Al-Chalabi, 1986 - Google Patents
Transient annealing of planar waveguides formed by 4He+ ion implantation into LiNbO3Al-Chalabi, 1986
- Document ID
- 13239904889824586157
- Author
- Al-Chalabi S
- Publication year
- Publication venue
- Radiation Effects
External Links
Snippet
Abstract Ion implantation with MeV 4He+ ions has been used by several workers to fabricate planar optical waveguides in LiNbO3. The process of fabrication of these waveguides includes a 30 min furnace anneal in oxygen to remove the radiation damage from the …
- 238000000137 annealing 0 title abstract description 20
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/24—Coupling light guides
- G02B6/255—Splicing of light guides, e.g. by fusion or bonding
- G02B6/2551—Splicing of light guides, e.g. by fusion or bonding using thermal methods, e.g. fusion welding by arc discharge, laser beam, plasma torch
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
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