Zhang, 2010 - Google Patents
A nano-tensile testing system for studying nanostructures inside an electron microscope: design, characterization and applicationZhang, 2010
View PDF- Document ID
- 303469557302528264
- Author
- Zhang D
- Publication year
External Links
Snippet
Mechanical properties of nanostructures could be remarkably different from their bulk counterparts owing to scale effects, which have attracted considerable research interest in recent years. However, nanomechanics studies are hindered by the difficulties of conducting …
- 238000013461 design 0 title abstract description 42
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Zhang et al. | In situ electron microscopy mechanical testing of silicon nanowires using electrostatically actuated tensile stages | |
Zhu et al. | A review of microelectromechanical systems for nanoscale mechanical characterization | |
Lin et al. | A micro strain gauge with mechanical amplifier | |
Krylov et al. | The pull-in behavior of electrostatically actuated bistable microstructures | |
US9304072B2 (en) | Micromachined comb drive for quantitative nanoindentation | |
US5751156A (en) | Mechanically controllable break transducer | |
Bazaz et al. | Design, simulation and testing of electrostatic SOI MUMPs based microgripper integrated with capacitive contact sensor | |
Zhang et al. | Double-SOI wafer-bonded CMUTs with improved electrical safety and minimal roughness of dielectric and electrode surfaces | |
US20060186874A1 (en) | System and method for mechanical testing of freestanding microscale to nanoscale thin films | |
Chasiotis et al. | Mechanical properties of thin polysilicon films by means of probe microscopy | |
Zhang et al. | A high-sensitivity and quasi-linear capacitive sensor for nanomechanical testing applications | |
CN112129347A (en) | Multilayer film residual stress and Young modulus online test structure for micro-manufacturing and online extraction method | |
Ardito et al. | The effect of nano-scale interaction forces on the premature pull-in of real-life Micro-Electro-Mechanical Systems | |
Langfelder et al. | Analysis of mode-split operation in MEMS based on piezoresistive nanogauges | |
Zhang | A nano-tensile testing system for studying nanostructures inside an electron microscope: design, characterization and application | |
Pierron et al. | Methodology for low-and high-cycle fatigue characterization with kHz-frequency resonators | |
Mousavi et al. | Mode II adhesion energy analysis of stiction-failed poly-Si cantilevers using a MEMS load cell | |
Jin et al. | Mechanical Researches on Young′ s Modulus of SCS Nanostructures | |
Chuang et al. | Nano-scale fatigue study of LPCVD silicon nitride thin films using a mechanical-amplifier actuator | |
Mukherjee et al. | A new analysis on reduction of undesired beam bending in electrostatic comb drive MEMS actuator | |
Huang et al. | An integrated MEMS device for in-situ four-probe electro-mechanical characterization of PT nanobeam | |
White et al. | Dynamic MEMS devices for multiaxial fatigue and elastic modulus measurement | |
Morozov et al. | Mechanical strength study of SiO2 isolation blocks merged in silicon substrate | |
Saghaeian et al. | Design and development of MEMS-based structures for in-situ characterization of thermo-mechanical behaviour of thin metal films | |
Li | Development of Microelectromechanical Systems for Advanced Nanomechanical Characterization |