Lee et al., 2002 - Google Patents
Bonding of silicon scanning mirror having vertical comb fingersLee et al., 2002
View PDF- Document ID
- 14722598645784550323
- Author
- Lee J
- Ko Y
- Choi B
- Kim J
- Jeon D
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
External Links
Snippet
A 1500 μm× 1200 μm silicon scanning mirror has been fabricated by using anodic bonding and flip chip bonding. This scanning mirror is mainly composed of two structures having vertical comb fingers. By anodic bonding between the silicon wafer and the Pyrex glass …
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Si] 0 title abstract description 41
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
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