Nothing Special   »   [go: up one dir, main page]

Park et al., 2009 - Google Patents

A microvalve with integrated sensors and customizable normal state for low-temperature operation

Park et al., 2009

View PDF
Document ID
1127120631525981943
Author
Park J
Evans A
Rasmussen K
Brosten T
Nellis G
Klein S
Gianchandani Y
Publication year
Publication venue
Journal of Microelectromechanical Systems

External Links

Snippet

This paper reports on design, fabrication, and testing of a piezoelectrically actuated microvalve with integrated sensors for flow modulation at low temperatures. One envisioned application is to control the flow of a cryogen for distributed cooling with a high degree of …
Continue reading at ftp.eecs.umich.edu (PDF) (other versions)

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Micro-valves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Micro-valves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications

Similar Documents

Publication Publication Date Title
Jerman Electrically activated normally closed diaphragm valves
Henning et al. Microfluidic MEMS for semiconductor processing
Jerman Electrically-activated, micromachined diaphragm valves
Böhm et al. A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator
Vandelli et al. Development of a MEMS microvalve array for fluid flow control
Oosterbroek et al. A micromachined pressure/flow-sensor
Rich et al. A high-flow thermopneumatic microvalve with improved efficiency and integrated state sensing
Roberts et al. A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems
Jeong et al. Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm
Henning Microfluidic mems
Bergstrom et al. Thermally driven phase-change microactuation
Park et al. A microvalve with integrated sensors and customizable normal state for low-temperature operation
Henning et al. A thermopneumatically actuated microvalve for liquid expansion and proportional control
Park et al. A piezoelectric microvalve for cryogenic applications
Holke et al. An electrostatic, on/off microvalve designed for gas fuel delivery for the MIT microengine
US20140044568A1 (en) Micropump having a flowmeter, and method for producing same
Messenger et al. Piezoresistive feedback control of a MEMS thermal actuator
Han et al. Smooth contact capacitive pressure sensors in touch-and peeling-mode operation
US7789371B2 (en) Low-power piezoelectric micro-machined valve
Li et al. Development of a high differential pressure piezoelectric active proportional regulation valve using a bending transducer
Xu et al. A MEMS multi-sensor chip for gas flow sensing
Lee et al. Fabrication, characterization, and computational modeling of a piezoelectrically actuated microvalve for liquid flow control
Kersjes et al. A fast liquid flow sensor with thermal isolation by oxide-filled trenches
Trah et al. Micromachined valve with hydraulically, actuated membrane, subsequent to a thermoelectrically controlled bimorph cantilever
Franz et al. A silicon microvalve with integrated flow sensor