Ohtsuchi et al., 1996 - Google Patents
Shock sensors using direct bonding of LiNbO/sub 3/crystalsOhtsuchi et al., 1996
- Document ID
- 3012748393993458229
- Author
- Ohtsuchi T
- Sugimoto M
- Ogura T
- Tomita Y
- Kawasaki O
- Eda K
- Publication year
- Publication venue
- 1996 IEEE Ultrasonics Symposium. Proceedings
External Links
Snippet
We have developed a shock sensor made with a bimorph type cantilever using by a technique of directly bonding piezoelectric single crystals. The cantilever's polarization- inverted structure was achieved by directly bonding LiNbO/sub 3/single-crystal wafers …
- 230000035939 shock 0 title abstract description 26
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Beige et al. | Electromechanical resonances for investigating linear and nonlinear properties of dielectrics | |
| Nakamura et al. | Hysteresis-free piezoelectric actuators using LiNbO3 plates with a ferroelectric inversion layer | |
| EP0802628B1 (en) | Piezoelectric resonator and method for fabricating the same | |
| EP0932044B1 (en) | Bimorph piezoelectric device for acceleration sensor and method of its manufacture | |
| US5994821A (en) | Displacement control actuator | |
| Laidoudi et al. | Numerical investigation of rayleigh, sezawa and love modes in c-axis tilted zno/si for gas and liquid multimode sensor | |
| Ohtsuchi et al. | Shock sensors using direct bonding of LiNbO/sub 3/crystals | |
| Fang et al. | Rotation sensitivity of waves propagating in a rotating piezoelectric plate | |
| Takeuchi et al. | Strain effects on surface acoustic wave velocities in modified PbTiO3 ceramics | |
| Chen et al. | Frequency-temperature compensation of piezoelectric resonators by electric DC bias field | |
| JPH09243656A (en) | Accelerometer and its manufacture | |
| Ostrovskii et al. | Domain resonance in two-dimensional periodically poled ferroelectric resonator | |
| Fritz | Stress effects in two modified lead zirconate titanate ferroelectric ceramics | |
| Kosinski et al. | Stress-induced frequency shifts in langasite thickness-mode resonators | |
| Bdikin et al. | Frequency-dependent electromechanical response in ferroelectric materials measured via piezoresponse force microscopy | |
| Wakatsuki et al. | LiTaO 3 crystal fork vibratory gyroscope | |
| Kawasaki et al. | Variable property crystal resonators by direct bonding techniques | |
| JP2958004B2 (en) | Device using domain-inverted LiNbO 3 substrate | |
| EP4160917A1 (en) | Acoustic wave device | |
| Nakamura et al. | Lamé‐mode piezoelectric resonators using LiNbO3 crystals | |
| Das et al. | Spin-coated piezoelectric-polymer composite based acoustic resonators and transducers | |
| Chen et al. | Effects of mass layer imperfect bonding on the electrical impedance of a quartz crystal microbalance | |
| Zhang et al. | BaTiO3 domain bimorph actuator | |
| Fritze | Determination of optimal crystallographic orientations for LiNbO3 and LiTaO3 bimorph actuators | |
| Sayer et al. | Piezoelectric and ferroelectric devices: Potential and Issues |