Sopeña et al., 2024 - Google Patents
Multiphoton-initiated laser writing of semiconductors using nanosecond mid-infrared pulsesSopeña et al., 2024
View HTML- Document ID
- 12669099118162384374
- Author
- Sopeña P
- Ganguly N
- Spühler G
- Selivanau A
- Grojo D
- Publication year
- Publication venue
- Optics & Laser Technology
External Links
Snippet
The advent of more powerful mid-infrared nanosecond laser sources allows using them as attractive tools in material laser processing. For semiconductor bulk processing, laser intensities must remain modest to avoid detrimental nonlinear propagation and pre-focal …
- 239000004065 semiconductor 0 title abstract description 38
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
- G02F1/35—Non-linear optics
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Chambonneau et al. | In‐Volume Laser Direct Writing of Silicon—Challenges and Opportunities | |
Zhang et al. | Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser | |
Saraeva et al. | Effect of fs/ps laser pulsewidth on ablation of metals and silicon in air and liquids, and on their nanoparticle yields | |
Ionin et al. | Femtosecond laser color marking of metal and semiconductor surfaces | |
Guizard et al. | Femtosecond laser ablation of transparent dielectrics: measurement and modelisation of crater profiles | |
JP2015520938A (en) | Laser nano machining apparatus and method | |
Leyder et al. | Non-linear absorption of focused femtosecond laser pulses at 1.3 μm inside silicon: Independence on doping concentration | |
Chambonneau et al. | Transverse ultrafast laser inscription in bulk silicon | |
Wang et al. | Burst mode enabled ultrafast laser inscription inside gallium arsenide | |
Mingareev et al. | Spatial tailoring of the refractive index in infrared glass-ceramic films enabled by direct laser writing | |
Anghel et al. | Femtosecond laser ablation of TiO2 films for two-dimensional photonic crystals | |
Kazansky et al. | Self-assembled sub-wavelength structures and form birefringence created by femtosecond laser writing in glass: properties and applications | |
Blothe et al. | Nanostructured back surface amorphization of silicon with picosecond laser pulses | |
FR3053155A1 (en) | METHODS AND SYSTEMS FOR OPTICALLY FUNCTIONALIZING A SEMICONDUCTOR MATERIAL SAMPLE | |
Penczak Jr et al. | The mechanism for continuum polarization in laser induced breakdown spectroscopy of Si (111) | |
Sopeña et al. | Multiphoton-initiated laser writing of semiconductors using nanosecond mid-infrared pulses | |
Garcia-Lechuga et al. | Probing matter by light | |
Grigorev | Laser processing of transparent semiconductor materials | |
Haight et al. | High resolution material ablation and deposition with femtosecond lasers and applications to photomask repair | |
Liu et al. | Damage mechanism in plasma evolution of nanosecond laser-induced damage of germanium sheets in air and vacuum | |
Haight et al. | Femtosecond laser ablation and deposition of metal films on transparent substrates with applications in photomask repair | |
Zhao et al. | Study of textured ZnS irradiated by femtosecond laser pulses | |
Ahsan et al. | Characterization of femtosecond laser filamentation in soda-lime glass | |
Puerto et al. | Dynamics of phase transformations in Si and Ge upon strong excitation with UV femtosecond laser pulses | |
Sisken | Distribution of laser induced heating in multi-component chalcogenide glass and its associated effects |