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Bakin et al., 2007 - Google Patents

ZnMgO‐ZnO quantum wells embedded in ZnO nanopillars: Towards realisation of nano‐LEDs

Bakin et al., 2007

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Document ID
14996249465300033384
Author
Bakin A
El‐Shaer A
Mofor A
Al‐Suleiman M
Schlenker E
Waag A
Publication year
Publication venue
physica status solidi c

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Abstract ZnO thin films, ZnMgO/ZnO heterostructures and ZnO nanostructures were fabricated using molecular beam epitaxy (MBE), vapour phase transport (VPT) and an aqueous chemical growth approach (ACG). The possibility to employ several fabrication …
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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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