Nothing Special   »   [go: up one dir, main page]

Ashkenasi et al., 2012 - Google Patents

Machining of glass and quartz using nanosecond and picosecond laser pulses

Ashkenasi et al., 2012

Document ID
11561900232572126550
Author
Ashkenasi D
Kaszemeikat T
Mueller N
Lemke A
Eichler H
Publication year
Publication venue
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII

External Links

Snippet

New laser processing strategies in micro processing of glass, quartz and other optically transparent materials are being developed with increasing effort. Utilizing diode-pumped solid-state laser generating nanosecond pulsed green (532 nm) laser light in conjunction …
Continue reading at www.spiedigitallibrary.org (other versions)

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626—Energy control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0736—Shaping the laser spot into an oval shape, e.g. elliptic shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2201/00—Articles made by soldering, welding or cutting by applying heat locally
    • B23K2201/36—Electric or electronic devices
    • B23K2201/40—Semiconductor devices

Similar Documents

Publication Publication Date Title
Ashkenasi et al. Machining of glass and quartz using nanosecond and picosecond laser pulses
CN105209218B (en) The method and apparatus that the processing based on laser is carried out to flat substrate
KR101904130B1 (en) Method of closed form release for brittle materials using burst ultrafast laser pulses
Huang et al. Micro-hole drilling and cutting using femtosecond fiber laser
Nisar et al. Laser glass cutting techniques—A review
KR101839505B1 (en) Method and apparatus for laser processing of silicon by filamentation of burst ultrafast laser pulses
KR101972466B1 (en) Method and system for scribing brittle material followed by chemical etching
EP2837462B1 (en) Photo acoustic compression method for machining a transparent target
Ashkenasi et al. Laser trepanning for industrial applications
JP5089735B2 (en) Laser processing equipment
TWI469841B (en) Method and apparatus for machining workpieces using tilted laser scanning
JP4584322B2 (en) Laser processing method
KR101181719B1 (en) Substrate Dicing Method by Nano Void Array Formation using Femtosecond Pulse Lasers
Gečys et al. Nanosecond Laser Processing of Soda-Lime Glass.
Lopez et al. Glass cutting using ultrashort pulsed Bessel beams
JP5378314B2 (en) Laser cutting method
Stonyte et al. Nonthermal ablation of crystalline c-cut Sapphire using femtosecond deep UV laser pulses
Niino et al. Laser cutting of carbon fiber reinforced plastics (CFRP) by UV pulsed laser ablation
Ashkenasi et al. Advanced laser micro machining using a novel trepanning system
JP5613809B2 (en) Laser cutting method and laser processing apparatus
JP2022504439A (en) Systems and methods for drilling vias in permeable materials
Sen et al. An experimental investigation into fibre laser micro-drilling of quartz
Ashkenasi et al. Laser micro machining of glass, ceramics and metals utilizing trepanning optics
Stonyte et al. Photomechanical ablation of silicate glasses using femtosecond deep-UV laser pulses
Bovatsek et al. Ultrashort pulse micromachining with the 10-μJ FCPA fiber laser