Nothing Special   »   [go: up one dir, main page]

Nakazawa et al., 2017 - Google Patents

Varifocal scanner using wafer bonding

Nakazawa et al., 2017

Document ID
16652107096904376955
Author
Nakazawa K
Sasaki T
Furuta H
Kamiya J
Kamiya T
Hane K
Publication year
Publication venue
Journal of Microelectromechanical Systems

External Links

Snippet

We present a varifocal mirror integrated with a comb-drive scanner (varifocal scanner) fabricated by using a wafer bonding technology. An Au-Au thermocompression bonding technology is utilized for the integration. The bonding technology enables fabricating the …
Continue reading at ieeexplore.ieee.org (other versions)

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/06—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/001—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating based on interference in an adjustable optical cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICRO-STRUCTURAL TECHNOLOGY
    • B81B—MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators

Similar Documents

Publication Publication Date Title
US9164277B2 (en) Micromechanical device
Nakazawa et al. Varifocal scanner using wafer bonding
Bütefisch et al. Novel micro-pneumatic actuator for MEMS
Koh et al. Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors
JP4401442B2 (en) Manufacturing method for micromechanical devices
Jung et al. High fill-factor two-axis gimbaled tip-tilt-piston micromirror array actuated by self-aligned vertical electrostatic combdrives
Samuelson et al. A large piston displacement MEMS mirror with electrothermal ladder actuator arrays for ultra-low tilt applications
Hishinuma et al. Piezoelectric unimorph microactuator arrays for single-crystal silicon continuous-membrane deformable mirror
Chu et al. Compact low-voltage operation micromirror based on high-vacuum seal technology using metal can
Koh et al. Novel piezoelectric actuation mechanism for a gimbal-less mirror in 2D raster scanning applications
CN106164741B (en) Micro-move device device and the microdevice for using it
Liao et al. A tip-tilt-piston micromirror with symmetrical lateral-shift-free piezoelectric actuators
Jeong et al. A novel microfabrication of a self-aligned vertical comb drive on a single SOI wafer for optical MEMS applications
Bai et al. A 2-D micromachined SOI MEMS mirror with sidewall electrodes for biomedical imaging
Lin et al. A rib-reinforced micro torsional mirror driven by electrostatic torque generators
Du et al. Double-layered vibratory grating scanners for high-speed high-resolution laser scanning
Zhou et al. Scanning micromirrors fabricated by an SOI/SOI wafer-bonding process
Friese et al. Deformable polymer adaptive optical mirrors
Hokari et al. A varifocal convex micromirror driven by a bending moment
Janin et al. Characterization of a fast piezoelectric varifocal MEMS mirror
Inagaki et al. High-resolution piezoelectric MEMS scanner fully integrated with focus-tuning and driving actuators
Kurth et al. A novel 24-kHz resonant scanner for high-resolution laser display
Kudrle et al. Single-crystal silicon micromirror array with polysilicon flexures
Sasaki et al. High-speed and large-amplitude resonant varifocal mirror
Hokari et al. Micro-mirror laser scanner combined with a varifocal mirror