Nothing Special   »   [go: up one dir, main page]

Sudraud et al., 1978 - Google Patents

Contribution of field effects to the achievement of higher brightness ion sources

Sudraud et al., 1978

Document ID
12615292267004363893
Author
Sudraud P
Van de Walle J
Colliex C
Castaing R
Publication year
Publication venue
Surface Science

External Links

Snippet

The use of field effects for the delivery of high brightness ion beams is considered. Two solutions have been experimentally investigated, which are intended to increase the supply function in a field ion microscope: a liquid fed field ionization source and a field desorption …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J45/00—Discharge tubes functioning as thermionic generators
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted to the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps

Similar Documents

Publication Publication Date Title
Clampitt et al. Miniature ion sources for analytical instruments
Swanson et al. Angular confinement of field electron and ion emission
Nagaoka et al. Field emission spectroscopy from field-enhanced diffusion-growth nano-tips
Lang et al. Bremsstrahlung isochromat spectroscopy using a modified XPS apparatus
Li et al. Absolute emission current density of O− from 12 CaO⋅ 7 Al 2 O 3 crystal
US7884359B2 (en) Integrally gated carbon nanotube ionizer device
Knápek et al. Explanation of the quasi-harmonic field emission behaviour observed on epoxy-coated polymer graphite cathodes
Sudraud et al. Contribution of field effects to the achievement of higher brightness ion sources
Geiger et al. Modifications to an analytical mass spectrometer for the soft-landing experiment
Waugh et al. The application of liquid metal ion sources to SIMS
CA2382051A1 (en) Field emitters and devices
Dworetsky et al. Electron bombardment ion source for low energy beams
Alton High‐intensity, heavy negative ion sources based on the sputter principle
Biesecker et al. Ion beam source for soft-landing deposition
JPS584423B2 (en) ion gun
Ding et al. Temporal and spatial study of differently charged ions emitted by ns-laser-produced tungsten plasmas using time-of-flight mass spectroscopy
US9583298B2 (en) Nano granular materials (NGM) material, methods and arrangements for manufacturing said material and electrical components comprising said material
Daley et al. Lithium and Sodium Surface Ionization Ion Source Operation and Efficiency
Konopsky et al. Laser resonance photoelectron microscopy with a subwavelength-high spatial resolution: the first observation of single color centers on surface
Egorov et al. Field emission cathode-based devices and equipment
Dudnikov Electrohydrodynamic emitters of ion beams
Afanas’ ev et al. Influence of charged particles on the fullerene formation process
Sakai et al. Compact metal-ion beam source using thermal contact ionizer
Guharay et al. High-resolution primary ion beam probe for SIMS
Popov et al. High-current pulsed vacuum-arc evaporator for surface-alloying technologies