Al Halhouli et al., 2012 - Google Patents
Development and testing of a synchronous micropump based on electroplated coils and microfabricated polymer magnetsAl Halhouli et al., 2012
View PDF- Document ID
- 11823357802984050428
- Author
- Al Halhouli A
- Kilani M
- Waldschik A
- Phataralaoha A
- Büttgenbach S
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
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In this paper, the concept, fabrication, activation and testing of a novel synchronous micropump based on microfabricated copper coils and polymer magnets are presented. The pump works by the synchronized rotation of two polymer magnets in an annular SU-8 …
- 229920000642 polymer 0 title abstract description 32
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