Zengerle et al., 1996 - Google Patents
MicrofluidicsZengerle et al., 1996
- Document ID
- 16961841507753779299
- Author
- Zengerle R
- Sandmaier H
- Publication year
- Publication venue
- MHS'96 Proceedings of the Seventh International Symposium on Micro Machine and Human Science
External Links
Snippet
According to a market study of the year 1994, there were expected significant market shares for miniaturized devices for fluid regulation and control. Now, two years are gone and we try to review in our paper the major improvements and the trends during the last two years …
- 239000012530 fluid 0 abstract description 25
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F04—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micro pumps
- F04B43/046—Micro pumps with piezo-electric drive
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