Nothing Special   »   [go: up one dir, main page]

Meinig et al., 2016 - Google Patents

Tunable Fabry-Pérot interferometer with subwavelength grating reflectors for MWIR microspectrometers

Meinig et al., 2016

Document ID
3146831550074943141
Author
Meinig M
Kurth S
Seifert M
Hiller K
Wecker J
Ebermann M
Neumann N
Gessner T
Publication year
Publication venue
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX

External Links

Snippet

This report presents recent advances in the design and fabrication of a tunable Fabry-Pérot interferometer (FPI) with subwavelength grating (SWG) reflectors, as well as measurement results and applications. The FPI is designed as wavelength selecting element for highly …
Continue reading at www.spiedigitallibrary.org (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colour
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colour
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral line directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colour
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colour
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colour
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colour
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4532—Devices of compact or symmetric construction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/001—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry
    • G01J5/10—Radiation pyrometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter

Similar Documents

Publication Publication Date Title
Ebermann et al. Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review
Wolffenbuttel MEMS-based optical mini-and microspectrometers for the visible and infrared spectral range
Milne et al. Widely tunable MEMS-based Fabry–Perot filter
Blomberg et al. Electrically tunable surface micromachined Fabry–Perot interferometer for visible light
Mao et al. MEMS-based tunable Fabry–Perot filters for adaptive multispectral thermal imaging
Mao et al. Large-area MEMS tunable Fabry–Perot filters for multi/hyperspectral infrared imaging
Rissanen et al. MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers
Gupta et al. Miniature snapshot multispectral imager
Stark et al. MEMS tunable mid-infrared plasmonic spectrometer
Rissanen et al. Tunable MOEMS Fabry-Perot interferometer for miniaturized spectral sensing in near-infrared
Akujärvi et al. MOEMS FPI sensors for NIR-MIR microspectrometer applications
Rissanen et al. Large-aperture MOEMS Fabry-Perot interferometer for miniaturized spectral imagers
Martyniuk et al. Optical microelectromechanical systems technologies for spectrally adaptive sensing and imaging
Cothard et al. Optimizing the efficiency of Fabry-Perot interferometers with silicon-substrate mirrors
Guo et al. Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging
Meinig et al. Tunable Fabry-Pérot interferometer with subwavelength grating reflectors for MWIR microspectrometers
Helke et al. VIS Fabry-Pérot-Interferometer with (HL) 4 PE-Si3N4/PE-SiO2 reflectors on freestanding LP-Si3N4 membranes for surface enhanced Raman spectroscopy
Rissanen et al. Bragg reflectors for large optical aperture MEMS Fabry-Perot interferometers
Helke et al. VIS Fabry-Pérot Interferometer with structured (TiO2/PE-SiO2) ³ Bragg-reflectors on 5mm large LP-Si3N4 membranes
Liao et al. Design and fabrication of large-area tunable MOEMS-based shortwave infrared Fabry-Pérot filters
Gill et al. Ge/BaF2 thin-films for surface micromachined mid-wave and long-wave infrared reflectors
Martyniuk et al. MEMS for multispectral imaging
Gill et al. Large-area narrowband Fabry–Pérot interferometers for long-wavelength infrared spectral sensing
Velicu et al. Miniaturized imaging spectrometer based on Fabry-Perot MOEMS filters and HgCdTe infrared focal plane arrays
US9195048B1 (en) Terahertz tunable filter with microfabricated mirrors