BR9701330A - Processo e aparelho para refinamento de silício - Google Patents
Processo e aparelho para refinamento de silícioInfo
- Publication number
- BR9701330A BR9701330A BR9701330A BR9701330A BR9701330A BR 9701330 A BR9701330 A BR 9701330A BR 9701330 A BR9701330 A BR 9701330A BR 9701330 A BR9701330 A BR 9701330A BR 9701330 A BR9701330 A BR 9701330A
- Authority
- BR
- Brazil
- Prior art keywords
- silicon refinement
- refinement
- silicon
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/037—Purification
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6331996 | 1996-03-19 | ||
JP28822096A JPH09309716A (ja) | 1996-03-19 | 1996-10-30 | シリコンの精製方法 |
JP34796196A JPH10182132A (ja) | 1996-12-26 | 1996-12-26 | シリコンの精製方法および精製装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
BR9701330A true BR9701330A (pt) | 1998-11-10 |
Family
ID=27298127
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR9701330A BR9701330A (pt) | 1996-03-19 | 1997-03-18 | Processo e aparelho para refinamento de silício |
Country Status (7)
Country | Link |
---|---|
US (1) | US6231826B1 (pt) |
EP (1) | EP0796820B1 (pt) |
CN (1) | CN1167728A (pt) |
BR (1) | BR9701330A (pt) |
CA (1) | CA2200166C (pt) |
DE (1) | DE69702555T2 (pt) |
NO (1) | NO971252L (pt) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1254861B1 (en) * | 2000-12-28 | 2008-01-30 | Sumco Corporation | Silicon continuous casting method |
US20060048698A1 (en) * | 2002-09-27 | 2006-03-09 | Ge Energy (Usa) Llc | Methods and systems for purifying elements |
CN100457615C (zh) * | 2003-12-04 | 2009-02-04 | 陶氏康宁公司 | 从冶金级硅中去除杂质以制得太阳能级硅的方法 |
JP2005343780A (ja) * | 2004-06-03 | 2005-12-15 | Iis Materials:Kk | スクラップシリコンのリサイクル方法 |
JP4826936B2 (ja) * | 2004-06-03 | 2011-11-30 | 株式会社 アイアイエスマテリアル | 電子ビームを用いたスクラップシリコンの精錬方法 |
JP4947455B2 (ja) * | 2005-08-16 | 2012-06-06 | 則近 山内 | 電子ビームを用いたシリコンの精錬方法及び装置 |
US7955433B2 (en) * | 2007-07-26 | 2011-06-07 | Calisolar, Inc. | Method and system for forming a silicon ingot using a low-grade silicon feedstock |
JP5311930B2 (ja) * | 2007-08-29 | 2013-10-09 | 住友化学株式会社 | シリコンの製造方法 |
US7572425B2 (en) * | 2007-09-14 | 2009-08-11 | General Electric Company | System and method for producing solar grade silicon |
CN101219789B (zh) * | 2007-09-29 | 2010-06-16 | 北京航空航天大学 | 高能束流多晶硅提纯装置 |
CN101391773B (zh) * | 2008-04-15 | 2011-01-12 | 南安市三晶阳光电力有限公司 | 弥散气体导入金属硅提纯法 |
KR101275218B1 (ko) | 2008-08-01 | 2013-06-17 | 가부시키가이샤 아루박 | 금속의 정제 방법 |
DE112009001953T8 (de) * | 2008-08-12 | 2013-03-21 | Ulvac, Inc. | Siliziumreinigungsverfahren |
US8454920B2 (en) * | 2008-08-15 | 2013-06-04 | Ulvac, Inc. | Silicon purification method |
US7998224B2 (en) * | 2008-10-21 | 2011-08-16 | Varian Semiconductor Equipment Associates, Inc. | Removal of a sheet from a production apparatus |
CN101565184B (zh) * | 2009-05-22 | 2011-12-07 | 宜昌南玻硅材料有限公司 | 一种多晶硅生产用氢化炉装置内电极密封的方法及装置 |
US8475540B2 (en) * | 2009-08-12 | 2013-07-02 | Sri International | Multi-stage system for reaction and melt coalescence and separation |
CN101708850B (zh) * | 2009-11-19 | 2011-09-14 | 大连理工大学 | 连续熔炼去除多晶硅中磷和硼的方法及装置 |
CN101708849B (zh) * | 2009-11-19 | 2012-08-01 | 大连理工大学 | 局部蒸发去除多晶硅中硼的方法及装置 |
CN102120579B (zh) * | 2011-01-29 | 2012-10-03 | 大连隆田科技有限公司 | 一种电子束高效、连续熔炼提纯多晶硅的方法及设备 |
CN102126725B (zh) * | 2011-01-29 | 2012-12-19 | 大连隆田科技有限公司 | 一种电子束浅熔池熔炼提纯多晶硅的方法及设备 |
DE102013107685B3 (de) * | 2013-07-18 | 2014-09-18 | Ald Vacuum Technologies Gmbh | Vorrichtung und Verfahren zum sequentiellen Schmelzen und Raffinieren in einem kontinuierlichen Verfahren |
CN104651929B (zh) * | 2013-11-22 | 2018-08-21 | 青岛昌盛日电太阳能科技股份有限公司 | 一种电子束熔炼多晶硅除氧与铸锭耦合的方法及设备 |
CN104131338B (zh) * | 2014-07-17 | 2016-08-24 | 大连理工大学 | 电子束顶部局部加热凝固多晶硅除杂装置及多晶硅加热凝固除杂方法 |
CN108128779B (zh) * | 2018-01-30 | 2020-05-19 | 青岛蓝光晶科新材料有限公司 | 一种去除多晶硅中碳、氮杂质的方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4298423A (en) | 1976-12-16 | 1981-11-03 | Semix Incorporated | Method of purifying silicon |
JPS54107884A (en) | 1978-02-14 | 1979-08-24 | Toshiba Corp | Vacuum depositing method for silicon |
US4668493A (en) | 1982-06-22 | 1987-05-26 | Harry Levin | Process for making silicon |
DE3241366A1 (de) | 1982-11-09 | 1984-05-10 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen von fuer halbleiterbauelemente, insbesondere solarzellen, verwendbarem silicium |
DE3403131A1 (de) | 1984-01-30 | 1985-08-01 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum reinigen von im lichtbogenofen erzeugtem silicium |
DE3635064A1 (de) | 1986-10-15 | 1988-04-21 | Bayer Ag | Verfahren zur raffination von silicium und derart gereinigtes silicium |
US4789506A (en) | 1986-11-07 | 1988-12-06 | Gas Research Institute | Method of producing tubular ceramic articles |
DE3806001A1 (de) | 1988-02-25 | 1989-09-07 | Siemens Ag | Anordnung zum vollstaendigen entleeren von mit siliziumschmelze gefuellten quarzwannen oder -tiegeln nach dem siliziumbandziehen |
JPH03215661A (ja) | 1990-01-19 | 1991-09-20 | Seiko Instr Inc | イオンプレーティング装置 |
DE4111190A1 (de) | 1991-04-06 | 1992-10-08 | Hoechst Ceram Tec Ag | Kohlenstoffkoerper mit siliziumkarbid-beschichtung und verfahren zu ihrer herstellung |
US5220804A (en) | 1991-12-09 | 1993-06-22 | Isothermal Systems Research, Inc | High heat flux evaporative spray cooling |
US5431869A (en) | 1993-01-12 | 1995-07-11 | Council Of Scientific & Industrial Research | Process for the preparation of polycrystalline silicon ingot |
JPH06280004A (ja) | 1993-03-24 | 1994-10-04 | Japan Steel Works Ltd:The | 電子ビーム蒸発源 |
JPH06345416A (ja) * | 1993-06-02 | 1994-12-20 | Kawasaki Steel Corp | 電子ビーム溶解によるシリコンの精錬方法 |
JPH0717704A (ja) * | 1993-06-24 | 1995-01-20 | Kawasaki Steel Corp | 電子ビーム溶解によるシリコンの精錬方法 |
JPH07309614A (ja) * | 1994-03-24 | 1995-11-28 | Kawasaki Steel Corp | シリコンの精製方法 |
JP3140300B2 (ja) * | 1994-03-29 | 2001-03-05 | 川崎製鉄株式会社 | シリコンの精製方法および精製装置 |
-
1997
- 1997-03-13 DE DE69702555T patent/DE69702555T2/de not_active Expired - Fee Related
- 1997-03-13 EP EP97104299A patent/EP0796820B1/en not_active Expired - Lifetime
- 1997-03-17 CA CA002200166A patent/CA2200166C/en not_active Expired - Fee Related
- 1997-03-18 CN CN97111213A patent/CN1167728A/zh active Pending
- 1997-03-18 BR BR9701330A patent/BR9701330A/pt not_active Application Discontinuation
- 1997-03-18 NO NO971252A patent/NO971252L/no not_active Application Discontinuation
-
1999
- 1999-09-08 US US09/391,564 patent/US6231826B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1167728A (zh) | 1997-12-17 |
DE69702555D1 (de) | 2000-08-24 |
EP0796820B1 (en) | 2000-07-19 |
CA2200166A1 (en) | 1997-09-19 |
US6231826B1 (en) | 2001-05-15 |
NO971252D0 (no) | 1997-03-18 |
NO971252L (no) | 1997-09-22 |
CA2200166C (en) | 2002-01-22 |
DE69702555T2 (de) | 2000-11-23 |
EP0796820A1 (en) | 1997-09-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FB34 | Technical and formal requirements: requirement - article 34 of industrial property law | ||
B06A | Notification to applicant to reply to the report for non-patentability or inadequacy of the application [chapter 6.1 patent gazette] | ||
B11B | Dismissal acc. art. 36, par 1 of ipl - no reply within 90 days to fullfil the necessary requirements |