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Whatmore et al., 1997 - Google Patents

Sputtered lead scandium tantalate thin films: Pb 4+ in B sites in the perovskite structure

Whatmore et al., 1997

Document ID
3765609535884080902
Author
Whatmore R
Huang Z
Todd M
Publication year
Publication venue
Journal of applied physics

External Links

Snippet

Perovskite lead scandium tantalate (PST)—PbSc 1/2 Ta 1/2 O 3—thin films have been prepared from lead-rich targets by rf magnetron sputtering onto a variety of substrates (eg, MgO-on-sapphire and platinized silicon). Detailed microstructural chemical analysis of the …
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Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof

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