AU2003227042A8 - Method for producing micro-mechanical components and components produced according to said method - Google Patents
Method for producing micro-mechanical components and components produced according to said methodInfo
- Publication number
- AU2003227042A8 AU2003227042A8 AU2003227042A AU2003227042A AU2003227042A8 AU 2003227042 A8 AU2003227042 A8 AU 2003227042A8 AU 2003227042 A AU2003227042 A AU 2003227042A AU 2003227042 A AU2003227042 A AU 2003227042A AU 2003227042 A8 AU2003227042 A8 AU 2003227042A8
- Authority
- AU
- Australia
- Prior art keywords
- components
- produced according
- producing micro
- mechanical components
- mechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
- B81C1/0065—Mechanical properties
- B81C1/00666—Treatments for controlling internal stress or strain in MEMS structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00182—Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
- F16K99/0007—Lift valves of cantilever type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0051—Electric operating means therefor using electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/031—Thermal actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/054—Microvalves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0118—Cantilevers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0161—Controlling physical properties of the material
- B81C2201/0163—Controlling internal stress of deposited layers
- B81C2201/0169—Controlling internal stress of deposited layers by post-annealing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0181—Physical Vapour Deposition [PVD], i.e. evaporation, sputtering, ion plating or plasma assisted deposition, ion cluster beam technology
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/008—Multi-layer fabrications
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Micromachines (AREA)
- Springs (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2002110344 DE10210344A1 (en) | 2002-03-08 | 2002-03-08 | Method for producing micromechanical components and components produced using the method |
DE10210344.5 | 2002-03-08 | ||
PCT/EP2003/002435 WO2003076331A2 (en) | 2002-03-08 | 2003-03-10 | Method for producing micro-mechanical components and components produced according to said method |
Publications (2)
Publication Number | Publication Date |
---|---|
AU2003227042A1 AU2003227042A1 (en) | 2003-09-22 |
AU2003227042A8 true AU2003227042A8 (en) | 2003-09-22 |
Family
ID=27797622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003227042A Abandoned AU2003227042A1 (en) | 2002-03-08 | 2003-03-10 | Method for producing micro-mechanical components and components produced according to said method |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU2003227042A1 (en) |
DE (1) | DE10210344A1 (en) |
WO (1) | WO2003076331A2 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004008009A1 (en) | 2003-12-23 | 2005-07-28 | Robert Bosch Gmbh | Integrated microvalve and method of making a microvalve |
DE102008014707B3 (en) * | 2008-03-18 | 2009-07-23 | Hugo Kern Und Liebers Gmbh & Co. Kg | Spring plate manufacturing method, involves transmitting plate with positioned tongue into working container for slide grinding front surfaces of tongue, removing spring plate from container, and leading back tongue into initial position |
US20110073788A1 (en) * | 2009-09-30 | 2011-03-31 | Marcus Michael A | Microvalve for control of compressed fluids |
US20110073188A1 (en) * | 2009-09-30 | 2011-03-31 | Marcus Michael A | Microvalve for control of compressed fluids |
MY155726A (en) * | 2011-11-01 | 2015-11-17 | Mimos Berhad | A microfluidic system and method thereof |
BE1021436B1 (en) * | 2012-10-26 | 2015-11-20 | Francis Henry De Frahan | MECHANICAL DEVICE THAT ADJUSTS THE FLOW OF FLUIDS. |
DE102016203024A1 (en) * | 2016-02-26 | 2017-08-31 | Zf Friedrichshafen Ag | Electromagnetic valve with spring tongues |
DE102023202097A1 (en) | 2023-03-09 | 2024-09-12 | Robert Bosch Gesellschaft mit beschränkter Haftung | Method and device for producing a MEMS component |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3235714A1 (en) * | 1982-09-27 | 1984-03-29 | Siemens AG, 1000 Berlin und 8000 München | METHOD AND DEVICE FOR ADJUSTING CONTACT SPRINGS IN A RELAY |
JP2623817B2 (en) * | 1989-02-20 | 1997-06-25 | 富士通株式会社 | Bending method and bending apparatus using laser beam |
JP2878810B2 (en) * | 1990-09-07 | 1999-04-05 | 富士通株式会社 | Spring pressure control method and apparatus for leaf spring |
US5176358A (en) * | 1991-08-08 | 1993-01-05 | Honeywell Inc. | Microstructure gas valve control |
US5325880A (en) * | 1993-04-19 | 1994-07-05 | Tini Alloy Company | Shape memory alloy film actuated microvalve |
EP0731978B1 (en) * | 1994-10-04 | 1998-06-10 | Koninklijke Philips Electronics N.V. | Method of adjusting the switch-gap in a reed switch |
US5613861A (en) * | 1995-06-07 | 1997-03-25 | Xerox Corporation | Photolithographically patterned spring contact |
JP2796622B2 (en) * | 1996-03-07 | 1998-09-10 | セイコーインスツルメンツ株式会社 | Fine processing method and fine processing structure |
DE19736674C1 (en) * | 1997-08-22 | 1998-11-26 | Siemens Ag | Micromechanical electrostatic relay |
US6908770B1 (en) * | 1998-07-16 | 2005-06-21 | Board Of Regents, The University Of Texas System | Fluid based analysis of multiple analytes by a sensor array |
JP4042244B2 (en) * | 1999-02-23 | 2008-02-06 | 松下電工株式会社 | Semiconductor microactuator, semiconductor microvalve, and semiconductor microrelay |
-
2002
- 2002-03-08 DE DE2002110344 patent/DE10210344A1/en not_active Withdrawn
-
2003
- 2003-03-10 AU AU2003227042A patent/AU2003227042A1/en not_active Abandoned
- 2003-03-10 WO PCT/EP2003/002435 patent/WO2003076331A2/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
AU2003227042A1 (en) | 2003-09-22 |
WO2003076331A2 (en) | 2003-09-18 |
DE10210344A1 (en) | 2003-10-02 |
WO2003076331A3 (en) | 2004-08-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IL159728A0 (en) | Method for producing micro-electromechanical components | |
GB0502071D0 (en) | Al-cu-Mg-si alloy and method for producing the same | |
EP1514928A4 (en) | Method for producing antibodies | |
PL374600A1 (en) | Method of producing honeycomb structures | |
SG107594A1 (en) | Method to form multi-material components | |
AU2003213718A8 (en) | Method of producing antigens | |
GB0226270D0 (en) | Method of producing retinyl esters | |
PL1697390T3 (en) | Method for producing organoacylphosphites | |
EP1437326A4 (en) | METHOD FOR PRODUCING Si | |
EP1589128A4 (en) | Corrosion-resistant member and method for producing same | |
SG105014A1 (en) | Optoelectronic component and method for producing it | |
AU2003227042A8 (en) | Method for producing micro-mechanical components and components produced according to said method | |
AU2003273136A8 (en) | Functional optical devices and methods for producing them | |
EP1568655A4 (en) | Micromachine and method of producing the same | |
EP1632478A4 (en) | Method for producing purified 2-cyanoacrylate | |
IL169778A0 (en) | Method for producing polyorganosiloxane particles and for producing silica particles | |
PL1640351T3 (en) | Method for producing honeycomb structure | |
AU2003246225A1 (en) | Method of producing mold | |
AU2003275905A8 (en) | Method for producing a component, body for producing a component of this type and component produced according to said method | |
PL377835A1 (en) | METHOD FOR PRODUCING α- L-ASPARTYL-L-PHENYLALANINE-β-ESTER AND METHOD FOR PRODUCING α-L-ASPARTYL-L-PHENYLALANINE-α-METHYL ESTER | |
PL376016A1 (en) | Method for producing ceramic structure | |
HK1133870A1 (en) | Method for producing 4-pentafluoride-sulfanyl-benzoylguanidines | |
HK1076992A1 (en) | Method for producing instant noodles and instant noodles | |
AU2003283009A8 (en) | Method for producing structured surfaces | |
EP1556396A4 (en) | Method for producing 2-deoxy-l-ribose |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |