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AU2009900575A0 - Semiconductor Fabrication Furnace - Google Patents

Semiconductor Fabrication Furnace

Info

Publication number
AU2009900575A0
AU2009900575A0 AU2009900575A AU2009900575A AU2009900575A0 AU 2009900575 A0 AU2009900575 A0 AU 2009900575A0 AU 2009900575 A AU2009900575 A AU 2009900575A AU 2009900575 A AU2009900575 A AU 2009900575A AU 2009900575 A0 AU2009900575 A0 AU 2009900575A0
Authority
AU
Australia
Prior art keywords
semiconductor fabrication
fabrication furnace
furnace
semiconductor
fabrication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2009900575A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Griffith University
Original Assignee
Griffith University
Filing date
Publication date
Application filed by Griffith University filed Critical Griffith University
Publication of AU2009900575A0 publication Critical patent/AU2009900575A0/en
Priority to AU2010213363A priority Critical patent/AU2010213363B2/en
Priority to MYPI2011003565A priority patent/MY156300A/en
Priority to KR1020117018726A priority patent/KR101696792B1/en
Priority to JP2011549395A priority patent/JP5616364B2/en
Priority to EP10740848.6A priority patent/EP2396450B1/en
Priority to SG2011054145A priority patent/SG173150A1/en
Priority to US13/148,942 priority patent/US9011600B2/en
Priority to SG2014012835A priority patent/SG2014012835A/en
Priority to CN201080007530.9A priority patent/CN102317500B/en
Priority to PCT/AU2010/000153 priority patent/WO2010091473A1/en
Abandoned legal-status Critical Current

Links

AU2009900575A 2009-02-12 2009-02-12 Semiconductor Fabrication Furnace Abandoned AU2009900575A0 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
PCT/AU2010/000153 WO2010091473A1 (en) 2009-02-12 2010-02-12 A chemical vapour deposition system and process
EP10740848.6A EP2396450B1 (en) 2009-02-12 2010-02-12 A chemical vapour deposition system and process
MYPI2011003565A MY156300A (en) 2009-02-12 2010-02-12 A chemical vapour deposition system and process
KR1020117018726A KR101696792B1 (en) 2009-02-12 2010-02-12 A chemical vapour deposition system and process
JP2011549395A JP5616364B2 (en) 2009-02-12 2010-02-12 Chemical vapor deposition system and chemical vapor deposition process
AU2010213363A AU2010213363B2 (en) 2009-02-12 2010-02-12 A chemical vapour deposition system and process
SG2011054145A SG173150A1 (en) 2009-02-12 2010-02-12 A chemical vapour deposition system and process
US13/148,942 US9011600B2 (en) 2009-02-12 2010-02-12 Chemical vapour deposition system and process
SG2014012835A SG2014012835A (en) 2009-02-12 2010-02-12 A chemical vapour deposition system and process
CN201080007530.9A CN102317500B (en) 2009-02-12 2010-02-12 A chemical vapour deposition system and process

Publications (1)

Publication Number Publication Date
AU2009900575A0 true AU2009900575A0 (en) 2009-02-26

Family

ID=

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