Nothing Special   »   [go: up one dir, main page]

AU7385298A - Apparatus for treating semiconductor wafers - Google Patents

Apparatus for treating semiconductor wafers

Info

Publication number
AU7385298A
AU7385298A AU73852/98A AU7385298A AU7385298A AU 7385298 A AU7385298 A AU 7385298A AU 73852/98 A AU73852/98 A AU 73852/98A AU 7385298 A AU7385298 A AU 7385298A AU 7385298 A AU7385298 A AU 7385298A
Authority
AU
Australia
Prior art keywords
semiconductor wafers
treating semiconductor
treating
wafers
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU73852/98A
Inventor
Christopher F McConnell
Lawrence J. Myland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CFMT Inc
Original Assignee
CFMT Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CFMT Inc filed Critical CFMT Inc
Publication of AU7385298A publication Critical patent/AU7385298A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
AU73852/98A 1997-07-31 1998-05-14 Apparatus for treating semiconductor wafers Abandoned AU7385298A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US90448197A 1997-07-31 1997-07-31
US08904481 1997-07-31
PCT/US1998/009787 WO1999006163A1 (en) 1997-07-31 1998-05-14 Apparatus for treating semiconductor wafers

Publications (1)

Publication Number Publication Date
AU7385298A true AU7385298A (en) 1999-02-22

Family

ID=25419233

Family Applications (1)

Application Number Title Priority Date Filing Date
AU73852/98A Abandoned AU7385298A (en) 1997-07-31 1998-05-14 Apparatus for treating semiconductor wafers

Country Status (2)

Country Link
AU (1) AU7385298A (en)
WO (1) WO1999006163A1 (en)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2127397A (en) * 1937-03-08 1938-08-16 Dayton Rubber Mfg Co Strainer
US2147792A (en) * 1937-04-09 1939-02-21 Zella F Campbell Filter
US2374500A (en) * 1943-09-04 1945-04-24 Walter J Reading Washer for eggs or the like
US2628721A (en) * 1949-11-23 1953-02-17 Gen Motors Corp Gasoline filter
US3543776A (en) * 1968-04-30 1970-12-01 Interlab Inc Laminar flow rinsing and drying vessels
DE3344187A1 (en) * 1983-12-07 1985-07-04 Seitz-Filter-Werke Theo & Geo Seitz GmbH und Co, 6550 Bad Kreuznach FILTERING MEMBRANE WITH SEALING AND METHOD FOR THEIR PRODUCTION
US4852596A (en) * 1987-05-08 1989-08-01 The University Of Virginia Alumni Patents Foundation Micro slide irrigating unit
US5069235A (en) * 1990-08-02 1991-12-03 Bold Plastics, Inc. Apparatus for cleaning and rinsing wafers
US5503171A (en) * 1992-12-26 1996-04-02 Tokyo Electron Limited Substrates-washing apparatus
US5383484A (en) * 1993-07-16 1995-01-24 Cfmt, Inc. Static megasonic cleaning system for cleaning objects

Also Published As

Publication number Publication date
WO1999006163A1 (en) 1999-02-11

Similar Documents

Publication Publication Date Title
AU8070498A (en) Methods for treating semiconductor wafers
AU5682898A (en) Device for processing semiconductor wafers
TW504041U (en) Wafer processing apparatus
AU3308699A (en) Apparatus and method for cleaning semiconductor wafers
IL123235A (en) Semiconductor wafer polishing apparatus
GB2292254B (en) Method for polishing semiconductor substrate and apparatus for the same
AU5813998A (en) Semiconductor processing apparatus having wafer re-orientation mechanism
AU5823399A (en) An apparatus for holding a semiconductor wafer
AU5176098A (en) Method for adjusting semiconductor processing equipment
AU3893297A (en) Abrasive construction for semiconductor wafer modification
AU7358994A (en) Semiconductor wafer processing system
AU3550597A (en) Apparatus and method for polishing semiconductor devices
AU2301699A (en) System for the treatment of wafers
SG66487A1 (en) Wafer polishing apparatus
AU1163399A (en) Method of semiconductor device fabrication
SG80597A1 (en) Wafer polishing apparatus
TW474456U (en) Semiconductor apparatus
SG75876A1 (en) Process and device for polishing semiconductor wafers
AU4977799A (en) Wafer cleaning apparatus
SG64439A1 (en) Coating apparatus for semiconductor process
SG67448A1 (en) Substrate treatment apparatus
GB9710204D0 (en) Semiconductor wafer thermal processing apparatus
EP0744770A3 (en) Semiconductor apparatus
EP0847078A4 (en) Method for manufacturing semiconductor device
GB9914083D0 (en) Method and apparatus for improved semiconductor wafer polishing

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase