CN104052233A - Linear motor and motor platform - Google Patents
Linear motor and motor platform Download PDFInfo
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- CN104052233A CN104052233A CN201410187117.5A CN201410187117A CN104052233A CN 104052233 A CN104052233 A CN 104052233A CN 201410187117 A CN201410187117 A CN 201410187117A CN 104052233 A CN104052233 A CN 104052233A
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- 238000006073 displacement reaction Methods 0.000 claims description 14
- 230000002153 concerted effect Effects 0.000 claims description 12
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- 230000033001 locomotion Effects 0.000 description 20
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Abstract
The invention discloses a linear motor and a motor platform. A magnet array of the linear motor is arranged on a stator, and a coil is arranged on a rotor. The polarities of a plurality of magnets in the magnet array are the same in the X direction and change in an alternating mode in the Y direction. When the rotor moves in the X-direction, the magnet array does not apply acting force on the coil basically, and when the coil is electrified, the magnet array applies the acting force on the coil in the Y direction. In the motor platform, the linear motor is used as a motor assembly in the Y direction. Driving force applied by the Y-direction motor assembly through the rotor of the Y-direction motor assembly roughly passes through the mass center of a driven object. The driving force applied by an X-direction motor assembly through a rotor of the X-direction motor assembly passes through the mass center changing range of the driven object. Therefore, the driving force in the two directions can be easily set to pass through a roughly pass through the mass center of the driven object so as to reduce the unfavorable effect of the additional moment.
Description
Technical field
The present invention relates to a kind of linear electric motors and motor platform.
Background technology
When firmly driving object, the barycenter that actuating force direction can be aimed at driven thing is reasonable.
As shown in Figure 1A, when actuating force F just in time passes through barycenter C, the motion of object is steadily reliable, and actuating force F can not produce additional torque yet.
Otherwise, as shown in Figure 1B, when the direction of actuating force F and the barycenter C of object have larger deviation, the relative object mass center C of actuating force F can produce an additional torque M, affect stationarity and the reliability of object of which movement, and make object bear additional moment loading.
In the course of work of X-Y motor platform, can there is this problem too.
For example, in the design of motor platform (X-Y-Theta platform), expectation as far as possible the motor arrangement of directions X (first direction) making roughly consistent position of X motor actuating force direction and directions X motion barycenter, the motor arrangement of Y-direction to made to the position that Y motor actuating force direction is consistent with Y-direction motion barycenter equally.But in the design of actual X-Y-Theta platform, due to the forms of motion of motor, the restriction of the each side such as the design and installation space of platform, makes the requirement that actuating force is consistent with motion barycenter or consistent as far as possible be difficult to be met.
Summary of the invention
Technical problem to be solved by this invention is to make the barycenter of the object that the actuating force of the motor in motor platform drives with it consistent or consistent as far as possible.
According to an aspect of the present invention, provide a kind of linear electric motors, comprised stator and mover, be provided with coil on one in stator and mover, on another, be provided with magnet array.Stator and mover are provided so that mover can be along first direction (directions X) and second direction (Y-direction) motion, the normal direction of the action face of magnet array is third direction (Z direction), first direction, second direction and third direction are perpendicular to one another, and coil and magnet array are provided so that magnet array does not apply active force to coil substantially when mover moves along first direction, and when switching in coil, magnet array produces the active force in second direction to coil.
Preferably, magnet array is arranged on stator, and coil is arranged on mover, and the polarity of a plurality of magnet in magnet array is identical in a first direction, and alternately changes in second direction.
Preferably, the action face of each magnet in magnet array is rectangle, and its long edge first direction arranges, its shorter edge second direction arranges, be provided with in a first direction one or more groups magnet, in second direction, be provided with many group magnet, thereby form magnet array.
Preferably, be provided with two groups of magnet arrays on stator, two groups of magnet arrays are arranged on the coil both sides of stator, and the polarity of the magnet of facing mutually on third direction in two groups of magnet arrays is contrary.
According to another aspect of the present invention, provide a kind of motor platform, having comprised: first direction electric machine assembly, has driven its mover to move in a first direction; And second direction electric machine assembly, drive its mover to move upward in second party, first direction is perpendicular to one another with second direction, second direction electric machine assembly is according to linear electric motors of the present invention, and the mover of second direction electric machine assembly is set to can motion in a first direction under the driving of the mover of first direction electric machine assembly.
Preferably, the actuating force that second direction electric machine assembly applies by its mover is roughly passed through the barycenter of its driven object, and the actuating force that first direction electric machine assembly applies by its mover is through the barycenter excursion of its driven object.
Preferably, first direction electric machine assembly comprises two hollow cylinder linear electric motors that arrange along first direction, and the mover of first direction electric machine assembly is arranged between two hollow cylinder linear electric motors.
Preferably, the axis height of hollow cylinder linear electric motors is higher than the height of center of mass of the driven object of the mover of first direction electric machine assembly, the axis height of another hollow cylinder linear electric motors is lower than the height of center of mass of driven object, makes the height of center of mass of height that the equivalence of the actuating force that two hollow cylinder linear electric motors produce makes a concerted effort and driven object roughly the same.
Preferably, also comprise: electric rotating machine, be arranged on the mover of second direction electric machine assembly, electric rotating machine there is hollow tube-shape structure, on its stator, be provided with coil block, on its rotor, be provided with magnet assemblies.
Preferably, also comprise: first direction linear displacement transducer, its read head is arranged on base, and its ruler is arranged on the mover of first direction electric machine assembly; Second direction linear displacement transducer, its read head is arranged on the mover of first direction electric machine assembly, and its ruler is arranged on the mover of second direction electric machine assembly.Corner displacement transducer, its read head is arranged on the stator of electric rotating machine, and its ruler is arranged on the excircle of rotor of electric rotating machine.
Accompanying drawing explanation
Figure 1A and Figure 1B are respectively actuating force directions through driven object barycenter with without the schematic diagram in the situation of driven object barycenter.
Fig. 2 shows the example of the operable magnet assemblies of Y-direction electric machine assembly.
Fig. 3 A and 3B are respectively schematic isometric and the diagrammatic side view of conventional U-shaped hollow linear electric motors.
Fig. 4 A and 4B show respectively along the profile of A-A line in Fig. 3 B and B-B line.
Fig. 5 shows a kind of schematic diagram of Novel U-shaped hollow linear electric motors.
Fig. 6 A-6C schematically shows according to the setting of the magnet polarity of the magnet array of U-shaped hollow linear electric motors of the present invention.
Fig. 7 schematically shows the example according to motor platform of the present invention.
Fig. 8 A schematically shows the oblique view of cutting open of electric rotating machine, and Fig. 8 B shows the profile that electric rotating machine is cut open along diametric plane.
Embodiment
Below with reference to accompanying drawing, describe in detail according to a preferred embodiment of the invention.
Motor platform according to the present invention comprises directions X (first direction) electric machine assembly and Y-direction (second direction) electric machine assembly, drives respectively its mover separately to move in directions X and Y-direction.Directions X is perpendicular to one another with Y-direction.
For Y-direction electric machine assembly, preferably make the actuating force applying by its mover roughly pass through the barycenter of its driven object.For Y-direction electric machine assembly, the barycenter of its driven object is generally constant on directions X, only under the driving of Y-direction electric machine assembly, moves in the Y direction.
And for directions X electric machine assembly, quite different.Because directions X electric machine assembly demand motive Y-direction electric machine assembly at least partially in moving on directions X, and at least mover of Y-direction electric machine assembly also can move in the Y direction.Like this, mobile in the barycenter excursion that the barycenter of the driven object of directions X electric machine assembly can be certain in the Y direction.
Like this, need to make actuating force that directions X electric machine assembly applies by its mover through the barycenter excursion of its driven object.For example, actuating force can be passed through the mid portion of barycenter excursion, or for example, through other specific position in barycenter excursion (the upper barycenter of statistics is positioned at the maximum probability of this position or larger position).So also can reduce the impact that additional moment produces.
On the other hand, the quality that reduces the part of moving in Y-direction also can be dwindled the barycenter excursion of the driven object of directions X electric machine assembly.So also further contribute to reduce the impact that additional moment produces.
Directions X electric machine assembly can adopt the motor of any amount and type to realize.In a preferred embodiment, directions X electric machine assembly can comprise two hollow cylinder linear electric motors that arrange along directions X, and the mover of directions X electric machine assembly is arranged between two hollow cylinder linear electric motors.
The barycenter excursion through driven object of making a concerted effort to be set to of two linear electric motors.
Here, " making a concerted effort " compared while can be understood as with its several component acting in conjunction, produces the power of same effect.Here the same effect said comprises identical with respect to the moment of any reference point, consider the position of the point of application of each power, according to moment relation, provided the equivalent point of application position of making a concerted effort, each component is zero with respect to the moment sum of the equivalent point of application of making a concerted effort.Here mention the position that " position of making a concerted effort " refers to the equivalent point of application of making a concerted effort.
When two linear electric motors produce the actuating force of formed objects and equidirectional in the ordinary course of things, the center of making a concerted effort o'clock between two linear electric motors.In this case, only the barycenter of the driven object of directions X electric machine assembly need to be arranged near two centers between linear electric motors, or the barycenter excursion of driven object is set to comprise this center.
Because the motion barycenter of directions X is generally difficult to the axle center of two hollow cylinder linear electric motors with high, so preferably configuration of two hollow cylinder linear electric motors one height (preferably high away from the axle center of the hollow cylinder linear electric motors of Y-direction electric machine assembly) low (preferably the axle center of the hollow cylinder linear electric motors of close Y-direction electric machine assembly is lower), the line mid point in two axle center (or resultant direction of the actuating force of two motors) is contour with X motion barycenter, make the height of center of mass of height that the equivalence of the actuating force that two hollow cylinder linear electric motors produce makes a concerted effort and driven object roughly the same.Special situation, also can be designed to contour the axle center of two hollow cylinder linear electric motors and directions X motion barycenter.
In order to reduce the quality of the driven object of directions X electric machine assembly, can adopt novel Y-direction electric machine assembly.The stator of Y-direction electric machine assembly (below referred to as " Y-direction stator ") can be arranged on the mover (below referred to as " directions X mover ") of directions X electric machine assembly.And the mover of Y-direction electric machine assembly (below referred to as " Y-direction mover ") moves on directions X with directions X mover.
In other words, Y-direction mover moves on directions X with directions X mover, and in Y-direction, moves under the driving of Y-direction electric machine assembly.
On Y-direction mover and Y-direction stator, be respectively arranged with coil and magnet array.Coil and magnet array are provided so that magnet array does not apply active force to coil substantially when Y-direction mover moves along directions X, and when switching in coil, magnet array produces the active force in Y-direction to coil.
Because magnet assemblies run-of-the-mill is larger, preferably, magnet assemblies can be arranged on Y-direction stator, and coil is arranged on Y-direction mover.Yet, also magnet assemblies can be arranged on Y-direction mover, and coil is arranged on Y-direction stator.
Fig. 2 shows the example of the operable magnet assemblies of Y-direction electric machine assembly.
On directions X, be provided with one or more groups magnet, be provided with in the Y direction many group magnet, thereby form magnet array.
The upper surface of each magnet in magnet array (surface in the face of coil, can be called " action face ") is rectangle, and its long edge directions X arranges, and its shorter edge Y-direction arranges.On directions X, can use like this magnet of lesser amt.
As shown in Figure 2, the polarity of a plurality of magnet in magnet array is identical on directions X, and alternately changes in the Y direction.In Fig. 2, the action face of 3 magnet of the first row is all the S utmost point, and the upper surface of 3 magnet of the second row is all the N utmost point, so replaces.
On stator, also can be provided with two groups of magnet arrays facing mutually, two groups of magnet arrays are arranged on the coil both sides of stator.The polarity of the magnet of facing mutually in Z direction in two groups of magnet arrays is contrary.
Fig. 5 shows a kind of schematic diagram of Novel U-shaped hollow linear electric motors.The electric machine assembly that is provided with two groups of magnet arrays facing mutually that U-shaped hollow linear electric motors shown in Fig. 5 are mentioned just above.These U-shaped hollow linear electric motors have decoupling zero (decouple) structure.
Fig. 3 A and 3B are respectively schematic isometric and the diagrammatic side view of conventional U-shaped hollow linear electric motors.
As shown in Fig. 3 A and 3B, magnet assemblies 300 inner sides are provided with groove, and two groups of magnet arrays 310,320 are practised physiognomy and groove are set over the ground in both sides, and space is left in centre, so that coil block 330 can move betwixt.Coil block 330 can only move in one direction.
Fig. 4 A and 4B show respectively along the profile of A-A line in Fig. 3 B and B-B line, wherein show the polarity arrangement at the apparent surface place of two groups of magnet arrays 310,320.
As shown in Figure 4 A, the magnet surface place polarity of magnet array 310 be (from left to right) N, S, N ..., S, the magnet surface place polarity of magnet array 320 be (from left to right) S, N, S ..., N.Magnet surface place alternating polarity in each magnet array changes.The surface polarity of the magnet of facing mutually in two groups of magnet arrays is contrary.
Shown in Fig. 5 according to U-shaped hollow linear electric motors of the present invention.
As shown in Figure 5, on stator 500, be provided with two groups of magnet arrays 510,520.Two groups of magnet arrays 510,520 are arranged on the coil both sides that arrange on coil block (mover) 530.
The polarity of the magnet of facing mutually in Z direction in two groups of magnet arrays 510,520 is contrary.Like this, the magnet array 510,520 of both sides can produce the active force on equidirectional to coil.
Fig. 6 A-6C schematically shows according to the setting of the magnet polarity of the magnet array 510,520 of U-shaped hollow linear electric motors of the present invention (i.e. two surfaces that magnet array is relative, also i.e. the action face to coil generation effect).
Wherein Fig. 6 B is the schematic top view of U-shaped hollow linear electric motors shown in Fig. 5.Fig. 6 A is that hypothesis is cut the cutaway view opening on backward open along C-C line in Fig. 6 B.Fig. 6 C is that hypothesis is cut the cutaway view opening under backward open along D-D line in Fig. 6 B.
As shown in Fig. 6 A and 6C, in magnet array 510,520, the physical dimension of each magnet can be the same, and just magnetizing direction is different.Every a line has three bar magnets of identical polar.Yet the invention is not restricted to a line three bar magnets, can be a long magnet, can be also the magnet of any other quantity.
See from top to bottom, the magnetic of each row alternately changes.Along Y-direction, see, the magnet surface place polarity of magnet array 510 be followed successively by (in figure from top to bottom) S, N, S ..., N, correspondingly, the magnet surface place polarity of magnet array 520 be followed successively by (in figure from top to bottom) N, S, N ..., S.Magnet surface place alternating polarity in each magnet array changes.And the surface polarity of the magnet of facing mutually in two groups of magnet arrays is contrary.
The example that shown in Fig. 6 A and Fig. 6 C, just magnet polarity arranges, the polarity setting of two sections also can be exchanged, and does not affect the performance of motor.
When coil block 530 moves under the driving of two hollow cylinder linear electric motors of directions X, magnetic flux by coil block there is no variation (when the physical dimension error of each magnet and the error that magnetizes are negligible), therefore, no matter whether coil block switches on, it all can not produce power output at directions X, that is to say that coil block can only move along with directions X, can not disturb and affect the motion of directions X.But when coil block is switched on, in fact the U-shaped hollow linear electric motors of Decouple structure are at this time exactly common U-shaped hollow linear electric motors, produce output and the motion of Y-direction.
Y-direction electric machine assembly adopts this special decoupling-structure, dexterously the magnet of Y-direction electric machine assembly is placed in outside the motion of directions X, make the motor of directions X need not drive the magnet assemblies of very heavy Y-direction motor, greatly improved driving force and the dynamic property of X-Y platform.And adopt this decoupling-structure can arrange easily the direction of Y-direction actuating force, make it be easy to aim at or aim at as far as possible the center of gravity of Y-direction motion.
Below with reference to accompanying drawing 7, describe according to the example of motor platform of the present invention.Wherein, directions X electric machine assembly is used two hollow cylinder linear electric motors, and Y-direction electric machine assembly is used U-shaped hollow linear electric motors as shown in Figure 5.
Motor platform shown in Fig. 7 can be divided into three assemblies haply, directions X electric machine assembly 100, Y-direction electric machine assembly 200, electric rotating machine 400.
Directions X electric machine assembly 100 comprises two hollow cylinder linear electric motors 110, directions X guide rail 120 and X plates 130 that are arranged on base 150.X plate (mover of directions X electric machine assembly) 130 rides on directions X guide rail 120, and is arranged between two hollow cylinder linear electric motors 120.In addition, also comprise directions X linear displacement transducer 140, its read head is arranged on base, and its ruler is arranged on the mover of directions X electric machine assembly.
Y-direction electric machine assembly 200 comprises stator 210, coil block 215, Y plate 230, Y-direction guide rail 220.Stator 210 is independent of the mover part of directions X electric machine assembly and arranges.Coil block 215 is fixedly connected with Y plate 230, forms Y-direction mover.Y-direction guide rail 220 is arranged on X plate, and Y plate 230 rides on Y-direction guide rail 220.In addition, also comprise Y-direction linear displacement transducer 240, it is upper that its read head is arranged on X plate 130 (being the mover of directions X electric machine assembly), and its ruler is arranged on Y plate (being the mover of Y-direction electric machine assembly).Y-direction electric machine assembly 200 can be U-shaped hollow linear electric motors shown in Fig. 5.
Electric rotating machine 400 is arranged on Y plate 230.On electric rotating machine 400, be provided with corner displacement transducer 440, its read head is arranged on the stator of electric rotating machine, and its ruler is arranged on the excircle of rotor of electric rotating machine.Example below with reference to Fig. 8 A and 8B detailed description electric rotating machine 400.
The workpiece that will drive (driven object) of directions X electric machine assembly 100 comprises the coil block of two hollow cylinder linear electric motors 110, (for example fixedly connected of cable of X plate 130 and attached workpiece thereof, ride over slide block on directions X guide rail 120 etc.), the ruler of directions X linear displacement transducer, Y-direction guide rail 220, the coil block 215 of Y-direction motor, (for example fixedly connected of cable of Y plate 230 and attached workpiece thereof, ride over slide block on Y-direction guide rail etc.), the read head of Y-direction linear displacement transducer 240 and ruler, and electric rotating machine 400.
The ruler of Y plate 230 and attached workpiece thereof, Y-direction linear displacement transducer 240 and electric rotating machine 400 can, under the driving of Y-direction electric machine assembly, move in the Y direction.Therefore, the barycenter of the driven object of directions X electric machine assembly 100 has certain excursion.
By designing the relative position of two hollow cylinder linear electric motors 110, X plate 130, can two the direction of making a concerted effort that produces of hollow cylinder linear electric motors 110 be set to through this barycenter excursion.Preferably, for example, can pass through the mid portion of barycenter excursion, or can be through become the larger part of probability of barycenter in this barycenter excursion.
Hollow cylinder linear electric motors 110 near the stator 210 of Y-direction electric machine assembly 200 arrange lowlyer (facilitating Y plate 230 and 215 motions of Y-direction coil block), and arrange highlyer away from the hollow cylinder linear electric motors 110 of the stator 210 of Y-direction electric machine assembly 200.Like this can be so that the height of making a concerted effort of two hollow cylinder linear electric motors 110 identical with the height of barycenter (height of center of mass general change little) haply.
The workpiece that will drive (driven object) of Y-direction electric machine assembly 200 comprise Y-direction motor coil block 215, Y plate 230 and attached workpiece thereof (such as fixedly connected of cable, ride over slide block on Y-direction guide rail etc.), ruler and the electric rotating machine 400 of Y-direction linear displacement transducer 240.
The part being fixedly connected with coil block 215 on Y plate 230 is protruding in Z direction, makes the height of the height (and height of the actuating force of Y-direction electric machine assembly) of coil 215 and the driven object of Y-direction electric machine assembly roughly the same.In addition, can further arrange coil block 215 with respect to its driven object the relative position relation on directions X so that the actuating force that Y-direction electric machine assembly 200 applies is roughly passed through the barycenter of its driven object.
Fig. 8 A schematically shows the oblique view of cutting open of electric rotating machine, and Fig. 8 B shows the profile that electric rotating machine is cut open along diametric plane.
According to the electric rotating machine using in embodiments of the invention, be DDR (directly the driving rotation) motor of large hollow, there is hollow tube-shape structure.On base 810, be provided with rotating circular magnet assemblies (rotor) inside fixing circular coil block (stator) and coil block.Coil block comprises iron core 820 and coil 830.In magnet assemblies, be provided with magnet 840.
Coil block and magnet assemblies directly have angular contact ball bearing or crossed roller bearing 850.
Coil block top is provided with angular encoder read head 860.On the excircle of magnet assemblies top circle ring part, be provided with angular encoder ruler 870.Angular encoder rotary ruler 870 can be grating scale or magnetic railings ruler.
All position transducers (straight line or corner displacement transducer), no matter be, adopt photoelectric encoder or magnetic encoder, all adopt encoder read head to fix, encoder scale chi (grating scale or magnetic railings ruler) motion, the motion that is conducive to like this reduce sensor wire is on the impact of platform property and the impact on sensor output signal.
The model machine performance index that adopt the solution of the present invention design to realize are as follows: directions X resolution is 1um, directions X kinematic accuracy is ± 5um, acceleration is 6G (G is acceleration of gravity), and directions X maximum movement speed is 1.5m/s, and directions X dynamic response time is 10ms; Y-direction resolution is 1um, and Y-direction kinematic accuracy is ± 5um, and acceleration is 8G (G is acceleration of gravity), and Y-direction maximum movement speed is 2m/s, and Y-direction dynamic response time is 10ms; The resolution of Theta is 20000～6000000counts/rev, the maximum output torque of Theta direction DDR motor is 100Nm nearly, Theta direction dynamic response time is 10ms, and Theta direction maximum rotation angular speed is 3000rev/min (different resolution maximum rotational speed is different).
So far, specific embodiments of the invention have been described in detail.Yet it will be understood by those skilled in the art that and the invention is not restricted to details above-mentioned.Protection scope of the present invention is limited by appended claims.
Claims (10)
1. linear electric motors, comprise stator and mover, are provided with coil on one in described stator and described mover, are provided with magnet array on another,
It is characterized in that,
Described stator and described mover are provided so that described mover can move along first direction and second direction,
The normal direction of the action face of described magnet array is third direction,
Described first direction, described second direction and described third direction are perpendicular to one another, and
Described coil and described magnet array be provided so that when described mover moves along described first direction described in magnet array substantially described coil is not applied to active force, and when switching in coil, described magnet array produces the active force in described second direction to described coil.
2. according to the linear electric motors of claim 1, it is characterized in that,
Described magnet array is arranged on described stator, and described coil is arranged on described mover,
The polarity of a plurality of magnet in described magnet array is identical on described first direction, and alternately changes in described second direction.
3. according to the linear electric motors of claim 2, it is characterized in that,
The action face of each magnet in described magnet array is rectangle, first direction setting described in its long edge, and second direction setting described in its shorter edge,
On described first direction, be provided with one or more groups magnet, in described second direction, be provided with many group magnet, thereby form described magnet array.
4. according to the linear electric motors of claim 2 or 3, it is characterized in that,
On described stator, be provided with two groups of magnet arrays, described two groups of magnet arrays are arranged on the coil both sides that arrange on described mover,
The polarity of the magnet of facing mutually on described third direction in described two groups of magnet arrays is contrary.
5. a motor platform, comprising:
First direction electric machine assembly, drives its mover to move in a first direction; And
Second direction electric machine assembly, drives its mover to move upward in second party, and described first direction is perpendicular to one another with described second direction,
It is characterized in that,
Described second direction electric machine assembly is according to any one linear electric motors in claim 1 to 4,
The mover of described second direction electric machine assembly is set under the driving of the mover of described first direction electric machine assembly, in described first party, to move upward.
6. according to the motor platform of claim 5, it is characterized in that,
The actuating force that described second direction electric machine assembly applies by its mover is roughly passed through the barycenter of its driven object,
The actuating force that described first direction electric machine assembly applies by its mover is through the barycenter excursion of its driven object.
7. according to the motor platform of claim 5 or 6, it is characterized in that,
Described first direction electric machine assembly comprises two hollow cylinder linear electric motors that arrange along described first direction,
The mover of described first direction electric machine assembly is arranged between described two hollow cylinder linear electric motors.
8. according to the motor platform of claim 7, it is characterized in that,
The axis height of hollow cylinder linear electric motors is higher than the height of center of mass of the driven object of the mover of described first direction electric machine assembly, the axis height of another hollow cylinder linear electric motors is lower than the height of center of mass of described driven object, makes the height of center of mass of height that the equivalence of the actuating force that described two hollow cylinder linear electric motors produce makes a concerted effort and described driven object roughly the same.
9. according to the motor platform of claim 6, it is characterized in that, also comprise:
Electric rotating machine, is arranged on the mover of described second direction electric machine assembly, described electric rotating machine there is hollow tube-shape structure, on its stator, be provided with coil block, on its rotor, be provided with magnet assemblies.
10. according to the motor platform of claim 9, it is characterized in that, also comprise:
First direction linear displacement transducer, its read head is arranged on base, and its ruler is arranged on the mover of described first direction electric machine assembly;
Second direction linear displacement transducer, its read head is arranged on the mover of described first direction electric machine assembly, and its ruler is arranged on the mover of described second direction electric machine assembly; And
Corner displacement transducer, its read head is arranged on the stator of described electric rotating machine, and its ruler is arranged on the excircle of rotor of described electric rotating machine.
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| CN112404533A (en) * | 2019-08-23 | 2021-02-26 | 斯伦贝谢技术有限公司 | Milling machine and method for cutting a recess in a tube |
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| US20130258307A1 (en) * | 2012-02-16 | 2013-10-03 | Nikon Corporation | Magnet Array Configuration for Higher Efficiency Planar Motor |
| CN203827153U (en) * | 2014-05-05 | 2014-09-10 | 肖俊东 | Linear motor and motor platform |
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