Desai et al., 2006 - Google Patents
Carbon fibers as a novel material for high-performance microelectromechanical systems (MEMS)Desai et al., 2006
- Document ID
- 1347502391777448581
- Author
- Desai S
- Netravali A
- Thompson M
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
External Links
Snippet
We report the development of novel carbon fiber-integrated MEMS (FIM) structures which can achieve extremely large deformations at high speeds with nearly fatigue-free behavior. FIM cantilevers fabricated using single 5 µm diameter carbon fibers demonstrated tip …
- 229920000049 Carbon (fiber) 0 title abstract description 26
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
- G02B26/08—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
- G02B26/0816—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
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