Cheben et al., 2007 - Google Patents
A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguidesCheben et al., 2007
View HTML- Document ID
- 3679978476085036531
- Author
- Cheben P
- Schmid J
- Delâge A
- Densmore A
- Janz S
- Lamontagne B
- Lapointe J
- Post E
- Waldron P
- Xu D
- Publication year
- Publication venue
- Optics express
External Links
Snippet
We demonstrate a 50-channel high-resolution arrayed waveguide grating microspectrometer with a 0.2 nm channel spacing on a silicon-on-insulator (SOI) platform. The chip size is 8 mm× 8 mm. High channel density and spectral resolution are achieved …
- 239000012212 insulator 0 title abstract description 10
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/122—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths
- G02B6/1221—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths made from organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/2935—Mach-Zehnder configuration, i.e. comprising separate splitting and combining means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/02—Optical fibre with cladding with or without a coating
- G02B6/02295—Microstructured optical fibre
- G02B6/02314—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/02—Optical fibre with cladding with or without a coating
- G02B6/02057—Optical fibre with cladding with or without a coating comprising gratings
- G02B6/02066—Gratings having a surface relief structure, e.g. repetitive variation in diameter of core or cladding
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02F—DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colour
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B27/00—Other optical systems; Other optical apparatus
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colour
- G01J3/28—Investigating the spectrum
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Cheben et al. | A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides | |
Redding et al. | Evanescently coupled multimode spiral spectrometer | |
Gatkine et al. | Arrayed waveguide grating spectrometers for astronomical applications: new results | |
Bock et al. | Subwavelength grating crossings for silicon wire waveguides | |
Cheben et al. | Refractive index engineering with subwavelength gratings for efficient microphotonic couplers and planar waveguide multiplexers | |
Nedeljkovic et al. | Silicon photonic devices and platforms for the mid-infrared | |
Muneeb et al. | Demonstration of Silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm | |
Pérez-Galacho et al. | Optical pump-rejection filter based on silicon sub-wavelength engineered photonic structures | |
Wang et al. | Narrow-band waveguide Bragg gratings on SOI wafers with CMOS-compatible fabrication process | |
Hu et al. | Wavelength division (de) multiplexing based on dispersive self-imaging | |
Momeni et al. | Planar photonic crystal microspectrometers in silicon-nitride for the visible range | |
Wang et al. | Deep-etched high-density fused-silica transmission gratings with high efficiency at a wavelength of 1550 nm | |
Hammood et al. | Compact, silicon-on-insulator, series-cascaded, contradirectional-coupling-based filters with> 50 dB adjacent channel isolation | |
Deng et al. | Athermal and flat-topped silicon Mach-Zehnder filters | |
Liu et al. | C-band four-channel CWDM (de-) multiplexers on a thin film lithium niobate–silicon rich nitride hybrid platform | |
Zhan et al. | Silicon nitride polarization beam splitter based on polarization-independent MMIs and apodized Bragg gratings | |
Xie et al. | Silicon nitride/silicon dioxide echelle grating spectrometer for operation near 1.55 μm | |
Zou et al. | Birefringence compensated silicon nanowire arrayed waveguide grating for CWDM optical interconnects | |
Winnie et al. | Passive broadband silicon-on-insulator polarization splitter | |
Zhan et al. | Design and implementation of a si 3 n 4 three-stigmatic-point arrayed waveguide grating with a resolving power over 17,000 | |
Zou et al. | Ultracompact silicon-on-insulator-based reflective arrayed waveguide gratings for spectroscopic applications | |
Zeng et al. | Temperature-insensitive and fabrication-tolerant coarse wavelength division (de) multiplexing on a silica platform using an angled multimode interferometer | |
Kee et al. | Design and fabrication of Poly (dimethylsiloxane) arrayed waveguide grating | |
Bock et al. | Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure | |
Deleau et al. | High-sensitivity integrated SiN rib-waveguide long period grating refractometer |