Kang et al., 2020 - Google Patents
Six degrees-of-freedom direct-driven nanopositioning stage using crab-leg flexuresKang et al., 2020
- Document ID
- 17695252439663797461
- Author
- Kang S
- Lee M
- Choi Y
- Publication year
- Publication venue
- IEEE/ASME Transactions on Mechatronics
External Links
Snippet
This article presents a novel six degrees-of-freedom nanopositioning stage having a low- profile shape. The six degrees-of-freedom motion is achieved in a parallel configuration comprising four crab-leg flexure guide mechanisms and eight electromagnetic actuators …
- 239000011159 matrix material 0 abstract description 24
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