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Goossen et al., 1995 - Google Patents

GaAs MQW modulators integrated with silicon CMOS

Goossen et al., 1995

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Document ID
12782978613915102817
Author
Goossen K
Walker J
D'asaro L
Hui S
Tseng B
Leibenguth R
Kossives D
Bacon D
Dahringer D
Chirovsky L
Lentine A
Miller D
Publication year
Publication venue
IEEE Photonics Technology Letters

External Links

Snippet

We demonstrate integration of GaAs-AlGaAs multiple quantum well modulators to silicon CMOS circuitry via flip-chip solder-bonding followed by substrate removal. We obtain 95% device yield for 32/spl times/32 arrays of devices with 15 micron solder pads. We show …
Continue reading at ee.stanford.edu (PDF) (other versions)

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    • H01L2924/1025—Semiconducting materials
    • H01L2924/1026—Compound semiconductors
    • H01L2924/1032—III-V
    • H01L2924/10329—Gallium arsenide [GaAs]
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