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Koval et al., 2020 - Google Patents

Reactive ion beam sputtered molybdenum oxide thin films for optoelectronic application

Koval et al., 2020

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Document ID
14297827731267515627
Author
Koval V
Dusheyko M
Ivashchuk A
Mamykin S
Ievtushenko A
Barbash V
Koliada M
Lapshuda V
Filov R
Publication year
Publication venue
2020 IEEE 40th International Conference on Electronics and Nanotechnology (ELNANO)

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Molybdenum oxide thin films were synthesized by reactive ion beam sputtering technique. The effect of deposition temperature and annealing on surface morphology, electrical and optical parameters of molybdenum oxide thin films and heterojunctions based on them were …
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