Nomura et al., 2006 - Google Patents
High temperature operation AlGaN/GaN HFET with a low on-state resistance, a high breakdown voltage and a fast switching capacityNomura et al., 2006
- Document ID
- 10978821427521009634
- Author
- Nomura T
- Kambayashi H
- Masuda M
- Ishii S
- Ikeda N
- Lee J
- Yoshida S
- Publication year
- Publication venue
- 2006 IEEE International Symposium on Power Semiconductor Devices and IC's
External Links
Snippet
Improved characteristics of an AlGaN/GaN HFET are reported. We introduced new fabrication processes using Ti/AlSi/Mo ohmic electrode and a low refractive index SiN x to decrease the contact resistance and gate leakage current. The AlGaN/GaN HFET showed …
- 229910002601 GaN 0 title abstract description 31
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