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Ehrmann et al., 2010 - Google Patents

Ellipsometric studies on ZnO: Al thin films: Refinement of dispersion theories

Ehrmann et al., 2010

Document ID
10567764997386193089
Author
Ehrmann N
Reineke-Koch R
Publication year
Publication venue
Thin Solid Films

External Links

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We characterize sputter-deposited aluminum-doped zinc oxide (ZnO: Al) thin films on glass and silicon substrates by variable-angle spectroscopic ellipsometry in the spectral range of 240nm to 1700nm. The model dielectric function includes the excitonic effects of direct band …
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides

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