Nothing Special   »   [go: up one dir, main page]

Casset et al., 2015 - Google Patents

A 256 MEMS membrane digital loudspeaker array based on PZT actuators

Casset et al., 2015

View PDF
Document ID
15386571431965240125
Author
Casset F
Dejaeger R
Laroche B
Desloges B
Leclere Q
Morisson R
Bohard Y
Goglio J
Escato J
Fanget S
Publication year
Publication venue
Procedia Engineering

External Links

Snippet

This paper reports on the development of a unique Digital Loudspeaker Array solution, based on Pb (Zr 0.52, Ti 0.48) O 3 (PZT) thin-film actuated membranes, arranged in a matrix and which operate in a binary manner by emitting short pulses of sound pressure. Using the …
Continue reading at www.sciencedirect.com (PDF) (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/09—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
    • H01L41/0926—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/02—Details
    • H01L41/04—Details of piezo-electric or electrostrictive devices
    • H01L41/047—Electrodes or electrical connection arrangements
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/22—Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
    • H01L41/31—Applying piezo-electric or electrostrictive parts or bodies onto an electrical element or another base
    • H01L41/314—Applying piezo-electric or electrostrictive parts or bodies onto an electrical element or another base by depositing piezo-electric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/113—Piezo-electric or electrostrictive devices with mechanical input and electrical output, e.g. generators, sensors
    • H01L41/1132—Sensors
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/16—Selection of materials

Similar Documents

Publication Publication Date Title
US12058939B2 (en) Piezoelectric MEMS microphone
US11950052B2 (en) Acoustic transducer with gap-controlling geometry and method of manufacturing an acoustic transducer
Casset et al. A 256 MEMS membrane digital loudspeaker array based on PZT actuators
US10575075B2 (en) Piezoelectric array elements for sound reconstruction with a digital input
US9049522B2 (en) Piezoelectric microspeaker and method of fabricating the same
EP3514388B1 (en) Piezoelectric transducer
Yildirim et al. Piezoelectric membrane actuators for micropump applications using PVDF-TrFE
CN107396276B (en) Microelectromechanical device, array of microelectromechanical devices, method of making a microelectromechanical device, and method of operating a microelectromechanical device
Wang et al. Highly sensitive piezoelectric micromachined ultrasonic transducer (pMUT) operated in air
Dejaeger et al. Development and characterization of a piezoelectrically actuated MEMS digital loudspeaker
Fanget et al. Low voltage MEMS digital loudspeaker array based on thin-film PZT actuators
Arevalo et al. Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator
Chen et al. E-beam evaporated polysilicon for lead zirconate titanate-based micro-actuators
Arevalo et al. MEMS acoustic pixel
Arevalo et al. MEMS digital parametric loudspeaker
Casset et al. PZT actuated MEMS membrane characterization and post simulation for digital loudspeaker array application
Muralidhar et al. Design and simulation of polymer piezo-electric MEMS microphone
Lin et al. Air-coupled piezoelectric micromachined ultrasonic transducer array based on low-cost and large remnant polarization PZT thin film
Tipsawat Released Piezoelectric Thin Films for Piezoelectric Micromachined Ultrasound Transducers (PMUT)
Kusano Large Amplitude Piezoelectric Micromachined Ultrasonic Transducers for Airborne Applications
Lee et al. High-sensitive MEMS acoustic sensor using PMN-PT single-crystal diaphragm
Casset et al. Ultra-thin polymer loudspeaker based on electro active polymer actuation
Casset et al. Optimization of electrodes design for PZT thin-film actuated membranes
Tang et al. PZT Mems Tunable Liquid Lens with Integrated Piezoresistive Position Sensor
Liu et al. Development of an air-coupled piezoelectric micromachined ultrasonic transducer using sol-gel PZT thin film for fast-prototyping