Bashara et al., 1964 - Google Patents
Electrical conduction in very thin polybutadiene films formed in a glow dischargeBashara et al., 1964
- Document ID
- 3518204594432983866
- Author
- Bashara N
- Doty C
- Publication year
- Publication venue
- Journal of Applied Physics
External Links
Snippet
Films in the thickness range 100 to 500 Å are studied. Ohmic contacts (gold electrodes) are formed only sporadically. In the best example of Ohmic contact, space‐charge‐limited current (SCLC) occurs at a field of 3× 104 V/cm. SCLC is obtained in this and other …
- 239000005062 Polybutadiene 0 title abstract description 16
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
- H01L21/479—Application of electric currents or fields, e.g. for electroforming
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