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Suyal et al., 2004 - Google Patents

Enhanced performance of pyroelectric microsensors through the introduction of nanoporosity

Suyal et al., 2004

Document ID
15321930932508954319
Author
Suyal G
Setter N
Publication year
Publication venue
Journal of the European Ceramic Society

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Snippet

Sol-gel process has successfully been applied for the deposition of porous PbZrxTi1− xO3 (x= 0.45, 0.15) thin films on platinized silicon wafers. Addition of a polymer as a volatile phase to the precursor sol prior to spin coating has been proved an excellent method to …
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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    • C04B35/46Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxide or titanates
    • C04B35/462Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxide or titanates based on titanates
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