Uehara et al., 2001 - Google Patents
Microfabrication grinding by ultraprecision microform generating machine employed with plasma discharge truing and ELID techniqueUehara et al., 2001
View PDF- Document ID
- 11342974239663281198
- Author
- Uehara Y
- Ohmori H
- Yamagata Y
- Moriyasu S
- Makinouchi A
- Morita S
- Publication year
- Publication venue
- RIKEN REVIEW
External Links
Snippet
In this study, we attempted the development of the ELID grinding system and plasma truing instrument which was required mainly for the ultraprecision microform generating machine using silicon wafer slicing technology. We also performed a detailed investigation to …
- 210000002381 Plasma 0 title abstract description 6
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