable 33 holds
Set detection device fixture 32, detector turntable 33 is arranged on the second turntable 34, detector 33
Comprise the CCD camera for resolution detection and the luminous power for diffraction efficiency detection
Meter；Processing unit comprises computer 41 and the labview grating being arranged on computer 41
Resolution character inspection software and diffraction properties inspection software；Control unit comprises meter equally
Calculation machine 41, arranges parameter accordingly by program panel input system thereon, it is ensured that system
Properly functioning.
Fig. 2 is the structural representation of the first turntable in the present embodiment.
As in figure 2 it is shown, the first turntable 27 is one-dimensional turntable, on it except arrange concave grating 23,
Standard reflection mirror 24, concave grating fixture and standard reflection mirror fixture 25, grating rotary table 26
Outward, also comprise the first motor 271 on grating rotary table motor 261 and the first turntable 27,
Grating fixture and illuminator fixture 25 be arranged on can 360 ° rotate grating rotary tables 26 on, light
Grating rotary table motor 261 on grid turntable 26 controls the anglec of rotation of grating rotary table 26, and first
The first motor 271 on turntable 27 controls the position of grating rotary table 26, can be according to different recessed
Concave grating 23 regulates the distance at grating rotary table 26 upper recess surface grating 23 center and light source center,
First motor 271 motor controllable range is 0-170mm.
Fig. 3 is the structural representation of the second turntable in the present embodiment.
As it is shown on figure 3, the second turntable 34 is dimensional turntable, including orthogonal parallel arms
341 and upright arm 342, parallel arms motor 343 and upright arm motor 344, upright arm 342
Upper installation can 360 ° rotate detector turntables 33, detector turntable 33 is arranged detector folder
Tool 32, detector fixture 32 fixed detector 31, parallel arms 341 is by parallel arms motor
343 positions controlling upright arm 342, the upright arm motor 344 on upright arm 342 controls to visit
Surveying the position of device turntable 33, detector turntable motor 331 controls the rotation of detector turntable 33
Angle, it is achieved detector 31 can staying at random location on the second turntable 34, parallel arms electricity
Machine 343 and upright arm motor 344 controllable range are 0-170mm.
Applying according to reality, light source 11 includes Halogen light and deuterium lamp, the wave-length coverage of Halogen light
For 400nm～1600nm, the wave-length coverage of deuterium lamp is 200nm～400nm, monochromator 12
Wave-length coverage is 350～700nm, carries a width of 2nm, and minimum step is 1nm, optical fiber 13
Fine footpath is 400um, and lens 21 are quartz balsaming lens, and advantage is at ultraviolet region the most not
Light intensity can be caused the most weak because absorbing ultraviolet light, the minimum division value of slit 22 is
0.001mm, camera bellows 29 is the aircraft aluminum of blackening process, outside advantage is to greatly reduce
Boundary's veiling glare and noise are on anti-due to incident beam during the impact of the process of detection and detection
Penetrate the impact on testing result.
Control unit is the control interface of computer 41, by controlling interface input system phase
That answers arranges parameter, it is ensured that system properly functioning, needs the parameter arranged to include between pixel
Away from, system thing side focal length, system image space focal length, detection wavelength value, slit width and grating
Rowland circle diameter；Processing unit is the process interface of computer 41, looks according to institute's incoming wave
To the light intensity regulating CCD camera of diffraction spectrum picture or light power meter suitably expose time
Between and gain, obtain the most optimized hot spot of system and data curve chart, preserve system
System detection data, including largest light intensity value, half band-width value and resolution value.
Present invention also offers a kind of concave grating resolution and diffraction efficiency of simultaneously detecting
Method, comprises the following steps:
Step 1. is by monochromatic light transmitter unit, image-generating unit, probe unit and processing unit
Connect in order, the initial position of grating rotary table 26 and detector turntable 33 is recalled to zero
Position；
Step 2. opens light source 11 and monochromator 12, selects the initial output wave of monochromator 12
Long, the fiber inlet end 14 going out light optical fiber 13 and monochromator 12 of light source 11 has been connected
Coming, through the fiber outlet end 15 of monochromator 2, test monochromatic light imports to the whole of lens 21
In pore diameter range, focus on the center of slit 22, finely tune the fixing device of optical fiber 13,
Ensureing that the light derived from optical fiber 14 is just uniformly filled in whole lens 21, fixing optical fiber goes out light end
The position of mouth 15, now the hot spot at slit 22 center is considered point source；
Step 3. adjusts the angle of grating rotary table 26, makes the light beam from slit 22 center outgoing
It is full of the surface of whole concave grating 23, regulation concave grating 23 and the working distance of slit 22
From, make the optical fiber at the zero order spectrum imaging alignment slit 22 of concave grating 23 go out optical port
28, the angle of pitch of the fiber port 28 of fine setting concave grating 23 and slit 22, make incident illumination
Line and emergent ray are with on the horizontal plane of raster center；Fine setting grating rotary table 26 height and
Horizontal level, it is ensured that no matter concave grating 23 rotates how many angles, from the light of slit 22 incidence
Shu Douneng is uniformly filled in whole grating aperture, so may insure that lens 21, slit 22 and light
The center of grid 23 three in the same horizontal line, and guarantees to incide concave grating 23 simultaneously
The uniformity of light beam, reduces the impact that testing result is brought by beam stability to greatest extent；
After step 4. adjusts the position relationship of lens 21, slit 22 and concave grating 23,
Fixing lens 21 and the position of slit 22, motor regulates and controls concave grating 23 and slit 22 again
Between distance, rotating shutter turntable 26 simultaneously, make incident ray with grating theory angle of incidence
Spend 43.2 ° of incidences, second turntable 34 at the CCD camera place of regulation detector 31, make
On the photosurface of the CCD camera that the positive first-order spectrum of grating 23 is imaged on detector 21；
Step 5. selects labview grating resolution Characteristics Detection software, gathers spectrum picture
Original pattern, the CCD camera of fine setting detector 31 is vertically and horizontally
Position, it is ensured that spectrum picture, in the centre of CCD camera photosurface, observes computer 41
On curve, make the diffracted beam of concave grating 23 incide CCD camera sense without pitching
In bright finish in the heart；
Step 6., by observing the resolution curve on software, regulates the width of slit 22, choosing
The optimal slit width of system of selecting, now the device of system adjusts complete, fixing locked each portion
The relative position divided, covers camera bellows 29, reduces external stray light and noise to detecting system
Impact；
Step 7. acquisition resolution data also preserve, according to detected concave grating diffraction
The curve of spectral image, takes half-peak breadth corresponding at 50% peak value as Δ λ, according to incident wavelength
λ, and formula λ/Δ λ assesses the resolution of monoblock grating, completes concave grating resolution
Detection；
Step 8. changes detector 31, replaces CCD camera with light power meter, selects light
Grid diffraction efficiency Characteristics Detection software, the detecting location of fine setting light power meter, make spectrum picture exist
Test surface center, gathers and records 350nm～700nm grating diffration spectral intensity values；
Concave surface light replaced by the step 9. standard reflection mirror 24 of same shape and same curvature radius
Grid 23, keep beam incident angle degree constant, and motor controls the detecting location of light power meter, adopts
The reflectance spectrum intensity level of 350nm～700nm standard reflection mirror recorded by collection, calculates diffraction light
Spectral intensity value and the ratio of reflectance spectrum intensity level, obtain the relative diffraction of concave grating
Data, Data Comparison draws out the relative diffraction curve of concave grating 23 after processing, complete
Become the detection of concave grating 23 diffraction efficiency；
System terminates in device regulation, determines the beam incident angle degree of grating 23 and covers dark
After case 29, it is not necessary to the relative position of manual adjustment system each several part again, only need to be by figure
The collection picture position of detector 31 is automatically controlled by the motor of the second turntable shown in 3,
During ensureing detection, the impact of system is minimized by external stray light and noise.
Embodiment effect and effect
Concave grating resolution and the dress of diffraction efficiency are provided while providing according to the present embodiment
Putting and detection method, be linked in sequence monochromatic light transmitter unit, image-generating unit, probe unit, place
Reason unit and control unit, test monochromatic light is imported by monochromatic light transmitter unit by optical fiber
Image-generating unit imaging, the detector that spectral intensity is detected in unit receives, last treated list
Unit records, analyzes and process the data in detector, draws concave grating resolution and diffraction
The data of efficiency；The light source of the present embodiment and monochromator are all modularitys and use optical fiber to export
, it is to avoid oneself building the light paths such as reflection and optically focused, required optics auxiliary element is few, debugs
Program is simple, it addition, the first turntable and the second turntable are separate in the present embodiment, uses respectively
Motor controls, and can realize the Automated condtrol of measurement system, accurately adjusts the incidence of concave grating
Angle and operating distance and the angles and positions of detector, concave grating fixture and grating rotary table
The most separately, convenient installation different size or difform concave grating, may be implemented in one
Resolution and the diffraction efficiency of various types of concave grating can be detected on cover system simultaneously, it is possible to
Realize dissimilar, different size concave grating resolution and diffraction efficiency in broadband scope pair
Resolution and the quick detection of diffraction efficiency.
Claims (3)
1. the method detecting concave grating resolution and diffraction efficiency, the device using detection concave grating resolution and diffraction efficiency is carried out, the device of described detection concave grating resolution and diffraction efficiency includes monochromatic light transmitter unit, for launching monochromatic light, comprise the light source and monochromator being linked in sequence；Image-generating unit, it is arranged in described monochromatic light path, comprise lens, slit, concave grating, standard reflection mirror, concave grating fixture, grating rotary table and carry the first turntable of described grating rotary table, described concave grating fixture is positioned on described grating rotary table, described grating rotary table is arranged on the base of described first turntable, described lens, described slit and described concave grating or described standard reflection mirror centrage are positioned on same level line, and keep certain distance each other, described standard reflection mirror is identical with described concave grating position in described light path, incident angle is identical, when detection resolution, use described concave grating, described standard reflection mirror is used when standard mirror incident flux in detection of diffracted efficiency；Probe unit, comprise for receiving diffraction spectrum or the detector of reflectance spectrum that described monochromatic light is formed after described image-generating unit, clamp the detector fixture of described detector, carrying the second turntable of described detector fixture and cover described image-generating unit and the camera bellows of described probe unit, described detector comprises the CCD camera for resolution detection and the light power meter for diffraction efficiency detection；Processing unit, for obtaining the data of described probe unit and carrying out recording, analyze and processing；Control unit, is used for controlling described monochromatic light transmitter unit, described image-generating unit, described probe unit and described processing unit；Described first turntable and described second turntable are separate, use motor control respectively, for regulating described concave grating and the position of described detector according to different thing side's distances and image space distance；Described concave grating fixture and described grating rotary table are independently separately, it is characterised in that comprise the steps of
Step 1, connects in order by described monochromatic light transmitter unit, described image-generating unit, described probe unit, described processing unit and described control unit, and the initial position of described grating rotary table and described detector turntable recalls to zero-bit；
Step 2, opens described light source, initializes described monochromator, adjusts described concave grating position and makes its zero order spectrum and described slit center superposition；
Step 3, rotates concave grating initial adjustment light beam so that it is by the incident angles of design, and the center of detector photosurface position and concave grating that adjusts is in same level；
Step 4, the position and the angle that adjust described concave grating make its positive first-order spectrum be imaged on described detector photosurface；
Step 5, selects labview grating resolution inspection software, observes the curve on computer, regulates width and the position of described slit simultaneously, make system work in optimum state；
Step 6, described image-generating unit and described probe unit camera bellows are covered, complete debuging of described concave grating detecting system, the curve of the diffraction spectrum image according to detected described concave grating, take half-peak breadth corresponding at 50% peak value as Δ λ, according to incident wavelength λ, and formula λ/Δ λ assesses the resolution of monoblock grating, completes the detection of described concave grating resolution；
Step 7, is replaced by the described CCD camera in described detector light power meter, and selects diffraction efficiency inspection software, the diffraction spectrum intensity values of acquisition and recording concave grating；
Step 8, change described standard reflection mirror in the same size with described concave grating, that radius of curvature is identical, holding position is constant, the 350nm-700nm reflectance spectrum intensity level of standard reflection mirror described in acquisition and recording, calculate diffraction spectrum intensity level and the ratio of reflectance spectrum intensity level, obtaining the data of the relative diffraction of described concave grating, Data Comparison draws out the relative diffraction curve of described concave grating after processing, complete the detection of described concave grating diffraction efficiency.
Detection concave grating resolution the most according to claim 1 and the method for diffraction efficiency, it is characterised in that:
Wherein, described light source and described monochromator all use optical fiber to export.
Detection concave grating resolution the most according to claim 1 and the method for diffraction efficiency, it is characterised in that:
Wherein, described monochromatic light ray spectral limit is 350nm-700nm, and measurement wavelength accuracy is 1nm.
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| CN105716833B (en) * | 2014-12-02 | 2017-12-15 | 中国科学院大连化学物理研究所 | The measurement apparatus of infrared balzed grating, diffraction efficiency in a kind of |
| CN104502067B (en) * | 2014-12-25 | 2017-01-25 | 中国科学院长春光学精密机械与物理研究所 | Relative diffraction efficiency tester for Fourier transformation plane grating |
| CN108020516A (en) * | 2016-11-03 | 2018-05-11 | 中国科学院大连化学物理研究所 | Spectrometer or imaging spectrometer |
| US11662228B2 (en) * | 2018-06-22 | 2023-05-30 | The University Of Hong Kong | Real-time surface shape sensing for flexible structures |
| CN109724696B (en) * | 2018-12-15 | 2020-08-21 | 中国科学院长春光学精密机械与物理研究所 | Detection system for spectral resolution of Rowland grating spectrometer |
| CN112964454B (en) * | 2021-02-05 | 2024-06-07 | 深圳中科飞测科技股份有限公司 | Detection system and detection method |
| CN113109030B (en) * | 2021-04-09 | 2023-08-22 | 苏州长光华芯光电技术股份有限公司 | Light path collimation debugging system and light path collimation debugging method |
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| JP4106191B2 (en) * | 2001-01-22 | 2008-06-25 | 松下電器産業株式会社 | Optical system adjustment method |
| JP2004239875A (en) * | 2003-02-10 | 2004-08-26 | Matsushita Electric Ind Co Ltd | Method and device for detecting aberration of optical lens, and diffraction grating for sensing aberration |
| CN101545826B (en) * | 2009-04-30 | 2010-11-03 | 中国科学院上海光学精密机械研究所 | Device and method for measuring diffraction efficiency of grating |
| CN103245487A (en) * | 2012-02-07 | 2013-08-14 | 中国科学院微电子研究所 | Method for testing absolute diffraction efficiency of transmission grating |
| CN102706542A (en) * | 2012-06-26 | 2012-10-03 | 上海理工大学 | Detection method of diffracted wavefront of concave diffraction grating |
| CN103424241B (en) * | 2013-02-22 | 2015-11-11 | 上海理工大学 | Concave grating diffraction characteristic pick-up unit |
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