Lee et al., 2019 - Google Patents
CMOS-compatible mid-infrared MEMS thermopile integrated with an RTD for flame sensing in IoT applicationLee et al., 2019
- Document ID
- 12371425566768116045
- Author
- Lee J
- Kwak M
- Kim K
- Im J
- Kim J
- Moon S
- Publication year
- Publication venue
- 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)
External Links
Snippet
Mid-infrared (MIR) detectors compatible to CMOS process are critical devices for efficient cost, compact MIR flame sensing systems in internet of things (IoT) application. In this work, we report a RTD-integrated CMOS-MEMS MIR detector with a metamaterial for effectively …
- 238000000034 method 0 abstract description 22
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry
- G01J5/02—Details
- G01J5/08—Optical features
- G01J5/0803—Optical elements not provided otherwise, e.g. optical manifolds, gratings, holograms, cubic beamsplitters, prisms, particular coatings
- G01J5/0806—Optical elements not provided otherwise, e.g. optical manifolds, gratings, holograms, cubic beamsplitters, prisms, particular coatings using focussing or collimating elements, e.g. lenses or mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry
- G01J5/02—Details
- G01J5/04—Casings Mountings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry
- G01J5/02—Details
- G01J5/08—Optical features
- G01J5/0893—Arrangements to attach devices to a pyrometer, i.e. attaching an optical interface; Spatial relative arrangement of optical elements, e.g. folded beam path
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry
- G01J5/10—Radiation pyrometry using electric radiation detectors
- G01J5/12—Radiation pyrometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
- G01J5/14—Electrical features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry
- G01J5/10—Radiation pyrometry using electric radiation detectors
- G01J5/20—Radiation pyrometry using electric radiation detectors using resistors, thermistors, or semi-conductors sensitive to radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry
- G01J5/02—Details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation
- G01J2005/067—Compensating for environment parameters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colour
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechnical part supplementary adjustable parts
- G01J1/0488—Optical or mechnical part supplementary adjustable parts with spectral filtering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colour
- G01J3/28—Investigating the spectrum
- G01J3/30—Measuring the intensity of spectral line directly on the spectrum itself
- G01J3/36—Investigating two or more bands of a spectrum by separate detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Xu et al. | MEMS-based thermoelectric infrared sensors: A review | |
EP1162440B1 (en) | Infrared sensing element and temperature measuring device | |
Syllaios et al. | Amorphous silicon microbolometer technology | |
US6335478B1 (en) | Thermopile infrared sensor, thermopile infrared sensors array, and method of manufacturing the same | |
Bhan et al. | Uncooled infrared microbolometer arrays and their characterisation techniques | |
US6300554B1 (en) | Method of fabricating thermoelectric sensor and thermoelectric sensor device | |
EP3408629B1 (en) | An ir detector array device | |
US7385199B2 (en) | Microbolometer IR focal plane array (FPA) with in-situ mirco vacuum sensor and method of fabrication | |
US20140326883A1 (en) | Nanowire thermoelectric infrared detector | |
CN102244190A (en) | Thermopile infrared detector | |
Zhou et al. | CMOS compatible midinfrared wavelength-selective thermopile for high temperature applications | |
Lee et al. | CMOS-compatible mid-infrared MEMS thermopile integrated with an RTD for flame sensing in IoT application | |
Graf et al. | Seebeck's effect in micromachined thermopiles for infrared detection. A review. | |
Dong et al. | Design and fabrication of single-chip a-Si TFT-based uncooled infrared sensors | |
Chang et al. | Novel absorber membrane and thermocouple designs for CMOS-MEMS thermoelectric infrared sensor | |
Sesek et al. | A microbolometer system for radiation detection in the THz frequency range with a resonating cavity fabricated in the CMOS technology | |
Hasan et al. | High-Responsivity Vacuumless Microbolometer Arrays Microfabricated on Thermally Isolated Suspended Membranes | |
Chowdhury et al. | Development of plasmonic MEMS CMOS infrared sensors for occupancy detection | |
Modarres-Zadeh et al. | Parylene supported 20um* 20um uncooled thermoelectric infrared detector with high fill factor | |
JP5288483B2 (en) | Temperature difference detector by Seebeck current integration | |
US10107743B2 (en) | Thermal infrared sensor and gas measuring apparatus | |
Risquez et al. | Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection | |
Liu et al. | Uncooled Infrared Detection Using CMOS Thermomechanical Capacitive Sensors | |
Tawfik | Novel architectures for capacitive micromachined sensors and actuators | |
Zhou et al. | Ultra-Small Pixel IR Sensing Array Fabricated with a Post-CMOS Compatible Process |