AU2003295133A1 - Deformable-mirror cooling - Google Patents

Deformable-mirror cooling

Info

Publication number: AU2003295133A1
Authority: AU; Australia
Prior art keywords: deformable; mirror cooling; mirror; cooling
Prior art date: 2002-12-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2003295133A

Other versions

AU2003295133A8 (en

Inventor

Nicholas John Archer

Michael Stewart Griffith

Leslie Charles Laycock

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

BEA SYSTEMS PLC

Original Assignee

BEA SYSTEMS PLC

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-12-23

Filing date

2003-12-18

Publication date

2004-07-14

2002-12-23 Priority claimed from GB0230040A external-priority patent/GB0230040D0/en

2002-12-23 Priority claimed from GB0230038A external-priority patent/GB0230038D0/en

2003-04-30 Priority claimed from GB0310421A external-priority patent/GB0310421D0/en

2003-12-18 Application filed by BEA SYSTEMS PLC filed Critical BEA SYSTEMS PLC

2004-07-14 Publication of AU2003295133A1 publication Critical patent/AU2003295133A1/en

2004-07-14 Publication of AU2003295133A8 publication Critical patent/AU2003295133A8/en

Status Abandoned legal-status Critical Current

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
- G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Optical Elements Other Than Lenses (AREA)
Mounting And Adjusting Of Optical Elements (AREA)

AU2003295133A 2002-12-23 2003-12-18 Deformable-mirror cooling Abandoned AU2003295133A1 (en)

Applications Claiming Priority (7)

Application Number	Priority Date	Filing Date	Title
GB0230040A GB0230040D0 (en)	2002-12-23	2002-12-23	Deformable-mirror cooling
GB0230040.8		2002-12-23
GB0230038.2		2002-12-23
GB0230038A GB0230038D0 (en)	2002-12-23	2002-12-23	Deformable-mirror holder
GB0310421.3		2003-04-30
GB0310421A GB0310421D0 (en)	2002-12-23	2003-04-30	Deformable-mirror cooling
PCT/GB2003/005530 WO2004057408A2 (en)	2002-12-23	2003-12-18	Deformable-mirror cooling

Publications (2)

Publication Number	Publication Date
AU2003295133A1 true AU2003295133A1 (en)	2004-07-14
AU2003295133A8 AU2003295133A8 (en)	2004-07-14

Family

ID=32685760

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2003295133A Abandoned AU2003295133A1 (en)	2002-12-23	2003-12-18	Deformable-mirror cooling

Country Status (2)

Country	Link
AU (1)	AU2003295133A1 (en)
WO (1)	WO2004057408A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE102007038872A1 (en) *	2007-08-16	2009-02-26	Seereal Technologies S.A.	Imaging device for influencing incident light
EP2353043A1 (en)	2008-11-20	2011-08-10	BAE Systems PLC	Deformable mirror suspension
EP2189832A1 (en) *	2008-11-20	2010-05-26	BAE Systems PLC	Deformable Mirror Suspension
CN109656015B (en) *	2019-01-25	2021-04-13	中国工程物理研究院激光聚变研究中心	Method for improving wavefront distortion correction precision of optical system
FR3096511B1 (en)	2019-05-22	2021-07-02	Amplitude Systemes	Optical component mount and associated light beam control system
DE102020210026A1 (en) *	2020-08-07	2022-02-10	Carl Zeiss Smt Gmbh	Projection exposure system with temperature control device
DE102022203395A1 (en)	2022-04-06	2023-04-06	Carl Zeiss Smt Gmbh	EUV mirror, optical system and method for operating an optical system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4657358A (en) *	1985-08-23	1987-04-14	Itek Corporation	Cooled deformable mirror
US5037190A (en) *	1990-07-27	1991-08-06	Litton Systems, Inc.	Fusible link actuators for deformable mirrors
US5535043A (en) *	1994-08-22	1996-07-09	Hughes Aircraft Company	Replaceable actuator assembly for optical mirror with kinematic mount

2003
- 2003-12-18 WO PCT/GB2003/005530 patent/WO2004057408A2/en not_active Application Discontinuation
- 2003-12-18 AU AU2003295133A patent/AU2003295133A1/en not_active Abandoned

Also Published As

Publication number	Publication date
WO2004057408A3 (en)	2004-11-11
AU2003295133A8 (en)	2004-07-14
WO2004057408A2 (en)	2004-07-08

Publication	Publication Date	Title
AU2002238861A1 (en)	2003-09-22	Refrigerator
AU2003235312A1 (en)	2003-11-03	Refrigerator
AU2003291995A1 (en)	2004-06-23	Cooling device
EP1394485A3 (en)	2004-09-22	Refrigerator
AU2003239909A1 (en)	2004-05-25	Enhanced-service provision
AU2002335152A1 (en)	2003-09-04	Robot-phone
AU2002953193A0 (en)	2003-01-02	Cooling helmet
AU2003288566A1 (en)	2004-07-14	Deformable-mirror cooling
AU2003286949A1 (en)	2004-07-22	Refrigerator
AU2003295133A1 (en)	2004-07-14	Deformable-mirror cooling
AU2002367810A1 (en)	2003-11-10	Bis-transition-metal-chelate-probes
AU2003260327A1 (en)	2004-02-25	Refrigerator
AU2002318053A1 (en)	2004-02-02	Suplier
AU2002348964A1 (en)	2004-01-19	Snowbike
AU2002341221A1 (en)	2004-04-19	Honey-brandy
AU2003228146A1 (en)	2003-11-10	Cooling device
AU2002344387A1 (en)	2003-12-22	Multifunction-pillow
AUPS008102A0 (en)	2002-02-07	Cooling means
AU2003270207A1 (en)	2004-04-23	Cooling method
AUPS217202A0 (en)	2002-06-06	Cooling devices
AU2002100160A4 (en)	2002-04-11	Oxidirator
AU2002100747A4 (en)	2003-03-20	Powersell
AU2002100026A4 (en)	2002-02-07	Disc400
AU2002100280A4 (en)	2002-05-09	Proshoe
AU2002100468A4 (en)	2002-11-14	Flexi-edger

Legal Events

Date	Code	Title	Description
2005-09-08	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase