Nothing Special   »   [go: up one dir, main page]

Mahmood et al., 2010 - Google Patents

Spiral scanning: An alternative to conventional raster scanning in high-speed scanning probe microscopes

Mahmood et al., 2010

View PDF
Document ID
15656395004092494653
Author
Mahmood I
Moheimani S
Publication year
Publication venue
Proceedings of the 2010 American Control Conference

External Links

Snippet

A spiral scanning method for high-speed Atomic Force Microscopy (AFM) is described in this paper. In this method, the sample is scanned in a spiral pattern instead of the conventional raster pattern. A spiral scan can be produced by applying single frequency cosine and sine …
Continue reading at www.academia.edu (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G01Q60/34—Tapping mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANO-TECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nano-structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber

Similar Documents

Publication Publication Date Title
Mahmood et al. Fast spiral-scan atomic force microscopy
Mahmood et al. A new scanning method for fast atomic force microscopy
Yong et al. High-speed cycloid-scan atomic force microscopy
US9523707B2 (en) Closed loop controller and method for fast scanning probe microscopy
Schitter et al. Scanning probe microscopy at video-rate
CN107449939B (en) Multi-parameter synchronous measurement method by adopting magnetic drive peak force modulation atomic force microscope
Salapaka et al. Scanning probe microscopy
Yong et al. Video-rate Lissajous-scan atomic force microscopy
US6945099B1 (en) Torsional resonance mode probe-based instrument and method
US8726409B2 (en) Method for driving a scanning probe microscope at elevated scan frequencies
Tabak et al. MEMS-based fast scanning probe microscopes
JP5340119B2 (en) Proximity method of probe and sample in scanning probe microscope
Mahmood et al. Spiral-scan atomic force microscopy: A constant linear velocity approach
Mahmood et al. Spiral scanning: An alternative to conventional raster scanning in high-speed scanning probe microscopes
Mahmood et al. Improvement of accuracy and speed of a commercial AFM using positive position feedback control
Yong et al. Multivariable control designs for piezoelectric tubes
Wang et al. A rate adaptive control method for improving the imaging speed of atomic force microscopy
Fairbairn et al. Improving the scan rate and image quality in tapping mode atomic force microscopy with piezoelectric shunt control
Microscopy Atomic force microscopy
Li et al. High-speed multiparametric imaging through off-resonance tapping AFM with active probe
Cui et al. A high-speed atomic force microscope for precision measurement of microstructured surfaces
El Rifai et al. Dynamics of atomic force microscopes: Experiments and simulations
Yong et al. Control of a high-speed nanopositioner for Lissajous-scan video-rate AFM
Ahtaiba et al. Restoration of an AFM height image using a deflection image at different scanning speeds
KR20240023166A (en) AFM imaging with real-time drift correction