BR8706755A - Sensor de pressao capacitivo eletrostatico - Google Patents
Sensor de pressao capacitivo eletrostaticoInfo
- Publication number
- BR8706755A BR8706755A BR8706755A BR8706755A BR8706755A BR 8706755 A BR8706755 A BR 8706755A BR 8706755 A BR8706755 A BR 8706755A BR 8706755 A BR8706755 A BR 8706755A BR 8706755 A BR8706755 A BR 8706755A
- Authority
- BR
- Brazil
- Prior art keywords
- pressure sensor
- capacitive pressure
- electrostatic capacitive
- electrostatic
- sensor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61294787A JPS63149531A (ja) | 1986-12-12 | 1986-12-12 | 静電容量式圧力センサ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BR8706755A true BR8706755A (pt) | 1988-07-19 |
Family
ID=17812272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BR8706755A BR8706755A (pt) | 1986-12-12 | 1987-12-11 | Sensor de pressao capacitivo eletrostatico |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4769738A (pt) |
| JP (1) | JPS63149531A (pt) |
| BR (1) | BR8706755A (pt) |
| DE (1) | DE3741941A1 (pt) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI84401C (fi) * | 1987-05-08 | 1991-11-25 | Vaisala Oy | Kapacitiv tryckgivarkonstruktion. |
| FI893874A (fi) * | 1989-08-17 | 1991-02-18 | Vaisala Oy | Kontaktfoersedd givare med skiktstruktur samt foerfarande foer utfoerande av kontakteringen. |
| WO1998017987A1 (de) * | 1996-10-24 | 1998-04-30 | Joshua Lanter | Kapazitiver druck- oder kraftsensor |
| US6882030B2 (en) * | 1996-10-29 | 2005-04-19 | Tru-Si Technologies, Inc. | Integrated circuit structures with a conductor formed in a through hole in a semiconductor substrate and protruding from a surface of the substrate |
| US6498074B2 (en) | 1996-10-29 | 2002-12-24 | Tru-Si Technologies, Inc. | Thinning and dicing of semiconductor wafers using dry etch, and obtaining semiconductor chips with rounded bottom edges and corners |
| EP2270846A3 (en) | 1996-10-29 | 2011-12-21 | ALLVIA, Inc. | Integrated circuits and methods for their fabrication |
| SE9704840D0 (sv) * | 1997-12-22 | 1997-12-22 | Cecap Ab | Tryckgivare för detektering av små tryckdifferenser och låga tryck |
| US20040099061A1 (en) | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
| US6322903B1 (en) | 1999-12-06 | 2001-11-27 | Tru-Si Technologies, Inc. | Package of integrated circuits and vertical integration |
| US6717254B2 (en) | 2001-02-22 | 2004-04-06 | Tru-Si Technologies, Inc. | Devices having substrates with opening passing through the substrates and conductors in the openings, and methods of manufacture |
| US6787916B2 (en) | 2001-09-13 | 2004-09-07 | Tru-Si Technologies, Inc. | Structures having a substrate with a cavity and having an integrated circuit bonded to a contact pad located in the cavity |
| US20030183943A1 (en) * | 2002-03-28 | 2003-10-02 | Swan Johanna M. | Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme |
| US6908845B2 (en) * | 2002-03-28 | 2005-06-21 | Intel Corporation | Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme |
| US6848177B2 (en) * | 2002-03-28 | 2005-02-01 | Intel Corporation | Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme |
| US6993973B2 (en) * | 2003-05-16 | 2006-02-07 | Mks Instruments, Inc. | Contaminant deposition control baffle for a capacitive pressure transducer |
| DE102004006199B4 (de) * | 2004-02-09 | 2015-09-03 | Robert Bosch Gmbh | Mikromechanischer Drucksensor für hohe Drücke |
| US7201057B2 (en) | 2004-09-30 | 2007-04-10 | Mks Instruments, Inc. | High-temperature reduced size manometer |
| US7137301B2 (en) | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
| US7141447B2 (en) | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
| US7204150B2 (en) | 2005-01-14 | 2007-04-17 | Mks Instruments, Inc. | Turbo sump for use with capacitive pressure sensor |
| JP2007064920A (ja) * | 2005-09-02 | 2007-03-15 | Alps Electric Co Ltd | 静電容量型力学量センサ |
| US20080202251A1 (en) * | 2007-02-27 | 2008-08-28 | Iee International Electronics & Engineering S.A. | Capacitive pressure sensor |
| JP5400560B2 (ja) * | 2009-10-16 | 2014-01-29 | アズビル株式会社 | 静電容量型センサ |
| EP2871455B1 (en) | 2013-11-06 | 2020-03-04 | Invensense, Inc. | Pressure sensor |
| EP2871456B1 (en) | 2013-11-06 | 2018-10-10 | Invensense, Inc. | Pressure sensor and method for manufacturing a pressure sensor |
| EP3110313B1 (en) | 2014-02-28 | 2024-06-12 | Valencell, Inc. | Method and apparatus for generating assessments using physical activity and biometric parameters |
| DE102014115803A1 (de) * | 2014-10-30 | 2016-05-19 | Endress + Hauser Gmbh + Co. Kg | MEMS-Sensor, insbesondere Differenzdrucksensor |
| EP3614115B1 (en) | 2015-04-02 | 2024-09-11 | InvenSense, Inc. | Pressure sensor |
| EP3106426B1 (en) * | 2015-06-19 | 2019-11-06 | Invensense, Inc. | Pressure sensor |
| DE102016200164B3 (de) * | 2015-10-16 | 2016-03-31 | Ifm Electronic Gmbh | Kapazitive Druckmesszelle und Druckmessgerät mit einer solchen Druckmesszelle |
| DE102018105868A1 (de) * | 2018-03-14 | 2019-09-19 | Endress+Hauser SE+Co. KG | Verfahren zum Herstellen eines halbleiterbasierten Drucksensors |
| US11225409B2 (en) | 2018-09-17 | 2022-01-18 | Invensense, Inc. | Sensor with integrated heater |
| WO2020236661A1 (en) | 2019-05-17 | 2020-11-26 | Invensense, Inc. | A pressure sensor with improve hermeticity |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4040118A (en) * | 1975-06-18 | 1977-08-02 | Bunker Ramo Corporation | Pressure sensitive transducer |
| US4177680A (en) * | 1977-10-14 | 1979-12-11 | Bunker Ramo Corporation | Dual pressure sensor |
| JPS5516228A (en) * | 1978-07-21 | 1980-02-04 | Hitachi Ltd | Capacity type sensor |
| JPS5855732A (ja) * | 1981-09-30 | 1983-04-02 | Hitachi Ltd | 静電容量型圧力センサ |
| US4467394A (en) * | 1983-08-29 | 1984-08-21 | United Technologies Corporation | Three plate silicon-glass-silicon capacitive pressure transducer |
| FI71015C (fi) * | 1984-02-21 | 1986-10-27 | Vaisala Oy | Temperaturoberoende kapacitiv tryckgivare |
| FI74350C (fi) * | 1984-02-21 | 1988-01-11 | Vaisala Oy | Kapacitiv absoluttryckgivare. |
| JPS60233863A (ja) * | 1984-05-04 | 1985-11-20 | Fuji Electric Co Ltd | 静電容量式圧力センサ |
| EP0195985B1 (de) * | 1985-03-27 | 1990-01-24 | Siemens Aktiengesellschaft | Kapazitiver Drucksensor |
| JPS61272623A (ja) * | 1985-05-29 | 1986-12-02 | Fuji Electric Co Ltd | 静電容量式圧力センサ |
-
1986
- 1986-12-12 JP JP61294787A patent/JPS63149531A/ja active Pending
-
1987
- 1987-12-01 US US07/127,262 patent/US4769738A/en not_active Expired - Fee Related
- 1987-12-10 DE DE19873741941 patent/DE3741941A1/de active Granted
- 1987-12-11 BR BR8706755A patent/BR8706755A/pt not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE3741941A1 (de) | 1988-07-21 |
| JPS63149531A (ja) | 1988-06-22 |
| US4769738A (en) | 1988-09-06 |
| DE3741941C2 (pt) | 1992-07-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| B21A | Patent or certificate of addition expired [chapter 21.1 patent gazette] |
Free format text: PATENTE EXTINTA EM 11/12/2002 |