Yeung et al., 1957 - Google Patents
An RF probe technique for the measurement of plasma electron concentrations in the presence of negative ionsYeung et al., 1957
- Document ID
- 11028160568129193615
- Author
- Yeung T
- Sayers J
- Publication year
- Publication venue
- Proceedings of the Physical Society. Section B
External Links
Snippet
A method of measuring the electron population in the presence of both positive and negative ions has been developed. The method is based on the measurement of the local plasma electron resonance frequency, from which the free electron density may be calculated on the …
- 210000002381 Plasma 0 title abstract description 25
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
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