Nothing Special   »   [go: up one dir, main page]

Liu et al., 2012 - Google Patents

ZnO/Cu/ZnO multilayer films: Structure optimization and investigation on photoelectric properties

Liu et al., 2012

Document ID
18033593259549876847
Author
Liu X
Li Y
Liu S
Wu H
Cui H
Publication year
Publication venue
Thin Solid Films

External Links

Snippet

A series of ZnO/Cu/ZnO multilayer films has been fabricated from zinc and copper metallic targets by simultaneous RF and DC magnetron sputtering. Numerical simulation of the optical properties of the multilayer films has been carried out in order to guide the …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GASES [GHG] EMISSION, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/54—Material technologies
    • Y02E10/549—Material technologies organic PV cells
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L31/00—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L31/00—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO

Similar Documents

Publication Publication Date Title
Liu et al. ZnO/Cu/ZnO multilayer films: Structure optimization and investigation on photoelectric properties
Li et al. Optical properties of Al-doped ZnO thin films by ellipsometry
Sahu et al. High quality transparent conductive ZnO/Ag/ZnO multilayer films deposited at room temperature
Chen et al. Surface characterization of transparent conductive oxide Al-doped ZnO films
Jeong et al. Preparation and characteristic of ZnO thin film with high and low resistivity for an application of solar cell
Song et al. Investigation of lateral parameter variations of Al-doped zinc oxide films prepared on glass substrates by rf magnetron sputtering
El Hajj et al. Optimization of ZnO/Ag/ZnO multilayer electrodes obtained by Ion Beam Sputtering for optoelectronic devices
Kim et al. Al-doped ZnO/Ag/Al-doped ZnO multilayer films with a high figure of merit
Flickyngerova et al. Structural and optical properties of sputtered ZnO thin films
CN101866708B (en) High-transmissivity flexible transparent conductive film and preparation method thereof
Kumar et al. Investigations on opto-electronical properties of DC reactive magnetron sputtered zinc aluminum oxide thin films annealed at different temperatures
Dimopoulos et al. Characterization of ZnO: Al/Au/ZnO: Al trilayers for high performance transparent conducting electrodes
Wang et al. Influence of Al/Cu thickness ratio and deposition sequence on photoelectric property of ZnO/Al/Cu/ZnO multilayer film on PET substrate prepared by RF magnetron sputtering
Wang et al. Simulation, fabrication, and application of transparent conductive Mo-doped ZnO film in a solar cell
Kim et al. Highly flexible Al-doped ZnO/Ag/Al-doped ZnO multilayer films deposited on PET substrates at room temperature
Zhang et al. Highly transparent conductive F-doped ZnO films in wide range of visible and near infrared wavelength deposited on polycarbonate substrates
Liu et al. Indium tin oxide with titanium doping for transparent conductive film application on CIGS solar cells
Wu et al. Characterization of aluminum-doped zinc oxide thin films by RF magnetron sputtering at different substrate temperature and sputtering power
Kim et al. Control of refractive index by annealing to achieve high figure of merit for TiO2/Ag/TiO2 multilayer films
Sun et al. Optimization of TiO2/Cu/TiO2 multilayers as a transparent composite electrode deposited by electron-beam evaporation at room temperature
Loka et al. Preparation of TiO2/Ag/TiO2 (TAT) multilayer films with optical and electrical properties enhanced by using Cr-added Ag film
Yang et al. Tungsten-doped In2O3 transparent conductive films with high transmittance in near-infrared region
Micali et al. Structural, optical and electrical characterization of ITO films co-doped with Molybdenum
Jo et al. Transparent bifacial a-Si: H solar cells employing silver oxide embedded transparent rear electrodes for improved transparency
Li et al. Effect of thermal shock on ZnO/Ag/ZnO nano-multilayers: Photoelectric property degradation