Perng et al., 2007 - Google Patents

Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
  • G01N21/84—Systems specially adapted for particular applications
  • G01N21/88—Investigating the presence of flaws or contamination
  • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
  • G01N21/956—Inspecting patterns on the surface of objects
  • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
• • G—PHYSICS
  • G06—COMPUTING; CALCULATING; COUNTING
  • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
  • G06T2207/00—Indexing scheme for image analysis or image enhancement
  • G06T2207/30—Subject of image; Context of image processing
  • G06T2207/30108—Industrial image inspection
  • G06T2207/30148—Semiconductor; IC; Wafer
• • G—PHYSICS
  • G06—COMPUTING; CALCULATING; COUNTING
  • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
  • G06T7/00—Image analysis
  • G06T7/0002—Inspection of images, e.g. flaw detection
  • G06T7/0004—Industrial image inspection
  • G06T7/001—Industrial image inspection using an image reference approach
• • G—PHYSICS
  • G06—COMPUTING; CALCULATING; COUNTING
  • G06K—RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
  • G06K9/00—Methods or arrangements for reading or recognising printed or written characters or for recognising patterns, e.g. fingerprints
  • G06K9/00006—Acquiring or recognising fingerprints or palmprints
  • G06K9/00013—Image acquisition
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
  • G01B11/00—Measuring arrangements characterised by the use of optical means
  • G01B11/24—Measuring arrangements characterised by the use of optical means for measuring contours or curvatures
• • G—PHYSICS
  • G06—COMPUTING; CALCULATING; COUNTING
  • G06K—RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
  • G06K2209/00—Indexing scheme relating to methods or arrangements for reading or recognising printed or written characters or for recognising patterns, e.g. fingerprints
  • G06K2209/19—Recognition of objects for industrial automation

Similar Documents