Zhu et al., 2012 - Google Patents
Material nonlinearity limits on a Lamé-mode single crystal bulk resonatorZhu et al., 2012
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- 13782174691553210566
- Author
- Zhu H
- Tu C
- Lee J
- Publication year
- Publication venue
- 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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In this paper, the material nonlinearity in single crystal silicon (SCS) square-plate bulk-mode resonators is described as a strain-dependent shear modulus and incorporated into a lumped element model. The equivalent circuit of the fully differential setup is developed for …
- 239000000463 material 0 title abstract description 24
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