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AU2002314767A1 - An apparatus and method for ultrasensitive nanoelectromechanical mass detection - Google Patents

An apparatus and method for ultrasensitive nanoelectromechanical mass detection

Info

Publication number
AU2002314767A1
AU2002314767A1 AU2002314767A AU2002314767A AU2002314767A1 AU 2002314767 A1 AU2002314767 A1 AU 2002314767A1 AU 2002314767 A AU2002314767 A AU 2002314767A AU 2002314767 A AU2002314767 A AU 2002314767A AU 2002314767 A1 AU2002314767 A1 AU 2002314767A1
Authority
AU
Australia
Prior art keywords
mass detection
ultrasensitive
nanoelectromechanical mass
ultrasensitive nanoelectromechanical
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002314767A
Inventor
Kamil L. Ekinci
Michael L. Roukes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
California Institute of Technology
Original Assignee
California Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by California Institute of Technology filed Critical California Institute of Technology
Publication of AU2002314767A1 publication Critical patent/AU2002314767A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/16—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
AU2002314767A 2001-05-04 2002-05-03 An apparatus and method for ultrasensitive nanoelectromechanical mass detection Abandoned AU2002314767A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US28874101P 2001-05-04 2001-05-04
US60/288,741 2001-05-04
PCT/US2002/014130 WO2002090246A2 (en) 2001-05-04 2002-05-03 An apparatus and method for ultrasensitive nanoelectromechanical mass detection

Publications (1)

Publication Number Publication Date
AU2002314767A1 true AU2002314767A1 (en) 2002-11-18

Family

ID=23108444

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002314767A Abandoned AU2002314767A1 (en) 2001-05-04 2002-05-03 An apparatus and method for ultrasensitive nanoelectromechanical mass detection

Country Status (5)

Country Link
US (1) US6722200B2 (en)
EP (1) EP1390287A2 (en)
AU (1) AU2002314767A1 (en)
CA (1) CA2446353A1 (en)
WO (1) WO2002090246A2 (en)

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FR3004874B1 (en) * 2013-04-17 2015-04-03 Commissariat Energie Atomique NANO-RESONATOR RESONANCE FREQUENCY MEASUREMENT CIRCUIT
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JP6403777B2 (en) * 2013-12-02 2018-10-10 コミッサリア ア レネルジ アトミック エ オー エネルジス アルテルナティヴスＣｏｍｍｉｓｓａｒｉａｔ Ａ Ｌ‘Ｅｎｅｒｇｉｅ Ａｔｏｍｉｑｕｅ Ｅｔ Ａｕｘ Ｅｎｅｒｇｉｅｓ Ａｌｔｅｒｎａｔｉｖｅｓ System and method for analyzing gas
EP2884520B8 (en) * 2013-12-12 2018-03-21 RISE Acreo AB Nano mass spectrometry
US11143548B2 (en) 2014-10-28 2021-10-12 Massachusetts Institute Of Technology Simultaneous oscillation and frequency tracking of multiple resonances via digitally implemented phase-locked loop array
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WO2017168373A1 (en) * 2016-03-31 2017-10-05 King Abdullah University Of Science And Technology Active mems microbeam device for gas detection
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Also Published As

Publication number Publication date
CA2446353A1 (en) 2002-11-14
US20030033876A1 (en) 2003-02-20
WO2002090246A2 (en) 2002-11-14
WO2002090246A3 (en) 2003-03-13
EP1390287A2 (en) 2004-02-25
US6722200B2 (en) 2004-04-20

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase