Nothing Special   »   [go: up one dir, main page]

San Paulo et al., 2007 - Google Patents

Mode shape imaging of out-of-plane and in-plane vibrating RF micromechanical resonators by atomic force microscopy

San Paulo et al., 2007

Document ID
12577948911898316599
Author
San Paulo A
Quevy E
Black J
Howe R
White R
Bokor J
Publication year
Publication venue
Microelectronic engineering

External Links

Snippet

The application of atomic force microscopy (AFM) for mode shape imaging of both out-of- plane and in-plane vibrating RF micromechanical resonators is described in this work. The modulation of the amplitude of the resonator together with the lock-in detection of the AFM …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on micro-sensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02827—Elastic parameters, strength or force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/12—Analysing solids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes

Similar Documents

Publication Publication Date Title
Mattila et al. A 12 MHz micromechanical bulk acoustic mode oscillator
Lee et al. 5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million
Piekarski et al. Surface micromachined piezoelectric resonant beam filters
Feng et al. A self-sustaining ultrahigh-frequency nanoelectromechanical oscillator
Defay et al. PZT thin films integration for the realisation of a high sensitivity pressure microsensor based on a vibrating membrane
Mattila et al. 14 MHz micromechanical oscillator
Ali et al. Electrical characterization of piezoelectric-on-silicon contour mode resonators fully immersed in liquid
Du et al. Internal resonance phenomena in coupled ductile cantilevers with triple frequency ratio-part II: a mass sensitivity amplification schemes
Isarakorn et al. Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications
Herth et al. Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer
Lee et al. Measurement uncertainties in resonant characteristics of MEMS resonators
Surappa et al. Characterization of a parametric resonance based capacitive ultrasonic transducer in air for acoustic power transfer and sensing
Li et al. Resonance enhancement of micromachined resonators with strong mechanical-coupling between two degrees of freedom
Van Toan et al. Fabrication and evaluation of capacitive silicon resonators with piezoresistive heat engines
Soysal et al. Fabrication, electrical characterization and sub-ng mass resolution of sub-μm air-gap bulk mode MEMS mass sensors for the detection of airborne particles
San Paulo et al. Mode shape imaging of out-of-plane and in-plane vibrating RF micromechanical resonators by atomic force microscopy
Jaakkola et al. Piezoelectrically transduced single-crystal-silicon plate resonators
Aditi et al. Fabrication of MEMS xylophone magnetometer by anodic bonding technique using SOI wafer
Sviličić et al. Piezoelectric sensing of electrothermally actuated silicon carbide MEMS resonators
Gaspar et al. Electrostatically actuated thin-film amorphous silicon microbridge resonators
Mahdavi et al. Thin film piezoelectric-on-silicon elliptical resonators with low liquid phase motional resistances
US6305226B1 (en) Method and apparatus for imaging acoustic fields in high-frequency acoustic resonators
Ilyas et al. A MEMS coupled resonator for frequency filtering in air
CN113507274B (en) Method and device for realizing continuous adjustment of sidebands of micro resonator by using injection locking
Campanella et al. High-frequency sensor technologies for inertial force detection based on thin-film bulk acoustic wave resonators (FBAR)