Nothing Special   »   [go: up one dir, main page]

Wang et al., 2004 - Google Patents

Development of 1× 4 MEMS-based optical switch

Wang et al., 2004

Document ID
14637139880129223754
Author
Wang Z
Cao W
Shan X
Xu J
Lim S
Noell W
De Rooij N
Publication year
Publication venue
Sensors and Actuators A: Physical

External Links

Snippet

In this paper, a novel 1× 4 optical switch has been developed based on the DRIE vertical mirror technology. Three microactuated vertical silicon mirrors and five tapered/lensed fibers were employed to perform the 1× 4 switch function. The comb actuators drive the mirrors …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576—Temperature or heat actuation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3594—Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3586—Control or adjustment details, e.g. calibrating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a micro-bench type, i.e. with micro-machined additional mechanical structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/001—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating based on interference in an adjustable optical cavity

Similar Documents

Publication Publication Date Title
Hoffmann et al. Bulk silicon micromachining for MEMS in optical communication systems
Lee et al. Free-space fiber-optic switches based on MEMS vertical torsion mirrors
Li et al. Advanced fiber optical switches using deep RIE (DRIE) fabrication
Noell et al. Applications of SOI-based optical MEMS
Ollier Optical MEMS devices based on moving waveguides
Marxer et al. Micro-Opto-Mechanical 2\; *\; 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation
US6801679B2 (en) Multifunctional intelligent optical modules based on planar lightwave circuits
US20030108274A1 (en) Mode coupled optomechanical devices
Wang et al. Development of 1× 4 MEMS-based optical switch
Lee et al. Study of electrothermal V-beam actuators and latched mechanism for optical switch
Liu et al. An optical crossconnect (OXC) using drawbridge micromirrors
Yang et al. A novel 2× 2 MEMS optical switch using the split cross-bar design
Syms et al. Optical MEMS for telecoms
Lee et al. Development and evolution of MOEMS technology in variable optical attenuators
Helin et al. Self-aligned micromachining process for large-scale, free-space optical cross-connects
Dellmann et al. 4× 4 matrix switch based on MEMS switches and integrated waveguides
Robinson MEMS technology-micromachines enabling the" all optical network"
Guerre et al. Fabrication of vertical digital silicon optical micromirrors on suspended electrode for guided-wave optical switching applications
Liu et al. Moving Polymer Waveguides and Latching Actuator for 2$\times $2 MEMS Optical Switch
Yang et al. A 1× 2 optical fiber switch using a dual-thickness SOI process
Li et al. Design, fabrication and characterization of a high fill-factor micromirror array for wavelength selective switch applications
Mita et al. An out-of-plane polysilicon actuator with a smooth vertical mirror for optical fiber switch application
Ollier et al. Micro-opto-electro-mechanical systems: recent developments and LETI's activities
WO2002017004A2 (en) Mode coupled optomechanical devices
Chu et al. MOEMS: enabling technologies for large optical cross-connects