Nothing Special   »   [go: up one dir, main page]

AU2003227042A8 - Method for producing micro-mechanical components and components produced according to said method - Google Patents

Method for producing micro-mechanical components and components produced according to said method

Info

Publication number
AU2003227042A8
AU2003227042A8 AU2003227042A AU2003227042A AU2003227042A8 AU 2003227042 A8 AU2003227042 A8 AU 2003227042A8 AU 2003227042 A AU2003227042 A AU 2003227042A AU 2003227042 A AU2003227042 A AU 2003227042A AU 2003227042 A8 AU2003227042 A8 AU 2003227042A8
Authority
AU
Australia
Prior art keywords
components
produced according
producing micro
mechanical components
mechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003227042A
Other versions
AU2003227042A1 (en
Inventor
Mike Becker
Josef Binder
Wolfgang Benecke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universitaet Bremen
Original Assignee
Universitaet Bremen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universitaet Bremen filed Critical Universitaet Bremen
Publication of AU2003227042A1 publication Critical patent/AU2003227042A1/en
Publication of AU2003227042A8 publication Critical patent/AU2003227042A8/en
Abandoned legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00642Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
    • B81C1/0065Mechanical properties
    • B81C1/00666Treatments for controlling internal stress or strain in MEMS structures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00182Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15CFLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0003Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005Lift valves
    • F16K99/0007Lift valves of cantilever type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0034Operating means specially adapted for microvalves
    • F16K99/0042Electric operating means therefor
    • F16K99/0051Electric operating means therefor using electrostatic means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/03Microengines and actuators
    • B81B2201/031Thermal actuators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/05Microfluidics
    • B81B2201/054Microvalves
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/01Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118Cantilevers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00Manufacture or treatment of microstructural devices or systems
    • B81C2201/01Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0161Controlling physical properties of the material
    • B81C2201/0163Controlling internal stress of deposited layers
    • B81C2201/0169Controlling internal stress of deposited layers by post-annealing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00Manufacture or treatment of microstructural devices or systems
    • B81C2201/01Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/0181Physical Vapour Deposition [PVD], i.e. evaporation, sputtering, ion plating or plasma assisted deposition, ion cluster beam technology
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0073Fabrication methods specifically adapted for microvalves
    • F16K2099/0074Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0073Fabrication methods specifically adapted for microvalves
    • F16K2099/008Multi-layer fabrications

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
  • Springs (AREA)
  • ing And Chemical Polishing (AREA)
AU2003227042A 2002-03-08 2003-03-10 Method for producing micro-mechanical components and components produced according to said method Abandoned AU2003227042A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2002110344 DE10210344A1 (en) 2002-03-08 2002-03-08 Method for producing micromechanical components and components produced using the method
DE10210344.5 2002-03-08
PCT/EP2003/002435 WO2003076331A2 (en) 2002-03-08 2003-03-10 Method for producing micro-mechanical components and components produced according to said method

Publications (2)

Publication Number Publication Date
AU2003227042A1 AU2003227042A1 (en) 2003-09-22
AU2003227042A8 true AU2003227042A8 (en) 2003-09-22

Family

ID=27797622

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003227042A Abandoned AU2003227042A1 (en) 2002-03-08 2003-03-10 Method for producing micro-mechanical components and components produced according to said method

Country Status (3)

Country Link
AU (1) AU2003227042A1 (en)
DE (1) DE10210344A1 (en)
WO (1) WO2003076331A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004008009A1 (en) 2003-12-23 2005-07-28 Robert Bosch Gmbh Integrated microvalve and method of making a microvalve
DE102008014707B3 (en) * 2008-03-18 2009-07-23 Hugo Kern Und Liebers Gmbh & Co. Kg Spring plate manufacturing method, involves transmitting plate with positioned tongue into working container for slide grinding front surfaces of tongue, removing spring plate from container, and leading back tongue into initial position
US20110073788A1 (en) * 2009-09-30 2011-03-31 Marcus Michael A Microvalve for control of compressed fluids
US20110073188A1 (en) * 2009-09-30 2011-03-31 Marcus Michael A Microvalve for control of compressed fluids
MY155726A (en) * 2011-11-01 2015-11-17 Mimos Berhad A microfluidic system and method thereof
BE1021436B1 (en) * 2012-10-26 2015-11-20 Francis Henry De Frahan MECHANICAL DEVICE THAT ADJUSTS THE FLOW OF FLUIDS.
DE102016203024A1 (en) * 2016-02-26 2017-08-31 Zf Friedrichshafen Ag Electromagnetic valve with spring tongues
DE102023202097A1 (en) 2023-03-09 2024-09-12 Robert Bosch Gesellschaft mit beschränkter Haftung Method and device for producing a MEMS component

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3235714A1 (en) * 1982-09-27 1984-03-29 Siemens AG, 1000 Berlin und 8000 München METHOD AND DEVICE FOR ADJUSTING CONTACT SPRINGS IN A RELAY
JP2623817B2 (en) * 1989-02-20 1997-06-25 富士通株式会社 Bending method and bending apparatus using laser beam
JP2878810B2 (en) * 1990-09-07 1999-04-05 富士通株式会社 Spring pressure control method and apparatus for leaf spring
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
US5325880A (en) * 1993-04-19 1994-07-05 Tini Alloy Company Shape memory alloy film actuated microvalve
EP0731978B1 (en) * 1994-10-04 1998-06-10 Koninklijke Philips Electronics N.V. Method of adjusting the switch-gap in a reed switch
US5613861A (en) * 1995-06-07 1997-03-25 Xerox Corporation Photolithographically patterned spring contact
JP2796622B2 (en) * 1996-03-07 1998-09-10 セイコーインスツルメンツ株式会社 Fine processing method and fine processing structure
DE19736674C1 (en) * 1997-08-22 1998-11-26 Siemens Ag Micromechanical electrostatic relay
US6908770B1 (en) * 1998-07-16 2005-06-21 Board Of Regents, The University Of Texas System Fluid based analysis of multiple analytes by a sensor array
JP4042244B2 (en) * 1999-02-23 2008-02-06 松下電工株式会社 Semiconductor microactuator, semiconductor microvalve, and semiconductor microrelay

Also Published As

Publication number Publication date
AU2003227042A1 (en) 2003-09-22
WO2003076331A2 (en) 2003-09-18
DE10210344A1 (en) 2003-10-02
WO2003076331A3 (en) 2004-08-05

Similar Documents

Publication Publication Date Title
IL159728A0 (en) Method for producing micro-electromechanical components
GB0502071D0 (en) Al-cu-Mg-si alloy and method for producing the same
EP1514928A4 (en) Method for producing antibodies
PL374600A1 (en) Method of producing honeycomb structures
SG107594A1 (en) Method to form multi-material components
AU2003213718A8 (en) Method of producing antigens
GB0226270D0 (en) Method of producing retinyl esters
PL1697390T3 (en) Method for producing organoacylphosphites
EP1437326A4 (en) METHOD FOR PRODUCING Si
EP1589128A4 (en) Corrosion-resistant member and method for producing same
SG105014A1 (en) Optoelectronic component and method for producing it
AU2003227042A8 (en) Method for producing micro-mechanical components and components produced according to said method
AU2003273136A8 (en) Functional optical devices and methods for producing them
EP1568655A4 (en) Micromachine and method of producing the same
EP1632478A4 (en) Method for producing purified 2-cyanoacrylate
IL169778A0 (en) Method for producing polyorganosiloxane particles and for producing silica particles
PL1640351T3 (en) Method for producing honeycomb structure
AU2003246225A1 (en) Method of producing mold
AU2003275905A8 (en) Method for producing a component, body for producing a component of this type and component produced according to said method
PL377835A1 (en) METHOD FOR PRODUCING α- L-ASPARTYL-L-PHENYLALANINE-β-ESTER AND METHOD FOR PRODUCING α-L-ASPARTYL-L-PHENYLALANINE-α-METHYL ESTER
PL376016A1 (en) Method for producing ceramic structure
HK1133870A1 (en) Method for producing 4-pentafluoride-sulfanyl-benzoylguanidines
HK1076992A1 (en) Method for producing instant noodles and instant noodles
AU2003283009A8 (en) Method for producing structured surfaces
EP1556396A4 (en) Method for producing 2-deoxy-l-ribose

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase