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ATA282989A - Interferometerkopf und interferometeranordnung mit einem solchen interferometerkopf - Google Patents

Interferometerkopf und interferometeranordnung mit einem solchen interferometerkopf

Info

Publication number
ATA282989A
ATA282989A AT0282989A AT282989A ATA282989A AT A282989 A ATA282989 A AT A282989A AT 0282989 A AT0282989 A AT 0282989A AT 282989 A AT282989 A AT 282989A AT A282989 A ATA282989 A AT A282989A
Authority
AT
Austria
Prior art keywords
interferometer
head
arrangement
interferometer head
interferometer arrangement
Prior art date
Application number
AT0282989A
Other languages
English (en)
Original Assignee
Tabarelli Werner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tabarelli Werner filed Critical Tabarelli Werner
Priority to AT0282989A priority Critical patent/ATA282989A/de
Priority to DE59006531T priority patent/DE59006531D1/de
Priority to US07/861,825 priority patent/US5329356A/en
Priority to EP90915703A priority patent/EP0505366B1/de
Priority to PCT/AT1990/000102 priority patent/WO1991009271A1/de
Publication of ATA282989A publication Critical patent/ATA282989A/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
AT0282989A 1989-12-13 1989-12-13 Interferometerkopf und interferometeranordnung mit einem solchen interferometerkopf ATA282989A (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AT0282989A ATA282989A (de) 1989-12-13 1989-12-13 Interferometerkopf und interferometeranordnung mit einem solchen interferometerkopf
DE59006531T DE59006531D1 (en) 1989-12-13 1990-10-18 Interferometeranordnung.
US07/861,825 US5329356A (en) 1989-12-13 1990-10-18 Interferometer head and interferometer arrangement with rigid support structure
EP90915703A EP0505366B1 (de) 1989-12-13 1990-10-18 Interferometeranordnung
PCT/AT1990/000102 WO1991009271A1 (de) 1989-12-13 1990-10-18 Interferometerkopf und interferometeranordnung mit einem solchen interferometerkopf

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT0282989A ATA282989A (de) 1989-12-13 1989-12-13 Interferometerkopf und interferometeranordnung mit einem solchen interferometerkopf

Publications (1)

Publication Number Publication Date
ATA282989A true ATA282989A (de) 1993-12-15

Family

ID=3540950

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0282989A ATA282989A (de) 1989-12-13 1989-12-13 Interferometerkopf und interferometeranordnung mit einem solchen interferometerkopf

Country Status (5)

Country Link
US (1) US5329356A (de)
EP (1) EP0505366B1 (de)
AT (1) ATA282989A (de)
DE (1) DE59006531D1 (de)
WO (1) WO1991009271A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0546071B1 (de) * 1990-08-31 1995-12-27 Commonwealth Scientific And Industrial Research Organisation Interferenzmikroskop
WO1993022637A1 (de) * 1992-05-05 1993-11-11 Tabarelli, Werner Interferometer
JP2557171B2 (ja) * 1992-11-25 1996-11-27 株式会社ミツトヨ 変位検出装置
US6454761B1 (en) 1995-01-30 2002-09-24 Philip D. Freedman Laser surgery device and method
JP4008552B2 (ja) * 1997-10-31 2007-11-14 株式会社トプコン 干渉計測装置及び干渉計測制御システム
DE19902783C2 (de) * 1999-01-25 2002-11-07 Ettemeyer Ag Meßeinheit
US20030061488A1 (en) * 2001-09-25 2003-03-27 Michael Huebler Cloning protection for electronic equipment
JP5933190B2 (ja) * 2010-06-30 2016-06-08 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＤｒ． Ｊｏｈａｎｎｅｓ Ｈｅｉｄｅｎｈａｉｎ Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ 光学式距離測定機器
DE102012006420A1 (de) * 2012-03-30 2013-10-02 Carl Zeiss Sms Gmbh Temperatursensor sowie Verfahren zum Messen einer Temperaturänderung
DE102013209833B4 (de) * 2013-05-27 2024-09-26 Polytec Gmbh Vibrometer mit einem optischen Interferometer
DE102014006305B4 (de) * 2014-04-30 2017-11-23 Attocube Systems Ag Optisches Längenmesssystem mit einem interferometrischen Wegsensor zur Integration in Werkzeugmaschinen und Halbleiter-Lithografiesystemen
CN106814369B (zh) * 2017-02-21 2023-08-29 中国工程物理研究院激光聚变研究中心 成像型任意反射面速度干涉仪的成像及照明光路结构
CN110375783B (zh) * 2019-07-19 2024-08-09 中国科学院西安光学精密机械研究所 一种长波红外多普勒差分干涉仪组件支撑结构
CN111397515A (zh) * 2020-03-06 2020-07-10 国网上海市电力公司 基于梅花型光纤的mems多光束干涉腔及其制作方法
CN113835187B (zh) * 2021-09-24 2024-08-30 科德数控股份有限公司 高精度角度反射镜的安装制造方法及高精度角度反射镜

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4120588A (en) * 1976-07-12 1978-10-17 Erik Chaum Multiple path configuration for a laser interferometer
US4514054A (en) * 1982-01-19 1985-04-30 Gould Inc. Quadrature fiber-optic interferometer matrix
US4717240A (en) * 1986-07-21 1988-01-05 The Foxboro Company Interferometeric beamsplitter
JP2603959B2 (ja) * 1987-08-11 1997-04-23 株式会社トプコン 光ｉｃ干渉計
JPH01200360A (ja) * 1988-02-05 1989-08-11 Bridgestone Corp 電子写真用感光体

Also Published As

Publication number Publication date
US5329356A (en) 1994-07-12
DE59006531D1 (en) 1994-08-25
EP0505366A1 (de) 1992-09-30
EP0505366B1 (de) 1994-07-20
WO1991009271A1 (de) 1991-06-27

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